Deposition mask package and deposition mask packaging method

Patent metadata

Field	Value
Publication number	US-11148397-B2
Application number	US-201916352117-A
Country	US
Kind code	B2
Filing date	Mar 13, 2019
Priority date	Sep 29, 2016
Publication date	Oct 19, 2021
Grant date	Oct 19, 2021

Abstract

A deposition mask package according to the present embodiment includes a receiving portion, a lid portion that faces the receiving portion, a deposition mask that is arranged between the receiving portion and the lid portion and has an effective region in which a plurality of through-holes is formed. The receiving portion has a first opposing surface facing the lid portion and a concave portion provided on the first opposing surface. The concave portion is covered by a first flexible film. The effective region of the deposition mask is arranged on the concave portion with the first flexible film interposed therebetween.

First claim

The invention claimed is:

1. A deposition mask package comprising:
a receiving portion;
a lid portion that faces the receiving portion;
a deposition mask that is arranged between the receiving portion and the lid portion and has an effective region in which a plurality of through-holes is formed,
wherein the receiving portion has a first opposing surface facing the lid portion and a concave portion provided on the first opposing surface,
the concave portion is covered with a first flexible film,
the effective region of the deposition mask is arranged on the concave portion with the first flexible film interposed therebetween,
wherein ends on both sides in a first direction of the deposition mask are arranged on the first opposing surface of the receiving portion, and
wherein a dimension of the concave portion in a second direction orthogonal to the first direction is larger than a dimension of the deposition mask in the second direction.

2. The deposition mask package according to claim 1 , wherein an interposed sheet is interposed between the deposition mask and the first flexible film, and
a dimension of the interposed sheet in a second direction orthogonal to the first direction is smaller than a dimension of the concave portion in the second direction.

3. The deposition mask package according to claim 1 , wherein the first flexible film is a PET film.

4. The deposition mask package according to claim 1 , wherein the first flexible film is antistatic-coated.

5. The deposition mask package according to claim 1 , wherein a second flexible film is interposed between the lid portion and the deposition mask.

6. The deposition mask package according to claim 1 , wherein the receiving portion and the lid portion are connected via a hinge portion.

7. The deposition mask package according to claim 1 , further comprising a sealing bag that seals the receiving portion and the lid portion.

8. The deposition mask package according to claim 1 , further comprising an impact sensor that detects an impact applied to the deposition mask.

9. A deposition mask package comprising:
a receiving portion;
a lid portion that faces the receiving portion; and
a deposition mask stacked body arranged between the receiving portion and the lid portion,
wherein the deposition mask stacked body includes:
a deposition mask having a first surface, a second surface positioned opposite to the first surface, and a plurality of through-holes extending from the first surface to the second surface; and
a plurality of interposed sheets stacked on the first surface and the second surface of the deposition mask, and
a difference between a thermal expansion coefficient of the deposition mask and the thermal expansion coefficient of the interposed sheet is 7 ppm/° C. or less.

10. The deposition mask package according to claim 9 , wherein the interposed sheet has a dimension that enables a circumferential edge of the interposed sheet to protrude from the deposition mask over an entire circumference as viewed along a stacking direction of the deposition mask.

11. The deposition mask package according to claim 9 , wherein the deposition mask and the interposed sheet are formed using an iron alloy containing nickel in an amount of 30% by mass to 54% by mass.

12. The deposition mask package according to claim 9 , wherein the deposition mask and the interposed sheet are formed using an iron alloy containing chromium.

13. The deposition mask package according to claim 9 , wherein a material forming the interposed sheet is identical to a material forming the deposition mask.

14. The deposition mask package according to claim 9 , wherein a thickness of the interposed sheet is 20 μm to 100 μm.

15. The deposition mask package according to claim 9 , wherein the thickness of the deposition mask is 15 μm or more.

16. The deposition mask package according to claim 9 , wherein
the receiving portion has a first opposing surface facing the lid portion and a concave portion provided on the first opposing surface,
ends on both sides in a first direction of the deposition mask are arranged on the first opposing surface of the receiving portion,
a dimension of the interposed sheet in a second direction orthogonal to the first direction is smaller than a dimension of the concave portion in the second direction.

Assignees

• Dainippon Printing Co Ltd

Inventors

• Ikenaga Chikao
• OIKE Takumi
• MUKAIDA Tsukasa
• Watanabe Takeru

Classifications

• H10W90/00

  Package configurations · CPC title

• B65D81/05

  maintaining contents at spaced relation from package walls, or from other contents ({B65D81/022, B65D81/025, } B65D81/03 take precedence) · CPC title

• B65D79/00

  Kinds or details of packages, not otherwise provided for · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• C23C14/042

  using masks · CPC title