Scanning device for scanning an object for use in a scanning microscope

Patent metadata

Field	Value
Publication number	US-11150453-B2
Application number	US-201616064475-A
Country	US
Kind code	B2
Filing date	Dec 23, 2016
Priority date	Dec 23, 2015
Publication date	Oct 19, 2021
Grant date	Oct 19, 2021

Abstract

A scanning device for scanning an object in a scanning microscope includes at least one scanning unit configured to two-dimensionally scan the object using a light beam. The scanning unit includes at least one deflection element configured to deflect a light beam impinging thereon. The deflection element is rotationally symmetric in shape. At least one rotation device is configured to rotate the scanning unit about an axis of rotation so as to allow for image field rotation.

First claim

The invention claimed is:

1. A scanning device for scanning an object in a scanning microscope, the scanning device comprising:
at least one scanning unit configured to two-dimensionally scan an image plane of the object using a light beam by rotating about first and second axes that are perpendicular to each other, the scanning unit including at least one deflection element configured to deflect a light beam impinging thereon, the deflection element being rotationally symmetric in shape; and
at least one rotation device configured to rotate the scanning unit about a third axis of rotation that is perpendicular to the first and second axes so as to allow for rotation of the image plane.

2. The scanning device according to claim 1 , wherein the third axis of rotation about which the scanning unit is rotatable extends perpendicularly to a plane in which the scanning unit extends.

3. The scanning device according to claim 1 , wherein the deflection element is pivotable about a first swivel pin and/or about a second swivel pin in accordance with a maximum scanning angle, and wherein the first swivel pin and/or the second swivel pin extend in parallel with a plane in which the scanning unit extends.

4. The scanning device according to claim 1 , further comprising a first swivel pin and a second swivel pin, each of the swivel pins extending through a center of the deflection element.

5. The scanning device according to claim 1 , wherein the rotationally symmetrical shape relates to a center of the deflection element, and wherein the third axis of rotation about which the scanning unit is rotatable extends through the center of the deflection element.

6. The scanning device according to claim 1 , wherein the scanning unit is rotatable about the third axis of rotation at least in an angle range of from 0° to 180°.

7. The scanning device according to claim 1 , wherein the deflection element is a reflective element configured to reflect the light beam impinging thereon, and wherein the deflection element is configured to reflect the light beam impinging thereon in a manner that retains polarization.

8. The scanning device according to claim 1 , wherein the scanning unit comprises a microelectromechanical systems (MEMS) scanner or a deformable mirror device (DMD) scanner.

9. The scanning device according to claim 8 , wherein the MEMS scanner is a monolithic two-dimensional (2D) scanner.

10. The scanning device according to claim 1 , wherein the rotation device comprises a gear assembly that is drivable by a drive unit so as to rotate the scanning unit about the axis of rotation.

11. A scanning microscope comprising the scanning device according to claim 1 arranged in a beam path of the scanning microscope.

12. The scanning microscope according to claim 11 , wherein the scanning unit is arranged such that the light beam impinging on the deflection element is deflected, in a home position of the scanning unit, such that the deflected light beam and the impinging light beam form a specified deflection angle greater than a maximum scanning angle for the two-dimensional scanning of the object and less than 45°.

13. The scanning microscope according to claim 12 , wherein the specified deflection angle is less than or equal to 35°.

14. The scanning microscope according to claim 11 , wherein a maximum scanning angle is ±25°, ±20°, ±15°, ±10° or ±5°.

15. The scanning microscope according to claim 11 , wherein the scanning microscope is a laser scanning microscope.

16. The scanning device according to claim 1 , wherein the deflection element comprises a mirror and the third axis extends perpendicularly to a plane of the mirror.

17. The scanning device according to claim 16 , wherein the first, second and third axes intersect a center of the mirror.

Assignees

• Leica Microsystems

Inventors

• Dyba Marcus

Classifications

• G02B27/642

  Optical derotators, i.e. systems for compensating for image rotation, e.g. using rotating prisms, mirrors · CPC title

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• G02B26/0833

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• G02B21/0048 Primary

  scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors · CPC title