Ge-containing Co-film forming material, Ge-containing Co film and film forming method thereof

Patent metadata

Field	Value
Publication number	US-11205573-B2
Application number	US-201816637320-A
Country	US
Kind code	B2
Filing date	Aug 2, 2018
Priority date	Aug 9, 2017
Publication date	Dec 21, 2021
Grant date	Dec 21, 2021

Abstract

To provide a film forming material and a film forming process for forming, at a lower temperature, a Ge-containing Co film including a desired amount of Ge. A film forming material for forming a Ge-containing Co film according to the invention is represented by either formula (1) or formula (2) below R 1 R 2 R 3 Ge—Co(CO) 4 (1) (where R 1 , R 2 and R 3 are each independently hydrogen, a nonaromatic hydrocarbon group, a halogeno group or a halogenated nonaromatic hydrocarbon group; however, the nonaromatic hydrocarbon group excludes a crosslinked nonaromatic hydrocarbon group, and the halogenated nonaromatic hydrocarbon group excludes a crosslinked halogenated nonaromatic hydrocarbon group) Co(CO) 4 R 4 R 5 Ge—Co(CO) 4 (2) (where R 4 and R 5 are each independently hydrogen, a nonaromatic hydrocarbon group, a halogeno group or a halogenated nonaromatic hydrocarbon group; however, the nonaromatic hydrocarbon group excludes a crosslinked nonaromatic hydrocarbon group, and the halogenated nonaromatic hydrocarbon group excludes a crosslinked halogenated nonaromatic hydrocarbon group).

First claim

The invention claimed is:

1. A Ge-containing Co-film forming material for forming a Ge-containing Co film for manufacturing a semiconductor device,
the material being a compound represented by general formula (1) below or general formula (2) below
R 1 R 2 R 3 Ge—Co(CO) 4   (1)

wherein R 1 , R 2 and R 3 are each independently hydrogen, a nonaromatic hydrocarbon group, a halogeno group or a halogenated nonaromatic hydrocarbon group;
however, the nonaromatic hydrocarbon group excludes a crosslinked nonaromatic hydrocarbon group, and the halogenated nonaromatic hydrocarbon group excludes a crosslinked halogenated nonaromatic hydrocarbon group;
Co(CO) 4 R 4 R 5 Ge—Co(CO) 4   (2)

wherein R 4 and R 5 are each independently hydrogen, a nonaromatic hydrocarbon group, a halogeno group or a halogenated nonaromatic hydrocarbon group; however, the nonaromatic hydrocarbon group excludes a crosslinked nonaromatic hydrocarbon group, and the halogenated nonaromatic hydrocarbon group excludes a crosslinked halogenated nonaromatic hydrocarbon group.

2. The Ge-containing Co-film forming material according to claim 1 , wherein the compound represented by the general formula (1) or the general formula (2) further comprises one or two neutral adduct ligands selected from a group consisting of NMe 3 , NEt 3 , NiPr 3 , NMeEt 2 , NC 5 H 5 , OC 4 H 8 , Me 2 O, Et 2 O, Et 2 S, n Pr 2 S, and n BU 2 S.

3. The Ge-containing Co-film forming material according to claim 1 ,
wherein the material is a compound represented by the general formula (1); and
wherein R 1 , R 2 and R 3 are each independently a hydrocarbon group or a halogenated hydrocarbon group with a carbon number from 1 to 4.

4. The Ge-containing Co-film forming material according to claim 3 , wherein the compound represented by the general formula (1) is Et 3 Ge—Co(CO) 4 .

5. The Ge-containing Co-film forming material according to claim 1 ,
wherein the material is a compound represented by the general formula (2); and
wherein R 4 and R 5 each independently represent a hydrocarbon group or a halogenated hydrocarbon group with a carbon number from 1 to 4.

6. The Ge-containing Co-film forming material according to claim 5 , wherein the compound represented by the general formula (2) is Co(CO) 4 Et 2 Ge—Co(CO) 4 .

7. A Ge-containing Co film formed by depositing the Ge-containing Co-film forming material according to claim 1 by a CVD method or an ALD method.

8. The Ge-containing Co film according to claim 7 , wherein a composition ratio Ge:Co ranges from 1:99 to 99:1.

9. The Ge-containing Co film according to claim 7 , wherein the thickness of the Ge-containing Co film ranges from 0.1 nm to 400 nm.

