Optical scanning device

Patent metadata

Field	Value
Publication number	US-11143863-B2
Application number	US-201815956323-A
Country	US
Kind code	B2
Filing date	Apr 18, 2018
Priority date	Apr 28, 2017
Publication date	Oct 12, 2021
Grant date	Oct 12, 2021

Abstract

An optical scanning device includes a drive beam configured to support a mirror, and a drive source provided on the drive beam and configured to oscillate the mirror about a predetermined axis passing through the center of the light reflecting surface of the mirror. The drive beam includes multiple beams each extending in a direction perpendicular to the predetermined axis and one or more turn-back parts each connecting ends of adjacent beams, and has a zigzag shape as a whole. The multiple beams include a first beam, a second beam adjacent to the first beam, and a third beam adjacent to the second beam, the one or more turn-back parts include a first turn-back part connecting the first and second beams and a second turn-back part connecting the second and third beams, and the first and second turn-back parts are different in weight.

First claim

What is claimed is:

1. An optical scanning device comprising:
a fixed frame;
a mirror provided within the fixed frame and including a light reflecting surface on an upper side of the optical scanning device;
a first drive beam and a second drive beam provided on a right side and a left side, respectively, of the mirror and configured to support the mirror within the fixed frame; and
a drive source provided on the first drive beam and the second drive beam, the drive source being configured to oscillate the mirror about a predetermined axis passing through a center of the light reflecting surface,
wherein each of the first drive beam and the second drive beam includes a plurality of beams each extending in a direction perpendicular to the predetermined axis and one or more turn-back parts each connecting ends of adjacent beams among the plurality of beams, each of the first drive beam and the second drive beam having a zigzag shape as a whole, and
wherein the plurality of beams include a first beam, a second beam adjacent to the first beam, a third beam adjacent to the second beam, and a fourth beam adjacent to the third beam,
the one or more turn-back parts include a first turn-back part connecting the first and second beams, a second turn-back part connecting the second and third beams, and a third turn-back part connecting the third and fourth beams,
the first turn-back part and the second turn-back part have different weights by having different heights, the heights being respective maximum lengths of the first and second turn-back parts in the direction perpendicular to the predetermined axis,
the third turn-back part has a weight different from the weight of the first turn-back part by having a height different from the height of the first turn-back part, the height of the third turn-back part being a maximum length of the third turn-back part in the direction perpendicular to the predetermined axis, and
the first turn-back part and the third turn-back part face a same inner side of the fixed frame, and a distance between the first turn-back part and the inner side of the fixed frame is different from a distance between the third turn-back part and the inner side of the fixed frame.

2. The optical scanning device as claimed in claim 1 , further comprising:
a movable frame supporting the mirror,
wherein the plurality of beams of the first and second drive beams support the movable frame from a first side and a second side, respectively, of the movable frame, the second side being opposite to the first side,
wherein the fourth beam of the first drive beam and the fourth beam of the second drive beam being provided on the first side and the second side, respectively, of the movable frame, and
wherein in each of the first and second drive beams,
the third turn-back part has the weight different from the weight of the second turn-back part by having the height different from the height of the second turn-back part.

3. The optical scanning device as claimed in claim 2 ,
wherein the plurality of beams of each of the first and second drive beams include a fifth beam adjacent to the fourth beam, the fifth beam of the first drive beam and the fifth beam of the second drive beam being provided on the first side and the second side, respectively, of the movable frame, and
wherein in each of the first and second drive beams,
the one or more turn-back parts include a fourth turn-back part connecting the fourth and fifth beams, and
a weight of the fourth turn-back part is different from the weight of the third turn-back part.

4. The optical scanning device as claimed in claim 3 ,
wherein the plurality of beams of each of the first and second drive beams include a sixth beam adjacent to the fifth beam, the sixth beam of the first drive beam and the sixth beam of the second drive beam being provided on the first side and the second side, respectively, of the movable frame, and
wherein in each of the first and second drive beams,
the one or more turn-back parts include a fifth turn-back part connecting the fifth and sixth beams, and
a weight of the fifth turn-back part is different from the weight of the fourth turn-back part.

5. The optical scanning device as claimed in claim 4 , wherein in each of the first and second drive beams, the weight of the fifth turn-back part is different from the weight of the third turn-back part.

6. The optical scanning device as claimed in claim 4 , wherein in each of the first and second drive beams,
the weight of the first turn-back part is more than the weight of the second turn-back part,
the weight of the fifth turn-back part is more than the weight of the fourth turn-back part, and
the weight of the fifth turn-back part is more than or equal to the weight of the first turn-back part.

7. The optical scanning device as claimed in claim 6 , wherein in each of the first and second drive beams, the weight of the first turn-back part is more than the weight of the third turn-back part.

8. The optical scanning device as claimed in claim 6 , wherein in each of the first and second drive beams, the weight of the fourth turn-back part is more than or equal to the weight of the second turn-back part.

9. The optical scanning device as claimed in claim 1 , wherein the first drive beam and the second drive beam are axisymmetrically placed with respect to a straight line as an axis of symmetry, the straight line passing through the center of the light reflecting surface and perpendicular to the predetermined axis.

10. The optical scanning device as claimed in claim 1 , wherein the first drive beam and the second drive beam are point-symmetrically placed with respect to the center of the light reflecting surface serving as a point of symmetry.

11. The optical scanning device as claimed in claim 1 , wherein the first beam is closer to the mirror than are the second and third beams.

12. An optical scanning device comprising:
a fixed frame;
a mirror provided within the fixed frame and including a light reflecting surface on an upper side of the optical scanning device;
a movable frame supporting the mirror within the fixed frame;
a first drive beam and a second drive beam provided on a right side and a left side, respectively, of the movable frame to support the movable frame within the fixed frame;
a first connection part connecting the movable frame and the first drive beam;
a second connection part connecting the movable frame and the second drive beam; and
a drive source provided on the first drive beam and the second drive beam, the drive source being configured to oscillate the mirror about a predetermined axis passing through a center of the light reflecting surface,
wherein each of the first drive beam and the second drive beam includes a plurality of beams each having a width in a first direction along the predetermined axis and a length in a second direction perpendicular to the predetermined axis, and one or more turn-back parts each connecting ends of adjacent beams among the plurality of beams, each of the first drive beam and the second drive beam having a zigzag shape as a whole, and
wherein the plurality of beams include a first beam, a second beam adjacent to the first beam, and a third beam adjacent to the second beam,
the one or more turn-back parts include a first turn-back part connecting the first and second beams and a second turn-back part connecting the second and third beams, and
the first turn-back part and the second turn-back part have different weights by including respective ribs that are different in weight, the ribs being on a lower side of the optical scanning device opposite to the upper sid

Assignees

• Yamada Tsukasa
• Mitsumi Electric Co Ltd

Inventors

• Yamada Tsukasa

Classifications

• G02B27/0977

  Reflective elements · CPC title

• G02B26/127

  Adaptive control of the scanning light beam, e.g. using the feedback from one or more detectors (G02B27/0031 takes precedence) · CPC title

• G02B26/123 Primary

  Multibeam scanners, e.g. using multiple light sources or beam splitters · CPC title

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• G02B26/0858 Primary

  the reflecting means being moved or deformed by piezoelectric means · CPC title