Piezoelectric sensors and quartz crystal monitors

Patent metadata

Field	Value
Publication number	US-11187680-B2
Application number	US-201916361703-A
Country	US
Kind code	B2
Filing date	Mar 22, 2019
Priority date	Sep 12, 2016
Publication date	Nov 30, 2021
Grant date	Nov 30, 2021

Abstract

Surface modifications and improvements to piezoelectric-based sensors, such as QCMs and other piezoelectric devices, that significantly increase the sensitivity and the specificity (selectivity). These modifications can comprise mechanical and chemical changes to the surfaces of the sensors, either individually or together. For example, nanosize structures may be provided on the surface to improve sensitivity. Additionally, chemical coatings may be tethered to the surfaces, walls, or crystal to provide targeted sensitivity. Additionally, porous, layered and multiple sensor arrays may be formed to enhance sensitivity and selectivity.

First claim

What is claimed is:

1. A sensor, comprising:
a sensing oscillator formed from a piezoelectric material having an upper surface; and
a plurality of upstanding walls positioned directly on the upper surface, wherein the plurality of upstanding walls have a height of between 100 and 1000 nanometers, a width of between 100 and 500 nanometers, a length of between 2 and 4 millimeters, and are spaced apart from each other by between 100 and 1000 nanometers to define a volume therebetween for entrapping at least one molecule to be detected so that the at least one molecule will collide with at least one of the plurality of walls; and
a reference oscillator coupled to the sensing oscillator that is configured to detect any collisions of the at least one molecule with at least one of the plurality of walls based on a change in a change of relative phase between the sensing oscillator and the reference oscillator.

2. The sensor of claim 1 , wherein the piezoelectric material is a piezoelectric composite polymer.

3. The sensor of claim 1 , wherein the piezoelectric material is a quartz crystal.

4. The sensor of claim 3 , further comprising a noble metal coating on the upper surface of the piezoelectric material.

5. The sensor of claim 4 , wherein the plurality of upstanding walls are coated to reduce elasticity of any collisions between the walls and a particle.

6. A sensor, comprising:
a piezoelectric material having an upper surface, wherein the upper surface defines a plurality of pores in the piezoelectric material of the upper surface; and
a plurality of functional groups attached to the upper surface of the piezoelectric material by a tether comprising a silane and located in the plurality of pores.

7. The sensor of claim 6 , wherein the plurality of functional groups includes at least one chemical group having a specific interaction with a target analyte.

8. The sensor of claim 6 , wherein the plurality of functional groups includes at least one biochemical molecule having a specific interaction with a target analyte.

9. The sensor of claim 6 , further comprising a series of layers positioned on the upper surface, wherein each layer of the series of layers include a corresponding series of pores.

Assignees

• Schlereth Fritz H
• Spencer James
• Univ Syracuse

Inventors

• Schlereth Fritz H
• Spencer James

Classifications

• G01N2291/012

  Phase angle · CPC title

• G01N2291/0215

  Mixtures of three or more gases, e.g. air · CPC title

• G01N2291/0426

  Bulk waves, e.g. quartz crystal microbalance, torsional waves · CPC title

• G01N29/12

  by measuring frequency or resonance of acoustic waves {(measuring frequency or resonant frequency of mechanical vibrations or acoustic waves in general G01H1/06, G01H3/04, G01H13/00; acoustic resonators G10K11/04; vibration or shock testing of structures G01M7/00)} · CPC title

• G01N29/2443 Primary

  Quartz crystal probes · CPC title