Apparatus for conveying carrier and system for controlling carrier having the same

Patent metadata

Field	Value
Publication number	US-11152240-B2
Application number	US-202016985537-A
Country	US
Kind code	B2
Filing date	Aug 5, 2020
Priority date	Aug 7, 2019
Publication date	Oct 19, 2021
Grant date	Oct 19, 2021

Abstract

Provided is an apparatus for conveying a carrier and a system for controlling a carrier having the same, which couples a hoist and a hand using a non-contact damping structure using an eddy current. The apparatus for conveying the carrier conveys a carrier containing a wafer, and includes: a gripper for gripping the carrier; and a lifter for raising and lowering the gripper, in which the gripper and the lifter are connected in a non-contact damping structure, and a relative motion thereof is suppressed.

First claim

What is claimed is:

1. An apparatus for conveying a carrier, the apparatus conveying the carrier containing a wafer, and comprising:
a gripper for gripping the carrier; and
a lifter for raising and lowering the gripper,
wherein the gripper and the lifter are connected in a non-contact damping structure using a magnet member and a plate, and damping between the gripper and the lifter is controlled,
wherein the lifter is connected to the gripper using a plurality of connecting members,
wherein the magnet member is installed at an end of the connecting member, and
wherein the plate is installed on the gripper adjacent to the magnet member.

2. The apparatus of claim 1 , further comprising:
a driving control unit supporting a body including the gripper and the lifter and generating a driving force;
a driving wheel installed on a side of the driving control unit and moving on a rail based on the driving force; and
a guide wheel installed under the driving control unit and preventing the driving wheel from being deviated from the rail.

3. The apparatus of claim 1 , wherein the relative motion of the gripper and the lifter is suppressed using a current formed between the magnet member and the plate.

4. The apparatus of claim 3 , wherein the current is an eddy current.

5. The apparatus of claim 1 , wherein the magnet member is an electromagnet.

6. The apparatus of claim 1 , wherein the plate is formed of a non-ferrous metal.

7. The apparatus of claim 1 , further comprising:
a speed measurement sensor for measuring a speed of the apparatus for conveying the carrier; and
a control unit for adjusting a strength of the magnet member based on the speed of the apparatus for conveying the carrier.

8. The apparatus of claim 7 , wherein the speed measurement sensor is installed on a surface of the plate.

9. The apparatus of claim 1 , wherein damping between the gripper and the lifter is controlled depending on a strength of the magnet member.

10. The apparatus of claim 1 , wherein the relative movement of the gripper and the lifter is suppressed when the apparatus for conveying the carrier is traveling.

11. An apparatus for conveying the carrier, the apparatus conveying the carrier containing a wafer, and comprising:
a gripper for gripping the carrier and including a plate; and
a lifter for raising and lowering the gripper and including a magnet member,
wherein the gripper and the lifter are connected in a non-contact damping structure using the magnet member and the plate,
wherein when the apparatus for conveying the carrier is traveling, a damping between the gripper and the lifter is controlled by using an eddy current formed between the magnet member and the plate,
wherein the lifter is connected to the gripper using a plurality of connecting members,
wherein the magnet member is installed at an end of the connecting member, and
wherein the plate is installed on the gripper adjacent to the magnet member.

12. A system for controlling a carrier, comprising:
a rail installed on a ceiling;
a plurality of carrier conveying devices traveling on the rail and conveying a carrier containing a wafer to a destination; and
a carrier controller for controlling a movement of the carrier conveying device,
wherein the carrier conveying device comprises:
a gripper for gripping the carrier; and
a lifter for raising and lowering the gripper,

wherein the gripper and the lifter are connected in a non-contact damping structure using a magnet member and a plate, and a damping between the gripper and the lifter is controlled,
wherein the lifter is connected to the gripper using a plurality of connecting members,
wherein the magnet member is installed at an end of the connecting member, and
wherein the plate is installed on the gripper adjacent to the magnet member.

13. The system of claim 12 , wherein the relative movement of the gripper and the lifter is suppressed when the carrier conveying device is traveling.

14. The system of claim 12 , wherein damping between the gripper and the lifter is controlled depending on a strength of the magnet member.

15. The system of claim 12 , wherein the carrier conveying device further comprises:
a speed measurement sensor for measuring a speed of the carrier conveying device; and
a control unit for adjusting a strength of the magnet member based on the speed of the carrier conveying device.

16. The system of claim 12 , wherein the relative motion of the gripper and the lifter is suppressed using a current formed between the magnet member and the plate.

Assignees

• Semes Co Ltd

Inventors

• Myoung Noh Hoon
• Kang Han Seon
• Yoon Jung Min
• Cho Chung Il

Classifications

• H10P72/3218

  Conveying cassettes, containers or carriers · CPC title

• H10P72/3204

  using magnetic elements · CPC title

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H10P72/3221 Primary

  Overhead conveying · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title