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US-2015147053-A1 · May 28, 2015 · US
US11143416B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11143416-B2 |
| Application number | US-201414908206-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 29, 2014 |
| Priority date | Jul 31, 2013 |
| Publication date | Oct 12, 2021 |
| Grant date | Oct 12, 2021 |
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An electrical radiation heater arrangement for a vacuum enclosure includes at least two sets of linear heating sources, arranged in a corresponding number of concentric heating zones. The heating sources are arranged directly on the vacuum side of the vacuum enclosure and electrically connected to current rails arranged on the vacuum side with each of the current rails being connected to one electrical feedthrough from vacuum to ambient. Preferably, the heating sources are arranged in a polygon approaching a circle, essentially radially or a combination of both.
Opening claim text (preview).
What is claimed is: 1. An electrical radiation heater arrangement including a vacuum enclosure, the electrical radiation heater arrangement disposed in the vacuum enclosure and comprising: at least two sets of linear heating sources, arranged in a corresponding number of concentric heating zones, each of said sets of linear heating sources being arranged directly on a vacuum side of the vacuum enclosure and the linear heating sources of each set having a first end electrically connected to another linear heating source and a second end electrically connected to a common current rail arranged on the vacuum side, and with each of the common current rails being connected to one electrical feedthrough that passes through a wall of the vacuum enclosure from vacuum to ambient. 2. The electrical radiation heater arrangement according to claim 1 , wherein in at least one of the concentric heating zones the linear heating sources are arranged in a polygon approaching a circle. 3. The electrical radiation heater arrangement according to claim 1 , wherein the linear heating sources in at least one of the concentric heating zones are arranged essentially radially. 4. The electrical radiation heater arrangement according to claim 1 , wherein in one of the heating zones the linear heating sources are arranged in a polygon approaching a circle and in a further one the heating zones are arranged essentially radially. 5. The electrical radiation heater arrangement according to claim 1 , wherein the linear heating sources are lamps. 6. The electrical radiation heater arrangement according to claim 5 , wherein the lamps are halogen lamps. 7. The electrical radiation heater arrangement according to claim 1 , wherein a set of linear heating sources is connected to each common current rail. 8. The electrical radiation heater arrangement according to claim 7 , wherein the set of linear heating sources are connected electrically to the common current rail in parallel. 9. The electrical radiation heater arrangement according to claim 1 , wherein each of the common current rails is connected to only one feedthrough. 10. An apparatus including: a vacuum enclosure; and an electrical radiation heater arrangement disposed in the vacuum enclosure and comprising: at least two sets of linear heating sources, arranged in a corresponding number of concentric heating zones, each of said sets of linear heating sources being arranged directly on a vacuum side of the vacuum enclosure and the linear heating sources of each set having a first end electrically connected to another linear heating source and a second end electrically connected to a common current rail arranged on the vacuum side, and with each of the common current rails being connected to one electrical feedthrough that passes through a wall of the vacuum enclosure from vacuum to ambient. 11. The apparatus according to claim 10 , wherein in at least one of the concentric heating zones the linear heating sources are arranged in a polygon approaching a circle. 12. The apparatus according to claim 10 , wherein the linear heating sources in at least one of the concentric heating zones are arranged essentially radially. 13. The apparatus according to claim 10 , wherein in one of the heating zones the linear heating sources are arranged in a polygon approaching a circle and in a further one the heating zones are arranged essentially radially. 14. The apparatus according to claim 10 , wherein the linear heating sources are lamps. 15. The apparatus according to claim 14 , wherein the lamps are halogen lamps. 16. The apparatus according to claim 10 , wherein a set of linear heating sources is connected to each common current rail. 17. The apparatus according to claim 16 , wherein the set of linear heating sources are connected electrically to the common current rail in parallel. 18. The apparatus according to claim 10 , wherein each of the common current rails is connected to only one feedthrough.
mainly by radiation · CPC title
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