Laser system

Patent metadata

Field	Value
Publication number	US-11217962-B2
Application number	US-201916707880-A
Country	US
Kind code	B2
Filing date	Dec 9, 2019
Priority date	Jul 13, 2017
Publication date	Jan 4, 2022
Grant date	Jan 4, 2022

Abstract

A laser system includes: A. a solid-state laser apparatus configured to output a pulse laser beam having light intensity distribution in a Gaussian shape that is rotationally symmetric about an optical path axis; B. an amplifier including a pair of discharge electrodes and configured to amplify the pulse laser beam in a discharge space between the pair of discharge electrodes; and C. a conversion optical system configured to convert the light intensity distribution of the pulse laser beam output from the amplifier into a top hat shape in each of a discharge direction of the pair of discharge electrodes and a direction orthogonal to the discharge direction.

First claim

What is claimed is:

1. A laser system comprising:
A. a solid-state laser apparatus configured to output a pulse laser beam having light intensity distribution in a Gaussian shape that is rotationally symmetric about an optical path axis;
B. an amplifier including a pair of discharge electrodes and configured to amplify the pulse laser beam in a discharge space between the pair of discharge electrodes; and
C. a conversion optical system configured to convert the light intensity distribution of the pulse laser beam output from the amplifier into a top hat shape in each of a discharge direction of the pair of discharge electrodes and a direction orthogonal to the discharge direction, wherein
the conversion optical system is disposed on an optical path of the pulse laser beam between the solid-state laser apparatus and the amplifier,
the conversion optical system includes a first prism and a second prism each having an isosceles triangular section parallel to the optical path axis and orthogonal to the discharge direction, and a third prism and a fourth prism each having an isosceles triangular section parallel to the optical path axis and the discharge direction,
the first prism and the second prism are disposed so that apexes of the first prism and the second prism face to each other at the section of the first prism and the second prism, and
the third prism and the fourth prism are disposed so that apexes of the third prism and the fourth prism face to each other at the section of the third prism and the fourth prism.

2. The laser system according to claim 1 , further comprising:
I. a first linear stage configured to reciprocate one of the first prism and the second prism in a direction of the optical path axis;
J. a second linear stage configured to reciprocate one of the third prism and the fourth prism in the direction of the optical path axis; and
K. a control unit configured to control the first linear stage to adjust an interval between the first prism and the second prism and configured to control the second linear stage to adjust an interval between the third prism and the fourth prism.

3. The laser system according to claim 2 , further comprising
L. a light intensity distribution measurement unit configured to measure the light intensity distribution of the pulse laser beam output from the amplifier, wherein the control unit controls the first linear stage and the second linear stage based on a measured value of the light intensity distribution measured by the light intensity distribution measurement unit.

4. The laser system according to claim 3 , wherein the light intensity distribution measurement unit includes a beam splitter configured to reflect part of the pulse laser beam output from the amplifier, a transfer optical system configured to transfer the part of the pulse laser beam reflected by the beam splitter, and a two-dimensional image sensor configured to capture a transfer image transferred by the transfer optical system.

Assignees

• Gigaphoton Inc

Inventors

• Arakawa Masaki
• Wakabayashi Osamu

Classifications

• H01S3/2251

  ArF, i.e. argon fluoride is comprised for lasing around 193 nm · CPC title

• H01S3/2375

  Hybrid lasers (H01S3/07 takes precedence) · CPC title

• G02B5/001 Primary

  Axicons, waxicons, reflaxicons · CPC title

• H01S2301/206

  Top hat profile · CPC title

• H01S3/2325

  Multi-pass amplifiers, e.g. regenerative amplifiers · CPC title