Command data generation method, positioning apparatus, lithography apparatus, and article manufacturing method
US-2015378342-A1 · Dec 31, 2015 · US
US11175647B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11175647-B2 |
| Application number | US-201816004639-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 11, 2018 |
| Priority date | Jun 14, 2017 |
| Publication date | Nov 16, 2021 |
| Grant date | Nov 16, 2021 |
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A controller of a motor that drives a driven body includes: an inertia estimating unit that estimates inertia on the basis of feedback information (torque and current) of the motor; a computing unit that computes an acceleration or deceleration time constant of the motor from the estimation inertia estimated by the inertia estimating unit; a storage unit that stores an inertia difference which is a difference between the estimation inertia and at least one known actual inertia and a time constant difference which is a difference between an actual acceleration or deceleration time constant corresponding to the actual inertia and an acceleration or deceleration time constant calculated on the basis of the estimation inertia; and a correction unit that corrects the acceleration or deceleration time constant calculated by the computing unit using the inertia difference and the time constant difference stored in the storage unit.
Opening claim text (preview).
What is claimed is: 1. A controller of a motor that drives a driven body, the controller comprising: a processor configured to control the controller to: estimate inertia on the basis of feedback information of the motor; compute an acceleration or deceleration time constant of the motor from the estimated inertia; store an inertia difference which is a difference between the estimated inertia and at least one known actual inertia and a time constant difference which is a difference between an actual acceleration or deceleration time constant corresponding to the actual inertia and an acceleration or deceleration time constant calculated on the basis of the estimated inertia; and correct the acceleration or deceleration time constant calculated using the inertia difference and the time constant difference stored in order to reliably prevent the driven body from moving at an excessively high acceleration by setting the acceleration or deceleration time constant to fall within an appropriate range. 2. The controller according to claim 1 , wherein the acceleration or deceleration time constant is corrected using coefficients acquired by performing polynomial fitting with respect to a plurality of inertia differences and a plurality of time constant differences. 3. The controller according to claim 1 , wherein the processor is further configured to control the controller to set a maximum value or a minimum value of the acceleration or deceleration time constant from the time constant difference stored.
characterised by control of velocity, acceleration or deceleration (G05B19/19 takes precedence) · CPC title
Positioning, indexing · CPC title
Select by combination of detected force, acceleration, speed, work rate · CPC title
Acceleration or deceleration, inertial measurement · CPC title
Acceleration, deceleration control · CPC title
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