Electrode structure and method of manufacturing an electrode structure

Patent metadata

Field	Value
Publication number	US-11156579-B2
Application number	US-201715847474-A
Country	US
Kind code	B2
Filing date	Dec 19, 2017
Priority date	Jun 19, 2015
Publication date	Oct 26, 2021
Grant date	Oct 26, 2021

Abstract

A method of manufacturing an electrode structure includes providing an initial structure, the initial structure including at least two elevated regions extending from a substrate, wherein top portions of the two elevated regions are separated by a first lateral distance, depositing material onto the elevated regions by means of physical vapor deposition such that adjacent top portions of the deposited material are separated by a second lateral distance that is smaller than the first lateral distance, and applying electrodes onto the top portions of the material.

First claim

The invention claimed is:

1. A method of manufacturing an electrode structure, the method comprising:
providing an initial structure, the initial structure comprising at least two elevated regions extending from a substrate, wherein top portions of the two elevated regions are separated by a first lateral distance,
depositing a dielectric material by means of physical vapor deposition onto the elevated regions such that adjacent top portions of the deposited dielectric material are separated by a second lateral distance that is smaller than the first lateral distance, and
applying electrodes onto the top portions of the dielectric material,
wherein the dielectric material deposited onto an elevated region comprises a cone shape having a first lateral width adjacent to the elevated region and a second lateral width remote from the elevated region, wherein the first lateral width is smaller than the second lateral width.

2. The method according to claim 1 , wherein depositing material onto the elevated regions comprises sputtering material onto the elevated regions.

3. The method according to claim 1 , wherein the elevated regions are permanently maintained at the initial structure.

4. The method according to claim 1 , wherein the electrodes are applied onto the top portions of the deposited material by evaporation of conductive material.

5. The method according to claim 1 , wherein the elevated regions comprise an aspect ratio of width to height of about 1:1.

6. The method according to claim 1 , wherein the top portions of the elevated regions comprise a lateral width of about 1 μm and the first lateral distance between the top portions of the elevated regions is about 1 μm.

7. The method according to claim 1 , wherein the first lateral distance between the elevated regions is between about 3 μm and about 1 μm, or between about 1 μm and about 800 nm, or between about 800 nm and 500 nm.

8. The method according to claim 1 , wherein the electrode structure comprises electrodes that are separated by an electrode gap, the electrode gap comprising a lateral distance that is less than about 100 nm, or less than about 50 nm, or between about 50 nm and 20 nm.

9. The method according to claim 1 , wherein the deposited material comprises a thickness between about 400 nm and about 700 nm.

10. The method according to claim 1 , wherein the method comprises providing a material layer that is arranged between the elevated regions and the deposited material.

11. The method according to claim 1 , wherein the initial structure is formed by injection molding, or by hot embossing, or by nano-imprinting, or by dry-etching, or by wet-etching.

12. The method according to claim 1 , wherein adjacent areas of top portions of the deposited material provide a Line Width Roughness of about 20 nm.

Assignees

• Univ Freiburg Albert Ludwigs
• Fachhochschule Vorarlberg Gmbh

Inventors

• Partel Stefan
• Kasemann Stephan
• Dincer Can
• Kieninger Jochen
• Urban Gerald

Classifications

• G03F7/16

  Coating processes; Apparatus therefor (applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74) · CPC title

• C23C14/34

  Sputtering · CPC title

• C23C14/10

  Glass or silica · CPC title

• C23C14/028

  Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing · CPC title

• C23C14/24

  Vacuum evaporation · CPC title