Valve system with position indicator

Patent metadata

Field	Value
Publication number	US-11143329-B2
Application number	US-201916564496-A
Country	US
Kind code	B2
Filing date	Sep 9, 2019
Priority date	Sep 13, 2018
Publication date	Oct 12, 2021
Grant date	Oct 12, 2021

Abstract

A valve system having a valve position indicator is disclosed. The valve position indicator allows for viewing of the valve position from one or more viewing locations. In one example, the valve position indicator includes a side valve open/close indicator and a top valve open/close indicator on a valve assembly. An indicator locking mechanism securely locks the valve position indicator in alignment with a position of a control valve.

First claim

What is claimed is:

1. A valve system comprising:
a control valve;
a valve assembly that operates to open and close the control valve;
a lock-ring; and
a valve position indicator including a valve open/close indicator,
wherein the valve open/close indicator is located on a top of the valve assembly, or a bottom of the valve assembly, or both a top of the control valve and a side of the valve assembly; and
wherein the valve position indicator is in threaded engagement with a body of the valve assembly and securely locked in alignment with a position of the control valve by the lock-ring, and
wherein the lock-ring connects to the valve position indicator.

2. The valve system of claim 1 , further comprising a gas cylinder coupled to the valve system.

3. The valve system of claim 2 , wherein the gas cylinder comprises:
an interior volume;
a reagent gas within the interior volume; and
an exterior pressure surface.

4. The valve system of claim 2 , wherein the gas cylinder comprises:
an interior volume;
an adsorbent within the interior volume, the adsorbent having sorptive affinity for a reagent gas, to contain sorptive gas as adsorbed reagent gas on the adsorbent in equilibrium with gaseous sorptive gas at the interior volume;
a gaseous fluid flow port; and
an exterior surface.

5. The valve system of claim 4 , wherein the adsorbent is selected from a material comprising one or more of carbon, activated carbon, zeolite, porous organic polymers, and metal organic framework.

6. The valve system of claim 4 , wherein the adsorbent is capable of adsorbing gas selected from silane, diborane, arsine, phosphine, chlorine, boron trichloride, boron trifluoride, B 2 H 6 , tungsten hexafluoride, trimethyl stibine, hydrogen fluoride, hydrogen chloride, hydrogen iodide, hydrogen bromide, germane, ammonia, stibine, hydrogen sulfide, hydrogen selenide, hydrogen telluride, GeF 4 , SiF 4 , NF 3 , silane, methyl silane, trimethyl silane, hydrogen, methane, nitrogen, carbon monoxide, bromine, iodine, and fluorine organometallic compounds, AsF 5 , hydrocarbons, and organometallic compounds, including all isotopes.

7. The valve system of claim 2 , wherein the gas cylinder is a pressure-regulated cylinder comprising:
an interior volume;
at least one reagent gas in the interior volume;
one or more pressure regulators; and
an exterior surface.

8. The valve system of claim 7 , wherein the at least one reagent gas is a gas selected from silane, diborane, arsine, phosphine, chlorine, boron trichloride, boron trifluoride, B 2 H 6 , tungsten hexafluoride, trimethyl stibine, hydrogen fluoride, hydrogen chloride, hydrogen iodide, hydrogen bromide, germane, ammonia, stibine, hydrogen sulfide, hydrogen selenide, hydrogen telluride, GeF 4 , SiF 4 , NF 3 , silane, methyl silane, trimethyl silane, hydrogen, methane, nitrogen, carbon monoxide, bromine, iodine, and fluorine organometallic compounds, AsF 5 , hydrocarbons, and organometallic compounds, including all isotopes.

9. The valve system of claim 7 , wherein the gas cylinder comprises two or more reagent gases.

10. The valve system of claim 9 , wherein the two or more reagent gases comprises at least one dopant source gas, a diluent gas source, and optionally a supplemental gas source.

11. The valve system of claim 10 , wherein the at least one dopant source gas is selected from eBF 3 , eGeF 4 , CO, CO 2 , GeF 4 , B 2 H 6 , and eB 2 H 6 .

12. The valve system of claim 10 , wherein the diluent gas source is hydrogen.

13. A valve system comprising:
a control valve;
a valve assembly that operates to open and close the control valve;
an indicator locking mechanism including a slotted attachment; and
a valve position indicator including a valve open/close indicator,
wherein the valve open/close indicator is located on a top of the valve assembly, or a bottom of the valve assembly, or both a top of the control valve and a side of the valve assembly; and
wherein the valve position indicator is in threaded engagement with a body of the valve assembly and is locked in alignment with a position of the control valve by the slotted attachment of the indicator locking mechanism.

