Optical coating method, apparatus and product

Patent metadata

Field	Value
Publication number	US-11180410-B2
Application number	US-201816128048-A
Country	US
Kind code	B2
Filing date	Sep 11, 2018
Priority date	Nov 30, 2011
Publication date	Nov 23, 2021
Grant date	Nov 23, 2021

Abstract

This disclosure is directed to an improved process for making glass articles having optical coating and easy-to clean coating thereon, an apparatus for the process and a product made using the process. In particular, the disclosure is directed to a process in which the application of the optical coating and the easy-to-clean coating can be sequentially applied using a single apparatus. Using the combination of the coating apparatus and the substrate carrier described herein results in a glass article having both optical and easy-to-clean coating that have improved scratch resistance durability and optical performance, and in addition the resulting articles are “shadow free.”

First claim

We claim:

1. A method comprising:
releasably affixing a glass substrate comprising a first surface and a second surface on a substrate retention area of a substrate retention surface of a substrate carrier, wherein (i) the substrate carrier further comprises an underside facing an opposite direction as the substrate retention surface, (ii) the substrate retention area faces the first surface of the glass substrate, and (iii) the first surface and the second surface of the glass substrate face in opposite directions;
magnetically attaching the substrate carrier having the glass substrate thereon to a rotatable dome within a vacuum chamber so that the underside of the substrate carrier faces the rotatable dome and the second surface of the glass substrate can be coated with an optical coating and an easy-to-clean (ETC) coating, wherein the substrate carrier does not include elements that project beyond the second surface of the glass substrate;
evacuating the vacuum chamber;
rotating the rotatable dome and depositing the optical coating on the second surface of the glass substrate;
rotating the rotatable dome and depositing the ETC coating on top of the optical coating following deposition of the optical coating, wherein the optical coating is not exposed to ambient atmosphere prior to the deposition of the ETC coating; and
removing the glass substrate having the optical coating and the ETC coating from the vacuum chamber to obtain a glass substrate having a uniform optical coating deposited on the glass substrate and the ETC coating deposited on the optical coating.

2. The method according to claim 1 , wherein an adhesive material is positioned over the substrate retention surface in the substrate retention area to releasably affix the glass substrate to the substrate retention surface.

3. The method according to claim 2 , wherein, before releasably affixing the glass substrate to the substrate carrier, the substrate carrier further comprises a polymer film positioned between the substrate retention surface and the adhesive material.

4. The method according to claim 3 , wherein the polymer film comprises a thermoplastic polymer film.

5. The method according to claim 3 , wherein the polymer film is a static film.

6. The method according to claim 2 , wherein the adhesive material is a pressure sensitive adhesive.

7. The method according to claim 2 , wherein the adhesive material is selected from the group consisting of acrylic adhesives, rubber adhesives, and silicone adhesives.

8. The method according to claim 2 , wherein
before magnetically attaching the substrate carrier to the rotatable dome, the substrate carrier further comprises a plurality of magnets extending from the underside of the substrate carrier; and
magnetically attaching the substrate carrier having the glass substrate loaded thereon to the rotatable dome comprises using the plurality of magnets, and further wherein the plurality of magnets are positioned outside of a perimeter of the substrate retention area.

9. The method of claim 8 , wherein the plurality of magnets of the substrate carrier off-set the substrate carrier a distance from the rotatable dome.

10. The method according to claim 1 , further comprising:
positioning the glass substrate on the substrate retention surface and supporting the glass substrate with a plurality of pins extending from the substrate retention area, wherein, the substrate carrier further comprises a spring system comprising a retractable pin held in place by a spring which biases the retractable pin into contact with the glass substrate when the glass substrate is positioned on the substrate retention surface, and a plurality of side stoppers extending from the substrate retention surface for a distance such that tops of the plurality of side stoppers do not extend beyond the second side of the glass substrate.

11. The method of claim 10 , wherein the retractable pin is closer to an axis of rotation of the rotatable dome than the plurality of pins.

12. The method according to claim 1 further comprising:
supporting the glass substrate on the substrate retention surface with a plurality of pins extending from the substrate retention area,
wherein, the substrate carrier further comprises a housing with a retractable pin disposed in the housing, wherein the retractable pin is held in place by a spring, the retractable pin being outwardly biased from the housing and into contact with the glass substrate when the substrate is positioned on the substrate retention surface, and a plurality of movable pins for holding an edge of the glass substrate when the glass substrate is positioned on the substrate retention surface, wherein positions of the plurality of moveable pins are adjustable to accommodate glass substrates of different shapes and dimensions.

13. The method according to claim 1 , further comprising curing the ETC coating in air at room temperature or by heating the ETC coating.

14. The method according to claim 1 , wherein the vacuum chamber is evacuated to a pressure of less than or equal to 10 −4 Torr.

15. The method according to claim 1 further comprising densifying the optical coating as the optical coating is deposited.

16. The method according to claim 1 , wherein the vacuum chamber contains at least one e-beam source for vaporizing source materials for the optical coating.

17. The method according to claim 1 , wherein depositing the optical coating comprises depositing a multilayer optical coating comprising at least one period of a high refractive index material and a low refractive index material, wherein:
the high refractive index material is selected from the group consisting of ZrO 2 , HfO 2 , Ta 2 O 5 , Nb 2 O 5 , TiO 2 , Y 2 O 3 , Si 3 N 4 , SrTiO3, and WO 3 ; and
the low refractive index material is selected from the group consisting of SiO 2 , MgF 2 , YF 3 , YbF 3 and Al 2 O 3 .

18. The method according to claim 1 , wherein the glass substrate is formed from ion-exchanged silica glass, non-ion-exchanged silica glass, aluminosilicate glass, borosilicate glass, aluminoborosilicate glass, or soda lime glass.

19. The method according to claim 1 , wherein source material for the ETC coating is a alkyl perfluorocarbon silane of formula (R F ) x SiX 4-x , where R F is a linear C 6 -C 30 alkyl perfluorocarbon, X=Cl or —OCH 3 — and x=2 or 3.

20. The method according to claim 1 , wherein a variation in a thickness of the optical coating from a first edge of the optical coating to second edge of the optical coating of the glass substrate is less than or equal to 2%.

21. The method of claim 1 , wherein the glass substrate is releasably affixed to the substrate carrier via a statically charged polymer film.

22. A method comprising:
releasably affixing a first surface of a glass substrate to a substrate retention surface of a substrate carrier, the substrate carrier further comprising (i) an underside that faces an opposite direction as the substrate retention surface and (ii) a plurality of magnets extending from the underside;
magnetically attaching, with the plurality of magnets, the substrate carrier with the glass substrate releasably affixed thereto onto a rotatable dome positioned within a vacuum chamber, with the underside of the substrate carrier facing the rotatable dome; and
while the substrate carrier with the glass substrate is attached to the rotatable dome, evacuating the vacuum chamber and rotating the rotatable dome;
while rotating the rot

Assignees

• Corning Inc

Inventors

• Lee Christopher Morton
• Lu Xiao-Feng
• Ouyang Michael Xu
• Zhang Junhong

Classifications

• C03C17/002 Primary

  for flat glass, e.g. float glass · CPC title

• B05D2203/35

  Glass · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• C03C2217/78

  Coatings specially designed to be durable, e.g. scratch-resistant · CPC title

• C23C14/56

  Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks · CPC title