Photosensitive resin composition, method for producing hardened relief pattern, semiconductor device and display device
US-2017102613-A1 · Apr 13, 2017 · US
US11199776B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11199776-B2 |
| Application number | US-201716314822-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 25, 2017 |
| Priority date | Jul 27, 2016 |
| Publication date | Dec 14, 2021 |
| Grant date | Dec 14, 2021 |
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The present invention provides a resin composition having a high sensitivity and serving to produce a cured film with a low water absorption rate. The resin composition includes: (a) an alkali-soluble resin and (b1) an amido-phenol compound containing a phenolic hydroxyl group in which a monovalent group as represented by the undermentioned general formula (1) is located at the ortho position and/or (b2) an aromatic amido acid compound containing a carboxy group in which a monovalent group as represented by the undermentioned general formula (2) is located at the ortho position: wherein in general formula (1), X is a monovalent organic group having an alkyl group that contains 2 to 20 carbon atoms and bonds directly to the carbonyl carbon in general formula (1) or a monovalent organic group that has —(YO) n —; and in general formula (2), U is a monovalent organic group that has an alkyl group containing 2 to 20 carbon atoms and bonding directly to the amide nitrogen in general formula (2) or a monovalent organic group that has —(YO) n —; wherein Y is an alkylene group containing 1 to 10 carbon atoms and n is an integer of 1 to 20.
Opening claim text (preview).
The invention claimed is: 1. A resin composition comprising: (a) an alkali-soluble resin; (b1) an amido-phenol compound containing a phenolic hydroxyl group in which a monovalent group as represented by the undermentioned general formula (1) is located at a position ortho to the hydroxyl group; and (c) a photosensitive compound: wherein in general formula (1), X is a monovalent organic group having an alkyl group that contains 2 to 20 carbon atoms and bonds directly to the carbonyl carbon in general formula (1) or a monovalent organic group that has —(YO) n —; Y is an alkylene group containing 1 to 10 carbon atoms; and n is an integer of 1 to 20. 2. A resin composition as set forth in claim 1 , wherein the amido-phenol compound of (1) is represented by any one of general formulae (3) to (5): wherein in general formulae (3) to (5), m is an integer of 1 to 4; X is a monovalent organic group that has an alkyl group containing 2 to 20 carbon atoms and bonding directly to the carbonyl carbon in general formulae (3) to (5) or a monovalent organic group that has —(YO) n —; Y is an alkylene group containing 1 to 10 carbon atoms; n is an integer of 1 to 20; Z is a single bond, a hydrogen atom, an alkoxy group, —O—, —SO 2 —, —C(CF 3 ) 2 —, —O—R 1 —O—, —C(═O)—, —C(═O)O—R 2 —OC(═O)—, —C(═O)NH—R 3 —NHC(═O)—, or a monovalent to tetravalent hydrocarbon group containing 1 to 20 carbon atoms; and R 1 to R 3 are each a divalent hydrocarbon group containing 1 to 20 carbon atoms; m being 2 when Z is a single bond. 3. A resin composition as set forth in claim 1 , wherein the alkali-soluble resin of (a) contains polyimide, polybenzoxazole, polyamide-imide, a precursor of any thereof, and/or a copolymer thereof. 4. A resin composition as set forth in claim 1 , further comprising: (d) a thermal crosslinking agent. 5. An organic EL display apparatus comprising a drive circuit, a planarization layer, a first electrode, an insulation layer, a luminescence layer, and a second electrode disposed on a substrate, the planarization layer and/or the insulation layer being formed from a cured film produced by curing a resin composition as set forth in claim 1 . 6. A semiconductor electronic component comprising an electrode, a metal wiring, an interlaminar insulation layer, and/or a surface protection layer disposed on a substrate, the interlaminar insulation layer and/or the surface protection layer being formed of a cured film produced by curing a resin composition as set forth in claim 1 . 7. Semiconductor equipment comprising an electrode, a metal wiring, an interlaminar insulation layer, and/or a surface protection layer disposed on a substrate, the interlaminar insulation layer and/or the surface protection layer being formed of a cured film produced by curing a resin composition as set forth in claim 1 . 8. A production method for an organic EL display apparatus comprising a step for producing a photosensitive resin film formed of a resin composition as set forth in claim 1 , a step for exposing the photosensitive resin film to light, a step for developing the light-exposed photosensitive resin film, and a step for heat-treating the developed photosensitive resin film. 9. A cured film comprising an alkali-soluble resin (a), and a benzoxazole compound as represented by any one of general formulae (11) to (13) given below: wherein in general formulae (11) to (13), W is a monovalent organic group that has an alkyl group containing 2 to 20 carbon atoms and bonding directly to a carbon atom in the oxazole ring in general formulae (11) to (13) or a monovalent organic group that has —(YO) n —; m is an integer of 1 to 4; Y is an alkylene group containing 1 to 10 carbon atoms; n is an integer of 1 to 20; Z is a single bond, a hydrogen atom, an alkoxy group, —O—, —SO 2 —, —C(CF 3 ) 2 —, —O—R 1 —O—, —C(═O)—, —C(═O)O—R 2 —OC(═O)—, —C(═O)NH—R 3 —NHC(═O)—, or a monovalent to tetravalent hydrocarbon group containing 1 to 20 carbon atoms; and R 1 to R 3 are each a divalent hydrocarbon group containing 1 to 20 carbon atoms; m being 2 when Z is a single bond.
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