14. The valve system of claim 13 , further comprising a gas cylinder coupled to the valve system,
wherein the gas cylinder comprises:
an interior volume;
a reagent gas within the interior volume; and
an exterior pressure surface.

15. The valve system of claim 13 , further comprising a gas cylinder coupled to the valve system,
wherein the gas cylinder comprises:
an interior volume;
an adsorbent within the interior volume, the adsorbent having sorptive affinity for a reagent gas, to contain sorptive gas as adsorbed reagent gas on the adsorbent in equilibrium with gaseous sorptive gas at the interior volume;
a gaseous fluid flow port; and
an exterior surface;
wherein the adsorbent is selected from a material comprising one or more of carbon, activated carbon, zeolite, porous organic polymers, and metal organic framework; and
wherein the adsorbent is capable of adsorbing gas selected from silane, diborane, arsine, phosphine, chlorine, boron trichloride, boron trifluoride, B 2 H 6 , tungsten hexafluoride, trimethyl stibine, hydrogen fluoride, hydrogen chloride, hydrogen iodide, hydrogen bromide, germane, ammonia, stibine, hydrogen sulfide, hydrogen selenide, hydrogen telluride, GeF 4 , SiF 4 , NF 3 , silane, methyl silane, trimethyl silane, hydrogen, methane, nitrogen, carbon monoxide, bromine, iodine, and fluorine organometallic compounds, AsF 5 , hydrocarbons, and organometallic compounds, including all isotopes.

16. The valve system of claim 13 , further comprising a gas cylinder coupled to the valve system,
wherein the gas cylinder is a pressure-regulated cylinder comprising:
an interior volume;
at least one reagent gas in the interior volume;
one or more pressure regulators; and
an exterior surface;
wherein the at least one reagent gas comprises a gas selected from silane, diborane, arsine, phosphine, chlorine, boron trichloride, boron trifluoride, B 2 H 6 , tungsten hexafluoride, trimethyl stibine, hydrogen, hydrogen fluoride, hydrogen chloride, hydrogen iodide, hydrogen bromide, germane, ammonia, stibine, hydrogen sulfide, hydrogen selenide, hydrogen telluride, GeF 4 , SiF 4 , NF 3 , silane, methyl silane, trimethyl silane, hydrogen, methane, nitrogen, carbon dioxide, carbon monoxide, bromine, iodine, and fluorine organometallic compounds, AsF 5 , hydrocarbons, and organometallic compounds, including all isotopes.

17. A valve system comprising:
a control valve;
a valve assembly that operates to open and close the control valve;
a lock-ring; and
a valve position indicator including a valve open/close indicator,
wherein the valve open/close indicator is located on a top of the valve assembly, or a bottom of the valve assembly, or both a top of the control valve and a side of the valve assembly, and
wherein the valve position indicator is in threaded engagement with a body of the valve assembly and securely locked in alignment with a position of the control valve by the lock-ring, and
wherein the valve open/close indicator includes:
a first sleeve; and
a second sleeve moveable relative to the first sleeve for changing the valve open/close indicator from indicating a closed valve to indicating an open valve.

18. The valve system of claim 17 , further comprising a gas cylinder coupled to the valve system,
wherein the gas cylinder comprises:
an interior volume;
a reagent gas within the interior vol

Assignees

• Entegris Inc
• Luxemboug Patent Company Sa

Inventors

• Scannell Christopher
• Despres Joseph R
• Chir Pascal
• Muzzo Paul

Classifications

• F17C11/00

  Use of gas-solvents or gas-sorbents in vessels {(absorbing compositions for acetylene C10L3/04; absorbing compositions for hydrogen C01B3/0005)} · CPC title

• F16K37/0008 Primary

  Mechanical means (F16K37/0075 takes precedence) · CPC title

• F16K1/02

  with screw-spindle (F16K1/12 - F16K1/28 take precedence; actuating mechanisms with screw-spindles F16K31/50) · CPC title

• F16K31/60

  Handles {(form, features or function of taps or faucet handles for domestic plumbing installations E03C1/04)} · CPC title

• B01D53/04

  with stationary adsorbents {(B01D53/025 takes precedence)} · CPC title