Pressure sensing and flow control in diffusion-bonded planar devices for fluid chromatography
US-2016169843-A1 · Jun 16, 2016 · US
US11204293B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11204293-B2 |
| Application number | US-201916420845-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 23, 2019 |
| Priority date | May 24, 2018 |
| Publication date | Dec 21, 2021 |
| Grant date | Dec 21, 2021 |
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Disclosed is a pressure transducer including a body made of a material having a first coefficient of thermal expansion, a fluidic inlet and a fluidic cavity enclosed by the body in fluidic communication with the fluidic inlet. The pressure transducer further includes a strain gauge including a resistive element in operable contact with the body. At least a portion of the resistive element made of a material having a second coefficient of thermal expansion that is different from the first coefficient of thermal expansion of the body. Disclosed further is a pressure transducer including a filler body located in a fluidic cavity of the pressure transducer configured to reduce adiabatic thermal effects on a transducer body. Disclosed are systems and methods incorporating the pressure transducers described herein.
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What is claimed is: 1. A pressure transducer comprising: a body made of a material having a first coefficient of thermal expansion; a fluidic inlet; a fluidic cavity enclosed by the body in fluidic communication with the fluidic inlet; and a strain gauge including a resistive element in operable contact with the body, at least a portion of the resistive element made of a material having a second coefficient of thermal expansion that is different from the first coefficient of thermal expansion of the body, wherein the difference in the first coefficient of thermal expansion and the second coefficient of thermal expansion is configured to compensate for an adiabatic thermal pulse. 2. The pressure transducer of claim 1 , wherein the resistive element further includes: a first resistor in operable contact with the body; a second resistor in operable contact with the body; a third resistor in operable contact with the body; and a fourth resistor in operable contact with the body. 3. The pressure transducer of claim 2 , wherein the first, second, third, and fourth resistors are operably connected to form a Wheatstone bridge, and wherein the first and second resistors are active grids and wherein the third and fourth resistors are balance grids. 4. The pressure transducer of claim 2 , wherein the first, second, third, and fourth resistors are each made of the material having the second coefficient of thermal expansion. 5. The pressure transducer of claim 1 , wherein a difference in the first coefficient of thermal expansion and the second coefficient of thermal expansion is configured to reduce settling time after an adiabatic thermal pulse relative to a second pressure transducer having well-matched coefficient of thermal expansions. 6. The pressure transducer of claim 1 , wherein the second coefficient of thermal expansion is greater than the first coefficient of thermal expansion. 7. The pressure transducer of claim 1 , wherein the difference in the first coefficient of thermal expansion and the second coefficient of thermal expansion is large enough that an output voltage disturbance during the adiabatic thermal pulse becomes positive. 8. The pressure transducer of claim 3 , wherein the active grids are positioned proximate the fluidic cavity and wherein the balance grids are positioned distal to the fluidic cavity relative to the active grids. 9. The pressure transducer of claim 3 , wherein the balance grids are positioned in line with the active grids and wherein the balance grids are orthogonally oriented relative to the active grids. 10. The pressure transducer of claim 2 , wherein the first and second resistors are made of the material having the second coefficient of thermal expansions and wherein the third and the fourth resistors are made of the material having a third coefficient of thermal expansion that is different than both the first coefficient of thermal expansion and the second coefficient of thermal expansion. 11. The pressure transducer of claim 2 , wherein the first resistor is directly connected in series to a first active grid of the strain gauge, wherein the second resistor is directly connected in series to a second active grid of the strain gauge, wherein the third resistor is directly connected in series to a first balance grid of the strain gauge, and wherein the fourth resistor is directly connected in series to a second balance grid of the strain gauge. 12. The pressure transducer of claim 2 , wherein the first resistor is connected in parallel to a first active grid of the strain gauge, wherein the second resistor is connected in parallel to a second active grid of the strain gauge, wherein the third resistor is connected in parallel to a first balance grid of the strain gauge, and wherein the fourth resistor is connected in parallel to a second balance grid of the strain gauge. 13. A method of detecting pressure comprising: providing a first pressure transducer having a body and a resistive element attached to the body; mismatching a first coefficient of thermal expansion of the body to a second coefficient of thermal expansion of the resistive element; detecting pressure of a fluid system with the first pressure transducer; and compensating, with the mismatched first and second coefficient thermal expansions, for an adiabatic thermal pulse. 14. The method of claim 13 , wherein the detecting pressure further comprises detecting pressure with the first pressure transducer during an adiabatic thermal pulse. 15. The method of claim 14 , further comprising reducing settling time after the adiabatic thermal pulse relative to a second pressure transducer having well-matched coefficient of thermal expansions. 16. The method of claim 13 , wherein the second coefficient of thermal expansion is greater than the first coefficient of thermal expansion. 17. The method of claim 14 , further comprising outputting a positive output voltage during an adiabatic thermal pulse. 18. A liquid chromatography system comprising: a solvent delivery system; a sample delivery system in fluidic communication with solvent delivery system; a liquid chromatography column located downstream from the solvent delivery system and the sample delivery system; a detector located downstream from the liquid chromatography column; and the pressure transducer of claim 1 .
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