Vibrationally isolated cryogenic shield for local high-quality vacuum

Patent metadata

Field	Value
Publication number	US-11205133-B2
Application number	US-201916242328-A
Country	US
Kind code	B2
Filing date	Jan 8, 2019
Priority date	Jan 12, 2018
Publication date	Dec 21, 2021
Grant date	Dec 21, 2021

Abstract

Aspects of a vibrationally isolated cryogenic shield for local high-quality vacuum are described. More specifically, a cryogenic vacuum system is described that is replicated in a small volume in a mostly room temperature ultra-high vacuum (UHV) system by capping the volume with a suspended cryogenic cold finger coated with a high surface area sorption material to produce a localized extreme high vacuum (XHV) or near-XHV region. The system ensures that paths from outgassing materials to the control volume, including bounce paths off other warm surfaces, require at least one bounce off of the high surface area sorption material on the cold finger. The outgassing materials can be pumped before reaching the control volume. To minimize vibrations, the cold finger is only loosely, mechanically connected to the rest of the chamber, and isolated along with the cryogenic system via soft vacuum bellows.

First claim

What is claimed is:

1. A cryogenic device for use in a vacuum chamber, comprising:
a cold finger positioned inside the vacuum chamber, the cold finger having a first end connected to a cryogenic head also inside the vacuum chamber, a second end of the cold finger being shaped to form a capping volume that covers or encloses a device under test (DUT) placed on a mounting system also inside the vacuum chamber, the second end of the cold finger having an opening or a window; and
a shield positioned inside the vacuum chamber and over and around a portion of the cold finger, the shield being configured to reduce thermal loading of the cold finger, the shield having a window,
wherein the vacuum chamber includes a viewport in alignment with the window of the shield, the opening or the window of the second end of the cold finger, and the DUT, which allows laser beams generated outside of the vacuum chamber to be directed at the DUT through the viewport of the vacuum chamber, the window of the shield, and the opening or the window of the second end of the cold finger,
wherein a coverage or an enclosure provided by the shape of the second end of the cold finger is configured to restrict paths for outgassing materials to reach the capping volume to allow a localized vacuum in the capping volume that is of a higher quality than a quality of a vacuum in other regions within the vacuum chamber.

2. The device of claim 1 , wherein the DUT is an ion trap having electrodes for confining a configurable number of atomic ions in a linear lattice and the laser beams generated outside the vacuum chamber are directed to the atomic ions.

3. The device of claim 1 , wherein the localized vacuum provides extreme high vacuum (XHV) or near-XHV over the DUT while the other regions in the vacuum chamber provide ultra-high vacuum (UHV).

4. The device of claim 1 , wherein the cold finger is mechanically connected to the vacuum chamber through the cryogenic head.

5. The device of claim 1 , wherein transfer of vibrations to the cold finger and to the cryogenic head, which are both inside the vacuum chamber, is reduced by vacuum bellows positioned between the cryogenic device and the vacuum chamber.

6. The device of claim 1 , wherein the cryogenic head is connected to both the cold finger and the shield and is configured to cool both the cold finger and the shield.

7. The device of claim 6 , wherein the cold finger is cooled to about 4K and the shield is cooled to about 40K.

8. The device of claim 1 , further comprising a cryogenic sorption material that is deposited on one or more surfaces of the second end of the cold finger that cover or enclose the DUT.

9. The device of claim 1 , wherein the DUT is cooled to about 70K.

Assignees

• Ionq Inc

Inventors

• Amini Jason Madjdi

Classifications

• F04B37/14 Primary

  to obtain high vacuum · CPC title

• F04B2015/081

  Liquefied gases · CPC title

• F04B15/08 Primary

  the liquids having low boiling points · CPC title

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• G06N10/00 Primary

  Quantum computing, i.e. information processing based on quantum-mechanical phenomena · CPC title