Light source apparatus

Patent metadata

Field	Value
Publication number	US-11128097-B2
Application number	US-202016814418-A
Country	US
Kind code	B2
Filing date	Mar 10, 2020
Priority date	Aug 2, 2019
Publication date	Sep 21, 2021
Grant date	Sep 21, 2021

Abstract

A light source apparatus includes an airtight container having a hemispherical or semielliptical first curved portion configured to receive laser light, a hemispherical or semielliptical second curved portion opposite to the first curved portion, and a cylindrical portion connecting the first curved portion and the second curved portion; assist gas sealed in the airtight container; and a light source configured to irradiate laser light to the first curved portion from outside of the airtight container.

First claim

What is claimed is:

1. A light source apparatus, comprising:
an airtight container having a hemispherical or semielliptical first curved portion, a hemispherical or semielliptical second curved portion opposite to the first curved portion, and a cylindrical portion connecting the first curved portion and the second curved portion;
assist gas sealed in the airtight container; and
a light source configured to irradiate laser light to the first curved portion from outside of the airtight container.

2. The light source apparatus of claim 1 , wherein the cylindrical portion further comprises a tip portion.

3. The light source apparatus of claim 1 , wherein the second curved portion is provided with a tip portion, the tip portion in a position other than an optical axis of the laser light.

4. The light source apparatus of claim 1 , further comprising:
a mirror reflecting laser light from the light source and irradiating the laser light to the first curved portion of the airtight container,
wherein a curved shape of the first curved portion has a portion into which the laser light is vertically incident.

5. The light source apparatus of claim 1 , wherein the assist gas comprises at least one of Ar, Kr, Xe, He, Ne, N 2 , Br 2 , Cl 2 , I 2 , H 2 O, O 2 , H 2 , CH 4 , NO, NO 2 , CH 3 OH, C 2 H 5 OH, CO 2 , NH 3 , one or more metal halides, a Ne/Xe mixture, an Ar/Xe mixture, a Kr/Xe mixture, an Ar/Kr/Xe mixture, an ArHg mixture, a KrHg mixture, and a XeHg mixture.

6. The light source apparatus of claim 1 , wherein the second curved portion has a diameter greater than a diameter of the first curved portion.

7. A light source apparatus, comprising:
a light source configured to irradiate laser light;
an airtight container configured to receive the laser light, the airtight container having a first curved portion, and a cylindrical portion connected to the first curved portion, the airtight container including a tip portion, the tip portion being sealed, the tip portion in a position other than an optical axis of the laser light, the first curved portion being hemispherical or semielliptical; and
assist gas sealed in the airtight container.

8. The light source apparatus of claim 7 , further comprising:
a second curved portion, the second curved portion connected to the cylindrical portion and opposite the first curved portion.

9. The light source apparatus of claim 8 , wherein the second curved portion is hemispherical or semielliptical.

10. The light source apparatus of claim 8 , wherein the tip portion is on the second curved portion.

11. The light source apparatus of claim 7 , wherein the tip portion is on the first curved portion.

12. The light source apparatus of claim 7 , wherein the tip portion is on the cylindrical portion.

13. The light source apparatus of claim 7 , further comprising a mirror reflecting laser light from the light source and irradiating the laser light to the first curved portion of the airtight container,
wherein a curved shape of the first curved portion has a portion into which the laser light is vertically incident.

14. The light source apparatus of claim 7 , wherein the assist gas comprises at least one of Ar, Kr, Xe, He, Ne, N 2 , Br 2 , Cl 2 , I 2 , H 2 O, O 2 , H 2 , CH 4 , NO, NO 2 , CH 3 OH, C 2 H 5 OH, CO 2 , NH 3 , one or more metal halides, a Ne/Xe mixture, an Ar/Xe mixture, a Kr/Xe mixture, an Ar/Kr/Xe mixture, an ArHg mixture, a KrHg mixture, and a XeHg mixture.

15. A light source apparatus, comprising:
a container having a first end portion receiving laser light, a second end portion opposite to the first portion, and a middle portion connecting the first end portion and the second end portion, the second end portion having a larger diameter than the first end portion; and
a light source configured to irradiate laser light to the first end portion from outside of the container.

16. The light source apparatus of claim 15 , wherein the middle portion includes a tip portion, the tip portion configured to be sealed after insertion of an assist gas.

17. The light source apparatus of claim 15 , wherein the first end portion includes a tip portion, the tip portion configured to be sealed after insertion of an assist gas, the tip portion in a position other than an optical axis of the laser light.

18. The light source apparatus of claim 15 , wherein the second end portion includes a tip portion, the tip portion configured to be sealed after insertion of an assist gas, the tip portion in a position other than an optical axis of the laser light.

19. The light source apparatus of claim 15 , further comprising:
a mirror reflecting laser light from the light source and irradiating the laser light to the first end portion of the container,
wherein a curved shape of the first end portion has a portion into which the laser light is vertically incident.

20. The light source apparatus of claim 15 , further comprising:
an assist gas in the container.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Komatsu Akihiro
• Onishi Tomoki

Classifications

• H01J37/32339 Primary

  using electromagnetic radiation · CPC title

• H01J37/32513

  Sealing means, e.g. sealing between different parts of the vessel · CPC title

• H01S3/2215

  Iodine compounds or atomic iodine · CPC title

• H01S3/2232

  Carbon dioxide (CO2) or monoxide [CO] · CPC title

• H01S3/2237

  Molecular nitrogen (N2), e.g. in noble gas-N2 systems · CPC title