Symmetric flow valve for higher flow conductance

Patent metadata

Field	Value
Publication number	US-11199267-B2
Application number	US-201916542798-A
Country	US
Kind code	B2
Filing date	Aug 16, 2019
Priority date	Aug 16, 2019
Publication date	Dec 14, 2021
Grant date	Dec 14, 2021

Abstract

Embodiments of symmetric flow valves for use in a substrate processing chamber are provided herein. In some embodiments, a symmetric flow valve includes a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the top plate includes one or more axisymmetrically disposed openings; a poppet disposed in the interior volume, wherein the poppet includes a central opening and a plurality of portions configured to selectively seal the one or more axisymmetrically disposed openings of the top plate when the symmetric flow valve is in a closed position; and a first actuator coupled to the poppet to position the poppet within the interior volume in at least an open position, where the poppet is spaced apart from the top plate to allow flow through the one or more axisymmetrically disposed openings of the top plate, and the closed position.

First claim

The invention claimed is:

1. A symmetric flow valve for use in a substrate processing chamber, comprising:
a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the top plate includes one or more axisymmetrically disposed openings, and wherein the bottom plate includes an opening configured to interface with a pump port;
a poppet disposed in the interior volume, wherein the poppet includes a central opening and a plurality of portions configured to selectively seal the one or more axisymmetrically disposed openings of the top plate when the symmetric flow valve is in a closed position;
a first actuator coupled to the poppet at a first location radially outward of the central opening to position the poppet within the interior volume in at least an open position, where the poppet is spaced apart from the top plate to allow flow through the one or more axisymmetrically disposed openings of the top plate, and the closed position, and at least one of:
further comprising a second actuator coupled to the poppet at a second location different than the first location and radially outward of the central opening to, together with the first actuator, position the poppet within the interior volume in at least the open position and the closed position, or
wherein the poppet includes one or more recesses extending radially outward from the central opening between adjacent ones of the plurality of portions.

2. The symmetric flow valve of claim 1 , wherein the one or more axisymmetrically disposed openings comprises three openings.

3. The symmetric flow valve of claim 1 , further comprising a plurality of cover plates coupled to corresponding ones of the plurality of portions, wherein the plurality of cover plates are raised with respect to a top surface of the poppet.

4. The symmetric flow valve of claim 1 , wherein the valve body includes a service door on one or more sidewalls to facilitate poppet service.

5. The symmetric flow valve of claim 1 , wherein the valve body has a rectangular, hexagon, or octagon shape.

6. The symmetric flow valve of claim 1 , wherein the first actuator is coupled to the bottom plate of the valve body or the top plate of the valve body.

7. The symmetric flow valve of claim 1 , wherein the poppet includes one or more slots disposed between each of the plurality of portions.

8. The symmetric flow valve of claim 1 , therein the poppet includes one or more cutouts extending from a bottom surface of the poppet towards an upper surface of the poppet.

9. A substrate processing chamber, comprising:
a chamber body; and
the symmetric flow valve of claim 1 , wherein the top plate of the symmetric flow valve is coupled to a bottom of the chamber body.

10. The substrate processing chamber of claim 9 , further comprising a pump coupled to the opening of the bottom plate.

11. The substrate processing chamber of claim 9 , wherein the substrate processing chamber is configured to pump about 6500 to about 7500 liters per second through the symmetric flow valve.

12. The substrate processing chamber of claim 9 , wherein the first actuator is coupled to the bottom plate of the valve body or the top plate of the valve body.

13. The substrate processing chamber claim 9 , wherein the first actuator has a stroke length of about 3.0 inches to about 4.0 inches.

14. A symmetric flown valve for use in a substrate processing chamber, comprising:
a valve body having sidewalls, a bottom plate, and a top plate to define an interior volume, wherein the bottom plate includes an opening configured to interface with a pump port, and wherein the top plate includes three openings arranged axisymmetrically about a center of the top plate;
a poppet disposed in the interior volume and having a central opening, wherein the poppet includes three raised portions corresponding to the three openings of the top plate; and
a plurality of actuators coupled to the poppet at different locations radially outward of the central opening of the poppet to raise or lower the poppet within the interior volume between an open position, where the poppet is spaced from the top plate to allow gas flow through the symmetric flow valve, and a closed position, where the three raised portions cover the three openings of the top plate to substantially prevent gas flow through the symmetric flow valve.

15. The symmetric flow valve of claim 14 , wherein the three raised portions are sized to fit within the three openings of the top plate.

16. The symmetric flow valve of claim 14 , wherein the poppet s made of aluminum or stainless steel.

17. A symmetric flow valve for use in a substrate processing chamber, comprising:
a valve body having sidewalls, a bottom plate, and a top plate to define an interior volume, wherein the bottom plate includes an opening configured to interface with a pump port, and wherein the top plate includes three openings arranged axisymmetrically about a center of the top plate;
a poppet disposed in the interior volume and having a central opening, wherein the poppet includes three raised portions corresponding to the three openings of the top plate; and
a plurality of actuators coupled to the poppet to raise or lower the poppet within the interior volume between an open position, where the poppet is spaced from the top plate to allow gas flow through the symmetric flow valve, and a closed position, where the three raised portions cover the three openings of the top plate to substantially prevent gas flow through the symmetric flow valve, wherein at least one of:

the poppet includes a cutout and a coupling element extending radially inward into the cutout from a sidewall of the poppet, wherein the coupling element is configured to couple the poppet to one of the plurality of actuators, or the poppet includes a plurality of wings extending radially outward from the poppet, wherein each of the plurality of wings include a coupling element to receive an actuator of the plurality of actuators.

Assignees

• Applied Materials Inc

Inventors

• Nguyen Andrew
• Vishwanath Yogananda Sarode
• Chang Xue
• Rayaroth Anilkumar
• Naik Chetan
• Narayan Balachandra Jatak

Classifications

• H10P72/00

  Handling or holding of wafers, substrates or devices during manufacture or treatment thereof · CPC title

• F16K31/12

  actuated by fluid ({fluid-actuated lift valves F16K1/126} ; fluid-actuated check valves F16K15/00; fluid-actuated safety valves F16K17/00) · CPC title

• F16K25/005

  Particular materials for seats or closure elements · CPC title

• F16K1/42 Primary

  Valve seats (for double-seat valves F16K1/44) · CPC title

• F16K1/36 Primary

  Valve members (for double-seat valves F16K1/44 {; for butterfly valves F16K1/222, F16K1/223}) · CPC title