10. The Ge-containing Co film according to claim 7 having a bulk resistance value ranging from 6 μΩ·cm to 300 μΩ·cm.

11. The Ge-containing Co film according to claim 7 having a surface roughness (RMS) ranging from 0.1 nm to 15 nm.

12. The Ge-containing Co film according to claim 7 , wherein when the film is formed on a substrate having at least one recessed portion, a ratio of the film thickness on an inner wall surface or an inner bottom surface of the recessed portion to the film thickness on the surface of the substrate is in the range of 0.2 to 1.1.

13. The Ge-containing Co film according to claim 7 , having a minimum continuous film thickness ranging from 1 nm to 5 nm.

14. The Ge-containing Co film according to claim 7 , wherein the film is a low-resistance contact layer formed on a source/drain region of a FinFET transistor arranged on a Si or Ge substrate.

15. The Ge-containing Co film according to claim 7 , wherein the film is a barrier layer of a wiring layer.

16. An electronic device comprising the semiconductor device according to claim 15 .

17. A semiconductor device comprising the Ge-containing Co film according to claim 7 .

18. A method for forming a Ge-containing Co film, the method comprising:
a first step of introducing a substrate into a chamber;
a second step of introducing a Ge-containing Co-film forming material represented by general formula (1) below or general formula (2) below into the chamber in which the substrate has been disposed, while controlling an introduction amount of the Ge-containing Co-film forming material; and
a third step of depositing at least a part of the Ge-containing Co-film forming material on the substrate so as to form the Ge-containing Co film
R 1 R 2 R 3 Ge—Co(CO) 4   (1)

wherein R 1 , R 2 and R 3 are each independently hydrogen, a nonaromatic hydrocarbon group, a halogeno group or a halogenated nonaromatic hydrocarbon group; however, the nonaromatic hydrocarbon group excludes a crosslinked nonaromatic hydrocarbon group, and the halogenated nonaromatic hydrocarbon group excludes a crosslinked halogenated nonaromatic hydrocarbon group;
Co(CO) 4 R 5 R 6 Ge—Co(CO) 4   (2)

wherein R 5 and R 6 are each independently hydrogen, a nonaromatic hydrocarbon group, a halogeno group or a halogenated nonaromatic hydrocarbon group; however, the nonaromatic hydrocarbon group excludes a crosslinked nonaromatic hydrocarbon group, and the halogenated nonaromatic hydrocarbon group excludes a crosslinked halogenated nonaromatic hydrocarbon group.

19. The method for forming a Ge-containing Co film according to claim 18 , wherein the third step is selected from a group consisting of chemical vapor deposition (CVD), atomic layer deposition (ALD), plasma enhanced chemical vapor deposition (PECVD), plasma enhanced atomic layer deposition (PEALD), pulsed chemical vapor deposition (PCVD), low-pressure chemical vapor deposition LPCVD), reduced pressure chemical vapor deposition (SACVD), atmospheric pressure chemical vapor deposition (APCVD), spatial ALD, radical assisted deposition, supercritical fluid deposition, and combinations thereof.

20. The method for forming a Ge-containing Co film according to claim 19 , further comprising:
a fourth step of introducing at least one additive gas selected from a group consisting of ammonia, hydrogen, an inactive gas, an alcohol, an amino alcohol, an amine, GeH 4 , Ge 2 H 6 , and combinations thereof into the chamber.

21. The method for forming a Ge-containing Co film according to claim 18 , wherein the third step is carried out at a temperature in the range of 0° C. to 350° C.

22. The method for forming a Ge-containing Co film according to claim 18 , wherein the pressure in the chamber ranges from 0.06 Torr to atmospheric pressure.

Assignees

• Air Liquide

Inventors

• Arteaga Muller Rocio Alejandra
• Blasco Nicolas
• Girard Jean-Marc
• Ko Changhee
• Sanchez Antonio
• Rochat Raphael

Classifications

• H10W20/425

  Barrier, adhesion or liner layers · CPC title

• H10W20/0526

  by thermal treatment thereof · CPC title

• H10W20/033

  in openings in dielectrics · CPC title

• H10P14/43 Primary

  Chemical deposition, e.g. chemical vapour deposition [CVD] · CPC title

• H10D64/0112

  using conductive layers comprising silicides · CPC title