Spectroscopic image acquiring apparatus and spectroscopic image acquiring method
US-9835492-B2 · Dec 5, 2017 · US
Inspection apparatus, inspection system, and inspection method
US11209313B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11209313-B2 |
| Application number | US-202017063834-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 6, 2020 |
| Priority date | Mar 2, 2018 |
| Publication date | Dec 28, 2021 |
| Grant date | Dec 28, 2021 |
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Abstract
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An inspection method includes: spectroscopically separating light from a predetermined imaging range of an inspection object into light of a plurality of wavelengths and imaging spectroscopic images of each of the wavelengths; inspecting a shape of the inspection object using the spectroscopic image of a predetermined wavelength among the wavelengths imaged in the imaging of the spectroscopic images of each of the wavelengths; and inspecting a color of the inspection object using the spectroscopic images of each of the wavelengths imaged. The predetermined wavelength is determined so that a maximum light quantity of the light from the inspection object in the corresponding spectroscopic image at the predetermined wavelength is equal to or higher than maximum light quantities in the other spectroscopic images at the other wavelengths.
First claim
Opening claim text (preview).
What is claimed is: 1. An inspection method for causing a processor to execute a program stored in a memory, the method comprising executing on the processor the steps of: spectroscopically separating light from a predetermined imaging range of an inspection object into light of a plurality of wavelengths and imaging spectroscopic images of each of the wavelengths; inspecting a shape of the inspection object using the spectroscopic image of a predetermined wavelength among the wavelengths imaged in the imaging of the spectroscopic images of each of the wavelengths; and inspecting a color of the inspection object using the spectroscopic images of each of the wavelengths imaged, wherein the predetermined wavelength is determined so that a maximum light quantity of the light from the inspection object in the corresponding spectroscopic image at the predetermined wavelength is equal to or higher than maximum light quantities in the other spectroscopic images at the other wavelengths. 2. An inspection apparatus comprising: a spectroscopic image sensor component configured to spectroscopically separate light from a predetermined imaging range of an inspection object into light of a plurality of wavelengths and image spectroscopic images of each of the wavelengths; a memory configured to store a program; and a processor configured to execute the program so as to: inspect a shape of the inspection object using the spectroscopic image of a predetermined wavelength among the wavelengths; and inspect a color of the inspection object using the spectroscopic images of each of the wavelengths, wherein the predetermined wavelength is determined so that a maximum light quantity of the light from the inspection object in the corresponding spectroscopic image at the predetermined wavelength is equal to or higher than maximum light quantities in the other spectroscopic images at the other wavelengths. 3. A computer readable non-transient medium storing instructions to cause one or more processors to: cause a spectroscopic image sensor component to spectroscopically separate light from a predetermined imaging range of an inspection object into light of a plurality of wavelengths and image spectroscopic images of each of the wavelengths; inspect a shape of the inspection object using the spectroscopic image of a predetermined wavelength among the wavelengths; and inspect a color of the inspection object using the spectroscopic images of each of the wavelengths, wherein the predetermined wavelength is determined so that a maximum light quantity of the light from the inspection object in the corresponding spectroscopic image at the predetermined wavelength is equal to or higher than maximum light quantities in the other spectroscopic images at the other wavelengths.
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using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title
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- What does patent US11209313B2 cover?
- An inspection method includes: spectroscopically separating light from a predetermined imaging range of an inspection object into light of a plurality of wavelengths and imaging spectroscopic images of each of the wavelengths; inspecting a shape of the inspection object using the spectroscopic image of a predetermined wavelength among the wavelengths imaged in the imaging of the spectroscopic i…
- Who is the assignee on this patent?
- Seiko Epson Corp
- What technology area does this patent fall under?
- Primary CPC classification G01N21/8806. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Dec 28 2021 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).