Sensor element, inertial sensor, and electronic apparatus

Patent metadata

Field	Value
Publication number	US-11137248-B2
Application number	US-201716331412-A
Country	US
Kind code	B2
Filing date	Oct 3, 2017
Priority date	Nov 11, 2016
Publication date	Oct 5, 2021
Grant date	Oct 5, 2021

Abstract

A sensor element according to the present technology includes a base portion, a movable portion, first and second bridge portions, and an acceleration detector unit. The movable portion is movable relative to the base portion by reception of an acceleration along at least a uniaxial direction. The first bridge portion includes a first beam and a first structure, the first beam connects the base portion and the movable portion, the first structure being provided between the first beam and the base portion and supporting the first beam. The second bridge portion includes a second beam and a second structure, the second beam extends in a second axis direction orthogonal to the first axis and parallel to the main surface and connects the base portion and the movable portion, the second structure being provided between the second beam and the base portion and supports the second beam.

First claim

The invention claimed is:

1. A sensor element, comprising:
a base portion that includes a main surface;
a movable portion movable based on reception of an acceleration along at least a uniaxial direction, wherein the movable portion is movable relative to the base portion;
a first bridge portion that includes:
a first beam that extends in a first axis direction parallel to the main surface and connects the base portion and the movable portion, and
a first structure between the first beam and the base portion,

wherein the first structure supports the first beam;
a second bridge portion that includes:
a second beam that extends in a second axis direction orthogonal to the first axis and parallel to the main surface, wherein the second beam connects the base portion and the movable portion, and
a second structure between the second beam and the base portion, wherein
the second structure supports the second beam,
each of the first beam and the second beam includes:
a first end portion connected to the movable portion,
a second end portion connected to the base portion, and
a joint portion between the first end portion and the second end portion, and

each of the first structure and the second structure is between the base portion and the joint portion;

a first acceleration detector unit on each of the first beam and the second beam, wherein the first acceleration detector unit is configured to output a first detection signal that corresponds to an amount of deformation of each of the first beam and the second beam; and
a second acceleration detector unit on each of the first beam and the second beam, wherein the second acceleration detector unit is configured to output a second detection signal that corresponds to an amount of deformation of each of the first beam and the second beam.

2. The sensor element according to claim 1 , wherein each of the first structure and the second structure includes a pair of reinforcement beams that are not parallel to the first beam and the second beam.

3. The sensor element according to claim 1 , wherein the first acceleration detector unit is between the first end portion and the joint portion.

4. The sensor element according to claim 1 , wherein the second acceleration detector unit is between the second end portion and the joint portion.

5. The sensor element according to claim 1 , wherein the first acceleration detector unit includes a piezoelectric acceleration detection element.

6. The sensor element according to claim 1 , wherein the second acceleration detector unit includes one of a piezoelectric acceleration detection element, a piezoresistive acceleration detection element, or an electrostatic acceleration detection element.

7. The sensor element according to claim 1 , wherein
the base portion has a frame shape that surrounds a circumference of the movable portion,
the movable portion has a shape symmetric with respect to a center of the base portion,
each of the first beam and the second beam includes a first pair of beam portion and a second pair of beam portion,
the first pair of beam portion faces the second pair of beam portion, and
the movable portion is between the first pair of beam portion and the second pair of beam portion.

8. The sensor element according to claim 7 , wherein the movable portion includes:
a center portion supported by the first beam and the second beam,
a plurality of wing portions, wherein each wing portion of the plurality of wing portions has a shape symmetric with respect to the center portion, and
a plurality of weight portions, wherein the plurality of weight portions corresponds to the plurality of wing portions.

9. An electronic apparatus, comprising:
a sensor element that includes:
a base portion that includes a main surface,
a movable portion movable based on reception of an acceleration along at least a uniaxial direction, wherein the movable portion is movable relative to the base portion,
a first bridge portion that includes:
a first beam that extends in a first axis direction parallel to the main surface and connects the base portion and the movable portion, and
a first structure between the first beam and the base portion, wherein the first structure supports the first beam,

a second bridge portion that includes:
a second beam that extends in a second axis direction orthogonal to the first axis and parallel to the main surface, wherein the second beam connects the base portion and the movable portion, and
a second structure between the second beam and the base portion, wherein
the second structure supports the second beam,
each of the first beam and the second beam includes:
 a first end portion connected to the movable portion,
 a second end portion connected to the base portion, and
 a joint portion between the first end portion and the second end portion, and
each of the first structure and the second structure is between the base portion and the joint portion;

a first acceleration detector unit on each of the first beam and the second beam, wherein the first acceleration detector unit is configured to output a first detection signal that corresponds to an amount of deformation of each of the first beam and the second beam; and
a second acceleration detector unit on each of the first beam and the second beam, wherein the second acceleration detector unit is configured to output a second detection signal that corresponds to an amount of deformation of each of the first beam and the second beam.

Assignees

• Sony Semiconductor Solutions Corp

Inventors

• Kabasawa Hidetoshi
• Kato Yusaku
• Mitani Satoshi

Classifications

• G01P15/12

  by alteration of electrical resistance {(G01P15/0897, G01P15/105 take precedence)} · CPC title

• G01C19/56

  Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces · CPC title

• G01P15/08

  with conversion into electric or magnetic values · CPC title

• G01P15/123

  by piezo-resistive elements, e.g. semiconductor strain gauges · CPC title

• G01P15/18

  in two or more dimensions · CPC title