Integrated on-chip polarizer
US-10502895-B2 · Dec 10, 2019 · US
US11198643B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11198643-B2 |
| Application number | US-201916270735-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 8, 2019 |
| Priority date | Feb 8, 2012 |
| Publication date | Dec 14, 2021 |
| Grant date | Dec 14, 2021 |
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The present invention relates to a substrate comprising an ion-implanted layer, for example a cation, wherein the ion implanted layer has a substantially uniform distribution of the implanted ions at a significantly greater depth than previously possible, to a well-defined and sharp boundary within the substrate. The invention further comprises said substrate wherein the substrate is a silicon based substrate, such as glass. The invention also comprises the use of said material as a waveguide and the use of said material in measurement devices.
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The invention claimed is: 1. A substrate comprising an ion-implanted layer wherein said ion implanted layer extends into the substrate substantially from a surface of the substrate to a penetration depth of at least 50 nm, wherein the ion-implanted layer has a substantially uniform distribution of the implanted ions substantially from the surface of the substrate, wherein the ion implanted layer has an implanted ion density of at least 10 21 ions cm −3 , wherein the ion implanted layer comprises two or more zones, and wherein two or more of the zones overlap, the overlapping zones comprising different ions. 2. A substrate according to claim 1 where the penetration depth of the implanted ions is at least 200 nm or at least 500 nm. 3. A substrate according to claim 1 wherein the ion implanted layer has an implanted ion density of at least 10 23 ions cm −3 . 4. A substrate according to claim 1 wherein the substrate is a glass selected from silica, silicate, phosphate, tellurite, tellurite derivatives, germanate, bismuthate, borates, acetates, halides, chalcogenides and solgel route glasses. 5. A substrate according to claim 1 wherein the substrate is an optical polymer. 6. A substrate according to claim 5 wherein the optical polymer is selected from Poly(methyl methacrylate), polyvinyl alcohol, polyether ether ketone, polyethylene terephthalate, polyimide, polypropylene, and polytetrafluoroethylene. 7. A substrate according to claim 1 wherein the ion is a cation. 8. A substrate according to claim 7 wherein the cation is selected from the group Nd(3+), Yb(3+), Er(3+), Tm(3+), Pr(3+), Ho(3+), Sm(3+), Eu(3+), Tb(3+), Ce(3+) and La (3+). 9. A substrate according to claim 1 wherein the substrate is a waveguide. 10. A substrate according to claim 1 wherein the substrate is a waveguide of a biosensor or the substrate is provided in a photonic chip of a biosensor. 11. A method for the non-invasive measurement of a metabolite in an animal which comprises: (i) applying a biosensor on or near said animal, said biosensor comprising said substrate of claim 10 ; (ii) irradiating said substrate or waveguide with a light source such that a portion of the light escapes into the animal; (iii) measuring the photoluminescence lifetime of the escaped light; wherein the recovery lifetime is correlated with the level of the metabolite.
containing silica · CPC title
Surface property or characteristic of web, sheet or block · CPC title
by explosion; by evaporation and subsequent ionisation of the vapours {, e.g. ion-plating}(C23C14/34 - C23C14/48 take precedence) · CPC title
using optical sensors, e.g. spectral photometrical oximeters · CPC title
Silicon · CPC title
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