Transparent and flexible conductors made by additive processes

Patent metadata

Field	Value
Publication number	US-11217358-B2
Application number	US-201616067044-A
Country	US
Kind code	B2
Filing date	Dec 28, 2016
Priority date	Dec 30, 2015
Publication date	Jan 4, 2022
Grant date	Jan 4, 2022

Abstract

Optically transparent, highly conductive conductor materials are provided, which in certain variations may also be flexible. Methods of making transparent conductive conductors, such as electrodes, are also provided. Such a method may include creating a groove pattern on a substrate that defines a two-dimensional array. Then an electrically conductive material may be selectively applied within the groove pattern of the substrate so as to create a transparent conductor (e.g., a transparent conductive electrode (TCE)). The transparent conductor has a sheet resistance of ≤about 5 Ohms/Square and a transmissivity of ≥about 50% for a predetermined range of target wavelengths of electromagnetic energy. Such methods may form linear micromesh conductive arrays and tortuous micromesh conductive arrays that can be used in a variety of optoelectronic applications, including as optically transparent, flexible and mechanically reconfigurable zeroth-order resonant (ZOR) antennas.

First claim

What is claimed is:

1. A method of making a flexible transparent conductor, comprising:
creating a groove pattern on a substrate that defines a two-dimensional mesh array wherein at least two distinct grooves in the groove pattern intersect with one another, wherein the substrate comprises a sacrificial layer over which the groove pattern is formed;
selectively applying an electrically conductive material within the groove pattern of the substrate;
removing at least a portion of the substrate to form a plurality of openings adjacent to the electrically conductive material having the groove pattern;
filling the plurality of openings with a transparent elastomeric material to encapsulate the electrically conductive material, wherein the transparent elastomeric material is formed around and embeds the electrically conductive material; and
removing the sacrificial layer by dissolving or etching so as to remove the transparent elastomeric material and the embedded electrically conductive material from the substrate, so as to create the flexible transparent conductor having a sheet resistance of less than or equal to about 5 Ohms/Square and a transmissivity of greater than or equal to about 50% for a target wavelength or a range of target wavelengths of electromagnetic energy in the visible, ultraviolet (UV), and infrared (IR) ranges, wherein when the flexible transparent conductor is stretched by 20%, an electrical conductivity of the flexible transparent conductor is reduced by less than or equal to about 5% as compared to a comparative conductivity when the flexible transparent conductor is not stretched.

2. The method of claim 1 , wherein the transparent elastomeric material is polydimethylsiloxane (PDMS) and the electrically conductive material comprises silver or copper.

3. The method of claim 1 , wherein when the flexible transparent conductor is stretched by 50%, an electrical conductivity of the flexible transparent conductor is reduced by less than or equal to about 10% as compared to a comparative conductivity when the flexible transparent conductor is not stretched.

4. The method of claim 1 , wherein after the creating the groove pattern, the method further comprises treating a surface of the substrate including the groove pattern to be hydrophilic and then treating regions of the surface of the substrate external to the grooves to be hydrophobic.

5. The method of claim 4 , wherein the selectively applying the electrically conductive material within the groove pattern of the substrate comprises applying a liquid material comprising a plurality of electrically conductive axial particles within grooves of the groove pattern.

6. The method of claim 5 , wherein the plurality of electrically conductive axial particles has a length of less than or equal to about 10 micrometers.

7. The method of claim 5 , further comprising removing any residual conductive axial particles from the surface of the substrate external to the grooves.

8. The method of claim 1 , wherein the electrically conductive material is selected from the group consisting of: silver, copper, gold, nickel, chromium, aluminum, zinc, alloys, and combinations thereof.

9. The method of claim 1 , wherein the creating the groove pattern comprises a photolithography or nanoimprint lithography technique.

10. The method of claim 1 , wherein the creating of the groove pattern further comprises applying an electrically conductive initiator layer over a planar surface of the substrate and creating a mask over the electrically conductive initiator layer that defines the groove pattern, and the selectively applying the electrically conductive material within the groove pattern of the substrate comprises electroplating the electrically conductive material in a plurality of grooves of the groove pattern; and the method further comprises removing the mask from the substrate.

11. The method of claim 1 , wherein at least a portion of the substrate comprises an electrically conductive substrate selected from indium tin oxide or a surfactant-modified metal foil.

12. The method of claim 1 , wherein the selectively applying the electrically conductive material within the groove pattern of the substrate comprises electrolessly depositing an electrically conductive material within a plurality of grooves in the groove pattern.

13. The method of claim 12 , further comprising applying an electrically conductive initiator layer within the plurality of grooves in the groove pattern.

14. The method of claim 13 , wherein the electrically conductive material is selected from the group consisting of: copper, nickel, alloys, and combinations thereof and the electrically conductive initiator layer comprises a material selected from the group consisting of: silver, palladium, copper, alloys, and combinations thereof.

15. The method of claim 1 , wherein the selectively applying the electrically conductive material within the groove pattern of the substrate comprises electroplating an electrically conductive material within grooves of the groove pattern.

16. A method of making a flexible transparent conductor, comprising:
creating a tortuous groove pattern on a substrate that defines a two-dimensional mesh of tortuous grooves, wherein at least two distinct tortuous grooves intersect with one another and define a meander-shape comprising at least one horizontal meander line and at least one vertical meander line intersecting one another wherein the substrate comprises a sacrificial layer over which the tortuous groove pattern is formed;
selectively applying an electrically conductive material within the tortuous groove pattern of the substrate;
removing at least a portion of the substrate to form a plurality of openings adjacent to the electrically conductive material having the tortuous groove pattern;
filling the plurality of openings with an elastomeric material to encapsulate the electrically conductive material, wherein the elastomeric material is formed around and embeds the electrically conductive material; and
removing the sacrificial layer by dissolving or etching so as to remove the elastomeric material and the embedded electrically conductive material from the substrate, so as to create the flexible transparent conductor having a sheet resistance of less than or equal to about 5 Ohms/Square and a transmissivity of greater than or equal to about 50% for a target wavelength or a range of target wavelengths of electromagnetic energy in the visible, ultraviolet (UV), and infrared (IR) ranges, wherein when the flexible transparent conductor is stretched by 20%, an electrical conductivity of the flexible transparent conductor is reduced by less than or equal to about 5% as compared to a comparative conductivity when the flexible transparent conductor is not stretched.

Assignees

• Univ Michigan Regents

Inventors

• Guo Lingjie Jay
• Jang Taehee
• Lee Sangeon
• Lee Jinhwan

Classifications

• B05D5/12

  to obtain a coating with specific electrical properties · CPC title

• H05K3/10

  in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern · CPC title

• Y02P70/50

  Manufacturing or production processes characterised by the final manufactured product · CPC title

• H05K3/02

  in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding · CPC title

• H05K3/42

  Plated through-holes {or plated via connections} · CPC title