Digital microfluidic systems and methods for droplet manipulation

Patent metadata

Field	Value
Publication number	US-11167288-B2
Application number	US-201816177133-A
Country	US
Kind code	B2
Filing date	Oct 31, 2018
Priority date	Oct 31, 2017
Publication date	Nov 9, 2021
Grant date	Nov 9, 2021

Abstract

The present disclosure relates to digital microfluidic systems. Particularly, aspects are directed to a digital microfluidic system that includes a droplet chip having a substrate, a plurality of electrodes and corresponding plurality of conducting vias or embedded conductive posts formed in the substrate, and a dielectric layer formed over the plurality of electrodes; and a control chip having a substrate, a plurality of transistors and corresponding wiring layers formed in the substrate, and a plurality of contacts formed over the plurality of transistors. Each of the plurality of contacts is electrically connected to a corresponding transistor of the plurality of transistors, and one or more of the plurality of contacts is removably connected to one or more of the plurality of conducting vias or embedded conductive posts such that one or more of the plurality of transistors are electrically connected to one or more of the plurality of electrodes.

First claim

What is claimed is:

1. A digital microfluidic system comprising:
a droplet chip comprising a first substrate, a plurality of electrodes and a corresponding plurality of conducting vias formed in the first substrate, and a dielectric layer formed over the plurality of electrodes; and
a control chip comprising a second substrate, a plurality of transistors and corresponding wiring layers formed in the second substrate, and a plurality of contacts formed over the plurality of transistors, wherein the plurality of contacts comprises a plurality of conductive pins,
wherein each of the plurality of contacts is electrically connected to a terminal of a corresponding transistor of the plurality of transistors, and one or more of the plurality of contacts of the control chip is removably connected to one or more of the plurality of conducting vias of the droplet chip such that one or more of the plurality of transistors of the control chip are electrically connected to one or more of the plurality of electrodes of the droplet chip,
wherein the plurality of conducting vias are exposed at a bottom surface of the first substrate of the droplet chip,
wherein each of the plurality of conducting vias is lined with a conductive material but maintains a hole devoid of material through a center of the via and is configured to receive a corresponding conductive pin of the plurality of conductive pins from the control chip, and
wherein a removable connection between the one or more of the plurality of contacts of the control chip and the conducting vias of the droplet chip is formed at the bottom surface of the first substrate of the droplet chip at which the conducting vias are exposed and a surface of the second substrate on which the plurality of conductive pins of the control chip are formed.

2. The digital microfluidic system of claim 1 , wherein:
the first substrate, the plurality of electrodes and the corresponding plurality of conducting vias, and the dielectric layer form a bottom plate of the droplet chip;
the droplet chip further includes a top plate comprising a third substrate and a ground electrode formed on the third substrate; and
the top plate and the bottom plate are arranged in parallel to one another respectively with a distance gap maintained by one or more spacers making up one or more fluidic channels there between.

3. The digital microfluidic system of claim 2 , wherein the top plate further comprises a first hydrophobic layer formed on a ground electrode, and the bottom plate further comprises a second hydrophobic layer formed on the dielectric layer.

4. The digital microfluidic system of claim 1 , wherein each of the plurality of conducting vias extends from a bottom surface of an electrode to a bottom surface of the first substrate.

5. The digital microfluidic system of claim 1 , wherein each of the plurality of transistors includes a source, drain, and gate, and the plurality of transistors are formed in a row-column fashion.

6. The digital microfluidic system of claim 5 , wherein each gate of a transistor on a same axis is interconnected to form a row of transistors, and each drain of a transistor on a same axis is interconnected to form a column of transistors.

7. The digital microfluidic system of claim 1 , wherein the first substrate is a printed circuit board (PCB), a flexible circuit board, a glass substrate, a silicon substrate, a three dimensional printed substrate, a paper substrate, a polymer substrate, or any combination thereof.

8. The digital microfluidic system of claim 1 , wherein the plurality of transistors are comprised of an array of field effect transistors, an array of thin-film transistor devices, or an array of charge-coupled devices, and the second substrate further comprises a logic device or control circuit to provide row-column addressing of the plurality of transistors.

9. A droplet chip comprising:
a top plate comprising a first substrate and a ground electrode formed on the first substrate; and
a bottom plate comprising a second substrate, a plurality of electrodes and a corresponding plurality of conducting vias formed in the second substrate, and a dielectric layer formed over the plurality of electrodes,
wherein each of the plurality of conducting vias is lined with a conductive material but maintains a hole devoid of material through a center of the via and is configured to receive a conductive pin of a plurality of conductive pins from a control chip,
wherein the top plate and the bottom plate are arranged in parallel to one another respectively with a distance gap maintained by one or more spacers making up one or more fluidic channels there between,
wherein each of the plurality of conducting vias extends from a bottom surface of an electrode to a bottom surface of the second substrate, wherein the plurality of conducting vias are exposed at a surface of the second substrate,
wherein each of the plurality of electrodes is configured to manipulate one or more droplets disposed in the one or more fluidic channels in response to an electrical voltage or current applied to at least one of the plurality of conducting vias, and
wherein the electrical voltage or current is applied to the plurality of electrodes through a removable electrical connection between the bottom surface of the second substrate on which the conducting vias are exposed and a surface of the control chip on which corresponding conductive pins are formed.

10. The droplet chip of claim 9 , wherein the top plate further comprises a first hydrophobic layer formed on a ground electrode, and the bottom plate further comprises a second hydrophobic layer formed on the dielectric layer.

11. The droplet chip of claim 9 , wherein the second substrate is a printed circuit board (PCB), a flexible circuit board, a glass substrate, a silicon substrate, a three dimensional printed substrate, a paper substrate, a polymer substrate, or any combination thereof.

12. A method of droplet manipulation with a digital microfluidic system, the method comprising:
obtaining a droplet chip comprising a first substrate, a plurality of electrodes and corresponding plurality of conducting vias formed in the substrate, and a dielectric layer formed over the plurality of electrodes;
obtaining a control chip comprising a second substrate, a plurality of transistors and corresponding wiring layers formed in the second substrate, and a plurality of contacts formed over the plurality of transistors wherein the plurality of contacts comprises a plurality of conductive pins, wherein the plurality of conducting vias are exposed at a bottom surface of the first substrate of the droplet chip, and wherein each of the plurality of conducting vias is lined with a conductive material but maintain a hole devoid of material through a center of the via and is configured to receive a corresponding conductive pin of the plurality of conductive pins from the control chip;
removably connecting the control chip with the droplet chip at the bottom surface of the first substrate of the droplet chip at which the conducting vias are exposed and a surface of the second substrate on which the plurality of conductive pins of the control chip are formed, wherein each of the plurality of contacts is electrically connected to a terminal of a corresponding transistor of the plurality of transistors, and one or more of the plurality of contacts is removably connected to one or more of the plurality of conducting vias such that one or more of the plurality of transistors are electrically connected to one or more of the plurality of electrodes; and
applying an electrical voltage or current to one or more of the plurality of tra

Assignees

• Nat Tech & Eng Solutions Sandia Llc

Inventors

• Gach Philip
• Raje Manasi
• Singh Anup

Classifications

• B01L3/50273 Primary

  characterised by the means or forces applied to move the fluids · CPC title

• B01L3/502792

  for moving individual droplets on a plate, e.g. by locally altering surface tension · CPC title

• B01L2400/0427

  Electrowetting · CPC title

• B01L2200/0673

  Handling of plugs of fluid surrounded by immiscible fluid · CPC title

• B01L2300/165

  Specific details about hydrophobic, oleophobic surfaces · CPC title