Six-degree-of-freedom large-stroke uncoupling large hollow series-parallel piezoelectric micro-motion platform

Patent metadata

Field	Value
Publication number	US-11159103-B2
Application number	US-202016751163-A
Country	US
Kind code	B2
Filing date	Jan 23, 2020
Priority date	Jan 30, 2019
Publication date	Oct 26, 2021
Grant date	Oct 26, 2021

Abstract

A six-degree-of-freedom large-stroke uncoupling large hollow series-parallel piezoelectric micro-motion platform includes a base, a movable platform top, a second platform and a first platform, wherein a first guide unit, a second guide unit, a third guide unit, a fourth guide unit, a fifth guide unit and a sixth guide unit are respectively connected in sequence to the second platform and the first platform; the first guide unit is internally provided with a first drive unit, the second guide unit is internally provided with a second drive unit, and the third guide unit is internally provided with a third drive unit; and the base is provided with a fourth drive unit, a fifth drive unit, a sixth drive unit and a seventh drive unit, the fifth drive unit is provided below the second drive unit, and the sixth drive unit is provided below the third drive unit.

First claim

The invention claimed is:

1. A six-degree-of-freedom large-stroke uncoupling large hollow series-parallel piezoelectric micro-motion platform, comprising a base and a movable platform top, wherein the movable platform top is provided above the base and forms a gap with the base; a second platform is provided between the movable platform top and the base, and forms a plurality of gaps with the movable platform top and the base; a first platform screwed to the movable platform top is provided at a center of the second platform and forms a gap with the second platform; the first platform comprises a first edge, a second edge, a third edge and a fourth edge, wherein the first edge, the second edge, the third edge and the fourth edge are arranged sequentially perpendicular to each other in a counterclockwise direction of the first platform; a first guide unit with elastic deformation is connected between the second platform and the first edge; a second guide unit with elastic deformation and a third guide unit with elastic deformation are respectively connected between the second platform and the second edge; a fourth guide unit with elastic deformation is connected between the second platform and the third edge; a fifth guide unit with elastic deformation and a sixth guide unit with elastic deformation are respectively connected between the second platform and the fourth edge; the first guide unit is internally provided with a first drive unit configured to extend and retract in a direction of the first platform, the second guide unit is internally provided with a second drive unit configured to extend and retract in the direction of the first platform, and the third guide unit is internally provided with a third drive unit configured to extend and retract in the direction of the first platform;
the base is provided with a fourth drive unit, a fifth drive unit, a sixth drive unit and a seventh drive unit, wherein the fourth drive unit, the fifth drive unit, the sixth drive unit and the seventh drive unit perpendicularly extend and retract to act on the second platform; the fourth drive unit, the fifth drive unit, the sixth drive unit and the seventh drive unit are arranged sequentially in a form of a rectangle, are provided under four corners of the second platform, and are in screwed connection with the second platform; and the fifth drive unit is provided under the second drive unit, and the sixth drive unit is provided under the third drive unit.

2. The six-degree-of-freedom large-stroke uncoupling large hollow series-parallel piezoelectric micro-motion platform according to claim 1 , wherein the fourth guide unit is internally provided with a first sensor assembly facing the third edge, the fifth guide unit is internally provided with a second sensor assembly facing the fourth edge, and the sixth guide unit is internally provided with a third sensor assembly facing the fourth edge; a fourth sensor assembly vertically facing the second platform is provided between the fourth drive unit and the fifth drive unit; a fifth sensor assembly vertically facing the second platform is provided between the fifth drive unit and the sixth drive unit; and a sixth sensor assembly vertically facing the second platform is provided between the sixth drive unit and the seventh drive unit.

