Semiconductor device, method of manufacturing semiconductor device, inverter circuit, driving device, vehicle, and elevator

Patent metadata

Field	Value
Publication number	US-11201238-B2
Application number	US-202016797048-A
Country	US
Kind code	B2
Filing date	Feb 21, 2020
Priority date	Sep 13, 2019
Publication date	Dec 14, 2021
Grant date	Dec 14, 2021

Abstract

A semiconductor device according to an embodiment includes: a silicon carbide layer having a first plane, a second plane facing the first plane, a first trench, a second trench, an n-type first silicon carbide region, a p-type second silicon carbide region between the first silicon carbide region and the first plane, an n-type third silicon carbide region between the second silicon carbide region and the first plane, and a p-type fourth silicon carbide region between the second trench and the first silicon carbide region; a gate electrode being located in the first trench; a gate insulating layer; a first electrode, a portion of the first electrode being located in the second trench; a second electrode; and an interlayer insulating layer being located between the gate electrode and the first electrode, in which an interface between the first electrode and the interlayer insulating layer is located in the first trench.

First claim

What is claimed is:

1. A semiconductor device comprising:
a silicon carbide layer having a first plane parallel to a first direction and a second direction perpendicular to the first direction and a second plane facing the first plane, the silicon carbide layer having
a first trench being located on a side of the first plane and extending in the first direction,
a second trench being located on the side of the first plane and extending in the first direction,
a first silicon carbide region of n-type,
a second silicon carbide region of p-type being located between the first silicon carbide region and the first plane and being located between the first trench and the second trench,
a third silicon carbide region of n-type being located between the second silicon carbide region and the first plane and being located between the first trench and the second trench, and
a fourth silicon carbide region of p-type being located between the second trench and the first silicon carbide region, the fourth silicon carbide region being located between the second trench and the second silicon carbide region, and the fourth silicon carbide region having higher p-type impurity concentration than the second silicon carbide region;
a gate electrode being located in the first trench;
a gate insulating layer being located between the gate electrode and the silicon carbide layer;
a first electrode being located on a side of the first plane of the silicon carbide layer, a portion of the first electrode being located in the second trench, and a portion of the first electrode being in contact with the third silicon carbide region and the fourth silicon carbide region;
a second electrode being located on a side of the second plane of the silicon carbide layer; and
an interlayer insulating layer being located between the gate electrode and the first electrode,
wherein an impurity concentration distribution of a p-type impurity in the second silicon carbide region in the second direction has a concentration peak between the first trench and the second trench, and a p-type impurity concentration in a portion between a position of the concentration peak and the first trench is lower than a p-type impurity concentration in a portion between the position of the concentration peak and the second trench.

2. A semiconductor device comprising:
a silicon carbide layer having a first plane parallel to a first direction and a second direction perpendicular to the first direction and a second plane facing the first plane, the silicon carbide layer having
a first trench being located on a side of the first plane and extending in the first direction,
a second trench being located on the side of the first plane and extending in the first direction,
a first silicon carbide region of n-type,
a second silicon carbide region of p-type being located between the first silicon carbide region and the first plane and being located between the first trench and the second trench,
a third silicon carbide region of n-type being located between the second silicon carbide region and the first plane and being located between the first trench and the second trench, and
a fourth silicon carbide region of p-type being located between the second trench and the first silicon carbide region, the fourth silicon carbide region being located between the second trench and the second silicon carbide region, and the fourth silicon carbide region having higher p-type impurity concentration than the second silicon carbide region;
a gate electrode being located in the first trench;
a gate insulating layer being located between the gate electrode and the silicon carbide layer;
a first electrode being located on a side of the first plane of the silicon carbide layer, a portion of the first electrode being located in the second trench, and a portion of the first electrode being in contact with the third silicon carbide region and the fourth silicon carbide region;
a second electrode being located on a side of the second plane of the silicon carbide layer; and
an interlayer insulating layer being located between the gate electrode and the first electrode,
wherein an interface between the first electrode and the interlayer insulating layer is located in the first trench,
wherein an impurity concentration distribution of a p-type impurity in the second silicon carbide region in the second direction has a concentration peak between the first trench and the second trench, and a p-type impurity concentration in a portion between a position of the concentration peak and the first trench is lower than a p-type impurity concentration in a portion between the position of the concentration peak and the second trench.

3. The semiconductor device according to claim 2 , wherein, in a case where a boundary between the second silicon carbide region and the third silicon carbide region is denoted by a first boundary,
a distance from the first plane to the first boundary is denoted by a first distance,
a boundary between the first silicon carbide region and the second silicon carbide region is denoted by a second boundary,
a distance from the first boundary to the second boundary is denoted by a second distance,
the first distance is substantially constant, and
the first distance along the gate insulating layer is larger than the second distance along the gate insulating layer.

4. The semiconductor device according to claim 2 , wherein in a case where a boundary between the first silicon carbide region and the second silicon carbide region is denoted by a second boundary, and
a distance from the first plane to the second boundary is denoted by a third distance,
the third distance increases from the first trench toward the second trench.

5. The semiconductor device according to claim 2 , wherein a distance between the first trench and the second trench is smaller than a width of the first trench in the second direction.

6. The semiconductor device according to claim 2 , wherein a distance from the second plane to the first trench is substantially equal to a distance from the second plane to the second trench.

7. The semiconductor device according to claim 2 , further comprising a fifth silicon carbide region of p-type located between the first trench and the first silicon carbide region.

8. The semiconductor device according to claim 2 , wherein a width of the first trench in the second direction is smaller than a width of the second trench in the second direction.

9. An inverter circuit comprising the semiconductor device according to claim 2 .

10. A driving device comprising the semiconductor device according to claim 2 .

11. A vehicle comprising the semiconductor device according to claim 2 .

12. An elevator comprising the semiconductor device according to claim 2 .

Assignees

• Toshiba Kk

Inventors

• Kimoto Shinichi
• Tanaka Katsuhisa
• Kyogoku Shinya
• Iijima Ryosuke

Classifications

• H10P30/2042 Primary

  into crystalline silicon carbide · CPC title

• H10P30/222

  characterised by the angle between the ion beam and the crystal planes or the main crystal surface (characterised by the angle between the ion beam and the mask H10P30/221) · CPC title

• H10D30/0295

  using recessing of the source electrodes · CPC title

• H10D64/2527

  for vertical devices wherein the source or drain electrodes are recessed in semiconductor bodies · CPC title

• H10D30/0297

  using recessing of the gate electrodes, e.g. to form trench gate electrodes · CPC title