Photoacoustic gas sensor and method for operating a photoacoustic gas sensor

Patent metadata

Field	Value
Publication number	US-11137376-B2
Application number	US-201916408712-A
Country	US
Kind code	B2
Filing date	May 10, 2019
Priority date	May 23, 2018
Publication date	Oct 5, 2021
Grant date	Oct 5, 2021

Abstract

A photoacoustic gas sensor includes a hermetically sealed housing filled with a reference gas. The photoacoustic gas sensor furthermore includes a microphone arranged in the housing and configured to generate a microphone signal as a function of a sound wave based on light incident in the housing. Furthermore, the photoacoustic gas sensor includes a controllable heat source arranged in the housing and configured to selectively thermoacoustically excite the reference gas in order to generate a thermoacoustic sound wave phase-shifted with respect to the sound wave.

First claim

What is claimed is:

1. A photoacoustic gas sensor, comprising:
a housing that is hermetically sealed and filled with a reference gas;
a microphone arranged in the housing and configured to generate a microphone signal as a function of a sound wave based on light incident in the housing; and
a controllable heat source arranged in the housing and configured to thermoacoustically excite the reference gas in order to generate a thermoacoustic sound wave, different from the sound wave, that is phase-shifted with respect to the sound wave such that the thermoacoustic sound wave is inverted with respect to a thermoacoustic portion of the sound wave.

2. The photoacoustic gas sensor as claimed in claim 1 , wherein the heat source is configured to thermoacoustically excite the reference gas such that the thermoacoustic sound wave is phase-shifted by 180° with respect to the sound wave.

3. The photoacoustic gas sensor as claimed in claim 1 , further comprising:
a radiation source configured to generate the light incident in the housing based on a modulation signal, and
wherein the heat source is configured to thermoacoustically excite the reference gas based on the modulation signal.

4. The photoacoustic gas sensor as claimed in claim 1 , wherein the heat source is configured to thermoacoustically excite the reference gas such that the thermoacoustic sound wave at least partly compensates for the thermoacoustic portion of the sound wave.

5. The photoacoustic gas sensor as claimed in claim 1 , wherein the controllable heat source is configured to thermoacoustically excite the reference gas to emit thermal energy to the reference gas based on an amplitude of the microphone signal at a point in time at which the light incident in the housing contains no radiation components at wavelengths which can photoacoustically excite the reference gas.

6. The photoacoustic gas sensor as claimed in claim 1 , wherein the heat source is a temperature sensor configured to generate an output signal depending on a temperature of the reference gas at a first point in time of operation and to emit thermal energy to the reference gas depending on a received supply power for generating the thermoacoustic sound wave at a second point in time of operation.

7. The photoacoustic gas sensor as claimed in claim 6 , wherein the temperature sensor is configured to emit the thermal energy depending on a modulation signal for a radiation source,
wherein the radiation source is configured to generate the light incident in the housing based on the modulation signal.

8. The photoacoustic gas sensor as claimed in claim 1 , wherein the heat source is configured to thermoacoustically excite the reference gas such that an amplitude of the thermoacoustic sound wave corresponds to an amplitude of the thermoacoustic portion of the sound wave.

9. A method for operating a photoacoustic gas sensor comprising a hermetically sealed housing filled with a reference gas, wherein the method comprises:
generating, using a radiation source, light incident in the housing;
generating, using a microphone arranged in the housing and based on receiving the light incident in the housing, a microphone signal as a function of a sound wave; and
thermoacoustically, using a controllable heat source arranged in the housing, exciting the reference gas in order to generate a thermoacoustic sound wave, different from the sound wave, that is phase-shifted with respect to the sound wave and such that the thermoacoustic sound wave is inverted with respect to a thermoacoustic portion of the sound wave.

10. The method as claimed in claim 9 , wherein the light incident in the housing is generated based on a modulation signal,
wherein the reference gas is thermoacoustically excited based on the modulation signal.

11. The method as claimed in claim 9 , wherein the reference gas is thermoacoustically excited such that the thermoacoustic sound wave is phase-shifted by 180° with respect to the sound wave.

12. The method as claimed in claim 9 , wherein the reference gas is thermoacoustically excited such that the thermoacoustic sound wave at least partly compensates for the thermoacoustic portion of the sound wave.

13. The method as claimed in claim 9 , wherein thermoacoustically exciting the reference gas is to emit thermal energy to the reference gas based on an amplitude of the microphone signal at a point in time at which the light incident in the housing contains no radiation components at wavelengths which can photoacoustically excite the reference gas.

14. The method as claimed in claim 9 , further comprising:
generating an output signal depending on a temperature of the reference gas at a first point in time of operation and to emit thermal energy to the reference gas depending on a received supply power for generating the thermoacoustic sound wave at a second point in time of operation.

15. The method as claimed in claim 14 , further comprising:
emitting the thermal energy depending on a modulation signal for the radiation source.

16. The method as claimed in claim 9 , wherein the reference gas is thermoacoustically excited such that an amplitude of the thermoacoustic sound wave corresponds to an amplitude of the thermoacoustic portion of the sound wave.

17. A photoacoustic gas sensor, comprising:
a housing, that is hermetically sealed and filled with a reference gas;
a microphone arranged in the housing and configured to generate a microphone signal as a function of a sound wave based on light incident in the housing; and
a temperature sensor arranged in the housing and configured to generate an output signal depending on a temperature of the reference gas at a first point in time of operation and to emit thermal energy to the reference gas depending on a received supply power to generate a thermoacoustic sound wave, different from the sound wave, at a second point in time of operation,
wherein the thermoacoustic sound wave is phase-shifted with respect to the sound wave.

18. The photoacoustic gas sensor as claimed in claim 17 , wherein the temperature sensor is configured to emit the thermal energy depending on a modulation signal for a radiation source,
wherein the radiation source is configured to generate the light incident in the housing based on the modulation signal.

19. The photoacoustic gas sensor as claimed in claim 17 , wherein the temperature sensor is configured to excite the reference gas in such a way that the thermoacoustic sound wave is phase-shifted by 180° with respect to the sound wave.

20. The photoacoustic gas sensor as claimed in claim 17 , wherein the temperature sensor is configured to excite the reference gas in such a way that an amplitude of the thermoacoustic sound wave corresponds to an amplitude of a thermoacoustic portion of the sound wave.

Assignees

• Infineon Technologies Ag

Inventors

• Eberl Matthias
• Albrecht Thomas

Classifications

• G01N2291/021

  Gases · CPC title

• G01N2291/012

  Phase angle · CPC title

• G01N29/228

  related to high temperature conditions · CPC title

• G01N29/14

  using acoustic emission techniques {(echo of particles G01N29/046; measuring mechanical vibrations or acoustic waves in solids in general G01H1/00)} · CPC title

• G01N21/1702

  with opto-acoustic detection, e.g. for gases or analysing solids · CPC title