3. The six-degree-of-freedom large-stroke uncoupling large hollow series-parallel piezoelectric micro-motion platform according to claim 2 , wherein the first guide unit, the second guide unit, the third guide unit, the fourth guide unit, the fifth guide unit and the sixth guide unit have a first same structure; the first same structure comprises a fifth rigid portion connected to the first platform, a half-frame-shaped frame body enclosing an outside of the fifth rigid portion, a first flexible sheet connected between an end of the half-frame-shaped frame body and the fifth rigid portion, a first protrusion provided on the half-frame-shaped frame body, a second flexible sheet connected to the first protrusion and perpendicular to the first flexible sheet, and a second protrusion provided on the second platform and connected to an end of the second flexible sheet; the second protrusion is located between the first protrusion and the first platform;
the first drive unit, the second drive unit and the third drive unit have a second same structure; the second same structure comprises a first bridge-type amplification mechanism and a first piezoelectric actuator provided inside the first bridge-type amplification mechanism; the first piezoelectric actuator is parallel to the first flexible sheet; the first bridge-type amplification mechanism comprises a first rigid portion, a second rigid portion, a third rigid portion and a fourth rigid portion, wherein the first rigid portion is provided at a first end of the first piezoelectric actuator, the third rigid portion is provided at a second end of the first piezoelectric actuator, the second rigid portion is provided on a first side of the first piezoelectric actuator and forms a gap with the first piezoelectric actuator, and the fourth rigid portion is provided on a second side of the first piezoelectric actuator and forms a gap with the first piezoelectric actuator; a third flexible sheet is connected between adjacent ones of the first rigid portion, the second rigid portion, the third rigid portion and the fourth rigid portion; a distance between a first end of the third flexible sheet and a middle section of the first piezoelectric actuator is smaller than a distance between a second end of the third flexible sheet and an end of the first piezoelectric actuator;
the second rigid portion is screwed to the half-frame-shaped frame body, and the fourth rigid portion is screwed to the fifth rigid portion;
the fourth drive unit, the fifth drive unit, the sixth drive unit and the seventh drive unit have a third same structure; the third same structure comprises a second piezoelectric actuator, a second bridge-type amplification mechanism and a third bridge-type amplification mechanism, wherein the second bridge-type amplification mechanism and the third bridge-type amplification mechanism are respectively in a shape of a ring; the second bridge-type amplification mechanism is parallel to the base; two ends of the second piezoelectric actuator are provided in an abutting manner inside the second bridge-type amplification mechanism; the third bridge-type amplification mechanism is sleeved on a periphery of the second bridge-type amplification mechanism, and a plane which the third bridge-type amplification mechanism is located on is perpendicular to an extending and retracting direction of the second piezoelectric actuator; and the third bridge-type amplification mechanism is screwed to the second platform and the base.

4. The six-degree-of-freedom large-stroke uncoupling large hollow series-parallel piezoelectric micro-motion platform according to claim 3 , wherein the second bridge-type amplification mechanism comprises a sixth rigid portion, a seventh rigid portion, an eighth rigid portion, a ninth rigid portion and a fifth flexible sheet; wherein, the sixth rigid portion is provided in an abutting manner at a first end of the second piezoelectric actuator, the seventh rigid portion is provided in an abutting manner at a second end of the second piezoelectric actuator, the eighth rigid portion is provided on a first side of the second piezoelectric actuator and forms a gap with the second piezoelectric actuator, the ninth rigid portion is provided on a second side of the second piezoelectric actuator and forms a gap with the second piezoelectric actuator, and the fifth flexible sheet for connecting the sixth rigid portion, the eighth rigid portion, the seventh rigid portion and the ninth rigid portion two by two; the third bridge-type amplification mechanis

Assignees

• Univ Ningbo

Inventors

• Cui Yuguo
• Xie Qifang
• Yang Yiling
• Li Guoping
• Shao Qianjun

Classifications

• H02N2/001

  Driving devices, e.g. vibrators · CPC title

• H02N2/0095 Primary

  producing combined linear and rotary motion, e.g. multi-direction positioners · CPC title

• H02N2/043 Primary

  Mechanical transmission means, e.g. for stroke amplification · CPC title

• H02N2/028 Primary

  along multiple or arbitrary translation directions, e.g. XYZ stages · CPC title

• H02N2/005

  Mechanical details, e.g. housings (casings for dynamo-electric machines H02K5/00) · CPC title