Low temperature lift-off patterning for glassy carbon films

Patent metadata

Field	Value
Publication number	US-11220742-B2
Application number	US-201916362128-A
Country	US
Kind code	B2
Filing date	Mar 22, 2019
Priority date	Mar 22, 2019
Publication date	Jan 11, 2022
Grant date	Jan 11, 2022

Abstract

A method of fabricating a glassy carbon film is described. The method includes forming a soluble layer on a substrate, forming a lift-off stack that includes a lift-off mask layer and a hard-mask layer, and forming a pattern in the lift-off stack to expose a portion of the soluble layer. The exposed portions of the soluble layer are removed to expose a portion of the substrate. A carbon material is over the exposed portion of the substrate. The soluble layer is dissolved in a solvent, and the lift-off stack is lifted-off.

First claim

What is claimed is:

1. A method of fabricating glassy carbon film, the method comprising:
forming a soluble layer on a substrate, the soluble layer comprising an oxide that is soluble in water or a hydrogen fluoride solution comprising hydrogen fluoride and water;
forming a lift-off stack on the soluble layer, the lift-off stack comprising a lift-off mask layer and a hard-mask layer;
forming a pattern in the lift-off stack to expose a portion of the soluble layer;
recessing the exposed portion of the soluble layer by about 70% to about 90% using reactive ion etching;
removing the exposed portions of the soluble layer using a wet etch comprising water or the hydrogen fluoride solution to expose a portion of the substrate and sidewalls of remaining portions of the soluble layer, wherein the removing also forms an undercut portion under the lift-off mask layer where some of the unexposed portion of the soluble layer is removed;
depositing a carbon material over the exposed portion of the substrate using plasma enhanced chemical vapor deposition (PECVD) of benzene such that exposed top surfaces of the substrate below the undercut portion remain between sidewalls of the carbon material and sidewalls of the remaining portions of the soluble layer, the carbon material forming a glassy carbon film having sp 2 bonded carbon and a disordered (D) band having a greater intensity than a graphite (G) band; and
dissolving the soluble layer in a solvent comprising water or the hydrogen fluoride solution, and lifting-off the lift-off stack.

2. The method of claim 1 , wherein the hard mask comprises titanium hard-mask.

3. The method of claim 1 , wherein the lift-off mask layer comprises silicon nitride.

4. The method of claim 1 , wherein the oxide is selected from the group consisting of silicon oxide, germanium oxide, blend of silicon-germanium oxides, tungsten oxide, and combinations thereof.

5. The method of claim 1 , wherein the substrate is selected from the group consisting of silicon, germanium nitride, sapphire, and combinations thereof.

6. The method of claim 1 further comprising annealing the deposited carbon material.

7. The method of claim 6 , wherein the annealing is carried out at a temperature of about 600 to about 1000° C.

8. The method of claim 6 , wherein the annealing is carried out for a period of about 30 minutes to about 4 hours.

9. The method of claim 1 , wherein forming a pattern in the lift-off stack comprises removing a portion of the hard-mask by reactive ion etching using chlorine plasma.

10. The method of claim 1 , wherein forming a pattern in the lift-off stack comprises removing a portion of the lift-off mask layer by reactive ion etching using fluorine plasma.

11. The method of claim 1 , wherein forming a pattern in the lift-off stack comprises forming a pattern in the hard-mask using a resist pattern.

Assignees

• IBM

Inventors

• Holmes Steven J
• Neumayer Deborah A
• Bedell Stephen
• Sadana Devendra K
• Farmer Damon
• Marchack Nathan P

Classifications

• C23C16/042 Primary

  using masks · CPC title

• C23C16/26 Primary

  Deposition of carbon only · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/56

  After-treatment · CPC title