Photon counting device and photon counting method

Patent metadata

Field	Value
Publication number	US-11215717-B2
Application number	US-201816764053-A
Country	US
Kind code	B2
Filing date	Jun 18, 2018
Priority date	Nov 24, 2017
Publication date	Jan 4, 2022
Grant date	Jan 4, 2022

Abstract

A photon counting device includes a plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage, an A/D converter configured to convert the voltage output from the amplifier of each of the plurality of pixels to a digital value and output the digital value, a correction unit configured to correct the digital value output from the A/D converter so that an influence of a variation in a gain and an offset value among the plurality of pixels is curbed, a calculation unit configured to output a summed value obtained by summing the corrected digital values corresponding to at least two pixels, and a conversion unit configured to convert the summed value output from the calculation unit to a number of photons.

First claim

The invention claimed is:

1. A device for photon counting, the device comprising:
a plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage;
an A/D converter configured to convert the voltage output from the amplifier of each of the plurality of pixels to a digital value and output the digital value; and
a computer configured to correct the digital value output from the A/D converter so that an influence of a variation in a gain and an offset value among the plurality of pixels is curbed,
output a summed value obtained by summing the corrected digital values in at least two pixels, wherein the computer is configured to correct the digital value for each of the plurality of pixels based on a deviation between the gain and offset value and a parameter by referring to the parameter corresponding to the gain and the offset value, the parameter being a preset parameter common to the plurality of pixels, and
convert the summed value to a number of photons.

2. The device according to claim 1 , wherein a readout noise of the amplifier is equal to or less than 0.2 [e-rms].

3. The device according to claim 1 , wherein a readout noise of the amplifier is equal to or less than 0.15 [e-rms].

4. The device according to claim 1 , wherein the gain is equal to or more than 10 [DN/e].

5. A method for photon counting, the method comprising:
converting light input to respective photoelectric conversion elements constituting a plurality of pixels to charge;
amplifying, by an amplifier constituting the plurality of pixels, the converted charge and converting the charge to a voltage;
converting, by an A/D converter, the voltage output from the amplifier to digital value and outputting the digital value;
correcting the digital value output from the A/D converter so that an influence of a variation in a gain and an offset value among the plurality of pixels is curbed, wherein the correcting the digital value includes correcting the digital value for each of the plurality of pixels based on a deviation between the gain and offset value and a parameter, and the parameter corresponds to the gain and the offset value and is set in advance to be common to the plurality of pixels; and
summing the corrected digital values corresponding to at least two pixels and outputting a summed value; and
converting the summed value to a number of photons.

6. The method according to claim 5 , wherein readout noise of the amplifier is equal to or less than 0.2 [e-rms].

7. The method according to claim 5 , wherein readout noise of the amplifier is equal to or less than 0.15 [e-rms].

8. The method according to claim 5 , wherein the gain is equal to or more than 10 [DN/e].

Assignees

• Hamamatsu Photonics Kk

Inventors

• Maruno Tadashi
• Toda Eiji
• NAKAJIMA Mao
• Takahashi Teruo
• Higuchi Takafumi

Classifications

• H04N25/65

  applied to reset noise, e.g. KTC noise related to CMOS structures by techniques other than CDS · CPC title

• H04N25/778

  comprising amplifiers shared between a plurality of pixels, i.e. at least one part of the amplifier must be on the sensor array itself · CPC title

• G01J1/44 Primary

  Electric circuits {(for command of an exposure part G03B7/02)} · CPC title

• H04N25/767

  Horizontal readout lines, multiplexers or registers · CPC title

• H04N25/78

  Readout circuits for addressed sensors, e.g. output amplifiers or A/D converters · CPC title