Method for manufacturing a MEMS unit for a micromechanical pressure sensor

Patent metadata

Field	Value
Publication number	US-11208319-B2
Application number	US-201816489614-A
Country	US
Kind code	B2
Filing date	Feb 13, 2018
Priority date	Mar 9, 2017
Publication date	Dec 28, 2021
Grant date	Dec 28, 2021

Abstract

A method for manufacturing a MEMS unit for a micromechanical pressure sensor. The method includes the steps: providing a MEMS wafer including a silicon substrate and a first cavity formed therein, under a sensor membrane; applying a layered protective element on the MEMS water; and exposing a sensor core from the back side, a second cavity being formed between the sensor core and the surface of the silicon substrate, and the second cavity being formed with the aid of an etching process which is carried out with the aid of etching parameters changed in a defined manner; and removing the layered protective element.

First claim

What is claimed is:

1. A method for manufacturing a MEMS (micro-electromechanical systems) unit for a micromechanical pressure sensor, comprising:
providing a MEMS wafer including a silicon substrate and a first cavity formed in the silicon substrate, under a sensor membrane;
applying a layered protective element on the MEMS wafer;
exposing a sensor core from a back side, a second cavity being formed between the sensor core and a surface of the silicon substrate, and the second cavity being formed with the aid of an etching process which is carried out with the aid of etching parameters changed during the etching process in a defined manner, the etching process, to form the second cavity, being a reactive ion deep etching process having an anisotropic beginning and a continuation which is isotropic in a defined manner; and
removing the layered protective element,
wherein, in order to form the second cavity with the aid of a vertical etching process, access openings are produced in the silicon substrate, the vertical etching process being changed into a lateral etching process, wherein spherical etch fronts coalesce as a result of the lateral etching process,
wherein downwardly widening trapezoidal etch fronts are formed with the aid of the etching process, wherein the second cavity is formed against the surface of the silicon substrate and laterally out of the trapezoidal etch fronts.

2. The method as recited in claim 1 , wherein the layered protective element is a varnish or a foil.

3. The method as recited in claim 1 , wherein, after the reactive ion deep etching process, a passivation and sputtering portion of the etching process is switched off.

4. A MEMS unit for a micromechanical pressure sensor, comprising:
a sensor core formed in a silicon substrate, including a sensor membrane, a first cavity being formed below the sensor membrane;
a second cavity formed in the silicon substrate above the sensor core, the second cavity having spherical etch fronts which coalesce to form the second cavity; and
access openings having uniformly widening etch fronts which widen trapezoidally in a downward direction from a surface of the silicon substrate,
wherein the second cavity is disposed against the surface of the silicon substrate and laterally out of the trapezoidal etch fronts,
wherein partially spherical areas are formed within the second cavity.

5. The MEMS unit as recited in claim 4 , wherein, in order to form the second cavity, the micromechanical pressure sensor was formed with the aid of a reactive ion deep etching process having an isotropic beginning and a continuation which is isotropic in a defined manner.

6. The MEMS unit as recited in claim 4 , wherein a MEMS wafer including the MEMS substrate is connected to an ASIC (application-specific integrated circuit) with the aid of a bonding wire in a side-by-side arrangement or in a stacked arrangement.

7. The MEMS unit as recited in claim 4 , wherein the MEMS unit includes piezoresistive or capacitive detection elements.

Assignees

• Bosch Gmbh Robert

Inventors

• Dannenberg Arne
• Fritz Joachim
• Friedrich Thomas
• Kramer Torsten

Classifications

• B81B2203/0315

  Cavities · CPC title

• B81C2201/053

  Depositing a protective layers · CPC title

• G01L19/146

  using flexible element between the transducer and the support · CPC title

• B81B2201/0264

  Pressure sensors · CPC title

• B81B2203/0127

  Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function · CPC title