Reversing machine and substrate polishing apparatus
US-2017072531-A1 · Mar 16, 2017 · US
US11192152B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11192152-B2 |
| Application number | US-201916594411-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 7, 2019 |
| Priority date | Oct 9, 2018 |
| Publication date | Dec 7, 2021 |
| Grant date | Dec 7, 2021 |
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A compact versatile cell-type cleaning device and cell-type drying device is provided. A cleaning apparatus includes: a cover having a loading port formed on a wall surface of a cleaning chamber, and an unloading port formed on a wall surface of a drying chamber; a partition plate having an intermediate transfer port for dividing into the cleaning chamber and the drying chamber; an intermediate door that opens and closes the intermediate transfer port; a turntable disposed inside the drying chamber and having a first gripping device that grips an object, and a moving device having a gripping device that grips the object through a loading port, cleans the object inside the cleaning chamber while gripping the object, and moves the object to the turntable.
Opening claim text (preview).
What is claimed is: 1. A cleaning apparatus, comprising: a cover having a cleaning chamber and a drying chamber inside, the cover having a loading port formed on a wall surface of the cleaning chamber, and an unloading port formed on a wall surface of the drying chamber; a partition plate having an intermediate transfer port, the partition plate dividing a space inside the cover into the cleaning chamber and the drying chamber; an intermediate door configured to open and close the intermediate transfer port; a turntable disposed inside the drying chamber, the turntable having a first gripping device configured to grip an object, the turntable configured to rotate to a drop position for receiving the object through the intermediate transfer port, a drying position for drying the object, and a dispensing position for dispensing the object through the unloading port, the first gripping device including a rotating plate fixed to a rotation shaft disposed on the turntable; and a moving device disposed inside the cleaning chamber, the moving device having a second gripping device configured to grip the object through the loading port, the moving device configured to move the object to the first gripping device through the intermediate transfer port. 2. The cleaning apparatus according to claim 1 , wherein the moving device grips the object from an outside of the loading port and loads the object into the cover through the loading port. 3. The cleaning apparatus according to claim 1 , wherein the turntable is configured so that the object protrudes from the intermediate transfer port with the object gripped by the first gripping device facing the intermediate transfer port, and the object protrudes from the unloading port with the object gripped by the first gripping device facing the unloading port. 4. The cleaning apparatus according to claim 1 , further comprising: a pump configured to supply cleaning liquid; and a plurality of nozzles configured to eject the cleaning liquid, the nozzles connected to the pump, the nozzles arranged on a passing trajectory of a plurality of cleaning points of the object when the object moves inside the cleaning chamber. 5. The cleaning apparatus according to claim 1 , wherein the loading port and the unloading port are located on any of a front surface or lateral surface of the cleaning apparatus. 6. The cleaning apparatus according to claim 1 , wherein the first gripping device is rotatably disposed on the turntable, and the cleaning apparatus further comprising: a motor disposed on the turntable, the motor configured to rotate the first gripping device. 7. The cleaning apparatus according to claim 2 , wherein the turntable is configured so that the object protrudes from the intermediate transfer port with the object gripped by the first gripping device facing the intermediate transfer port, and the object protrudes from the unloading port with the object gripped by the first gripping device facing the unloading port. 8. The cleaning apparatus according to claim 2 , further comprising: a pump configured to supply cleaning liquid; and a plurality of nozzles configured to eject the cleaning liquid, the nozzles connected to the pump, the nozzles arranged on a passing trajectory of a plurality of cleaning points of the object when the object moves inside the cleaning chamber. 9. The cleaning apparatus according to claim 3 , further comprising: a pump configured to supply cleaning liquid; and a plurality of nozzles configured to eject the cleaning liquid, the nozzles connected to the pump, the nozzles arranged on a passing trajectory of a plurality of cleaning points of the object when the object moves inside the cleaning chamber. 10. The cleaning apparatus according to claim 1 , wherein the first gripping device includes a clamp to clamp the object. 11. A cleaning apparatus, comprising: a cover having a cleaning chamber and a drying chamber inside, the cover having a loading port formed on a wall surface of the cleaning chamber, and an unloading port formed on a wall surface of the drying chamber; a partition plate having an intermediate transfer port, the partition plate dividing a space inside the cover into the cleaning chamber and the drying chamber; an intermediate door configured to open and close the intermediate transfer port; a turntable disposed inside the drying chamber, the turntable having a first gripping device configured to grip an object, the turntable configured to rotate to a drop position for receiving the object through the intermediate transfer port, a drying position for drying the object, and a dispensing position for dispensing the object through the unloading port; and a moving device disposed inside the cleaning chamber, the moving device having a second gripping device configured to grip the object through the loading port, the moving device configured to move the object to the first gripping device through the intermediate transfer port, wherein the turntable is configured so that the object protrudes from the intermediate transfer port with the object gripped by the first gripping device facing the intermediate transfer port, and the object protrudes from the unloading port with the object gripped by the first gripping device facing the unloading port. 12. The cleaning apparatus according to claim 11 , wherein the first gripping device includes a clamp to clamp the object.
Ducting arrangements from the source of air or other gases to the materials or objects being dried · CPC title
Accessories or details of general applicability for machines or apparatus for cleaning · CPC title
by centrifugal treatment · CPC title
Cleaning travelling work (B08B3/042 takes precedence) · CPC title
with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration · CPC title
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