Mems flow control chip for gas chromatography
US-2015369781-A1 · Dec 24, 2015 · US
US11125730B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11125730-B2 |
| Application number | US-201715834252-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 7, 2017 |
| Priority date | Jun 10, 2015 |
| Publication date | Sep 21, 2021 |
| Grant date | Sep 21, 2021 |
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A flow passage unit has a column for used in a liquid chromatograph and a support body that supports the column. The column has: a porous stationary phase; a porous pressure adjusting part disposed at least at the flow-in end of the stationary phase, a liquid entering the flow-in end, the pressure adjusting part being harder than the stationary phase; and a covering part that covers the stationary phase and pressure adjusting part. The support body has a first plate and a second plate that are mutually joined, the support body forming a column holding part and a liquid flow passage, the column holding part holding the column between the first plate and the second plate, the liquid flow passage communicating with the column holding part. Pressure applied from the first plate and second plate to the pressure adjusting part is higher than pressure applied to the stationary phase.
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What is claimed is: 1. A flow passage unit comprising: a column for use in a liquid chromatograph; a support body that supports the column; a fluid flow passage formed at the support body, wherein the column has a porous stationary phase, a porous pressure adjusting part disposed between the fluid flow passage and a flow-in end of the stationary phase, a liquid entering the flow-in end, the pressure adjusting part being harder than the stationary phase, and a covering part that covers the stationary phase and the pressure adjusting part, the support body has a first plate and a second plate that are mutually joined, the support body forming a column holding part and a liquid flow passage, the column holding part holding the column between the first plate and the second plate, the liquid flow passage being parallel to a first axis and changing direction to a second axis that is perpendicular to the first axis with respect to the first and second plates, the liquid flow passage communicating with the column holding part, a diameter of a cross-section at the pressure adjusting part is larger than a diameter of a cross-section at the stationary phase, and a pressing force applied from the first plate and the second plate to the pressure adjusting part is higher than a pressing force applied to the stationary phase. 2. The flow passage unit according to claim 1 , wherein the pressure adjusting part has a smaller porous hole near an outer circumference than at a central portion. 3. The flow passage unit according to claim 1 , wherein the pressure adjusting part is provided at both the flow-in end and a flow-out end for the liquid, the flow-in end and the flow-out end being included in the stationary phase. 4. The flow passage unit according to claim 2 , wherein the pressure adjusting part is provided at both the flow-in end and a flow-out end for the liquid, the flow-in end and the flow-out end being included in the stationary phase. 5. The flow passage unit according to claim 4 , wherein in a state in which the column is not supported by the support body, an average diameter of a cross-section at a portion of the column, the portion including the pressure adjusting part, is larger than 1 times an average diameter of a cross-section at a portion of the column, the portion including the stationary phase, and is smaller than or equal to 1.1 times. 6. The flow passage unit according to claim 4 , wherein a maximum diameter of a cross-section at a portion of the column, the portion including the stationary phase, is larger than or equal to 0.96 times an inner diameter of the column holding part and is smaller than 1.0 times. 7. The flow passage unit according to claim 5 , wherein a maximum diameter of a cross-section at a portion of the column, the portion including the stationary phase, is larger than or equal to 0.96 times an inner diameter of the column holding part and is smaller than 1.0 times. 8. The flow passage unit according to claim 4 , wherein a minimum diameter of a cross-section at a portion of the column, the portion including the pressure adjusting part, is larger than 1 times an inner diameter of the column holding part and is smaller than 1.06 times. 9. The flow passage unit according to claim 5 , wherein a minimum diameter of a cross-section at a portion of the column, the portion including the pressure adjusting part, is larger than 1 times an inner diameter of the column holding part and is smaller than 1.06 times. 10. The flow passage unit according to claim 6 , wherein a minimum diameter of a cross-section at a portion of the column, the portion including the pressure adjusting part, is larger than 1 times an inner diameter of the column holding part and is smaller than 1.06 times. 11. The flow passage unit according to claim 7 , wherein a minimum diameter of a cross-section at a portion of the column, the portion including the pressure adjusting part, is larger than 1 times an inner diameter of the column holding part and is smaller than 1.06 times. 12. The flow passage unit according to claim 11 , wherein withstand pressure when the liquid flows into the liquid flow passage is 2 megapascals or higher. 13. The flow passage unit according to claim 11 , wherein the stationary phase includes a sintered ceramic with a monolithic structure. 14. The flow passage unit according to claim 13 , wherein the sintered ceramic includes porous silica. 15. The flow passage unit according to claim 14 , wherein the first plate and the second plate each are formed from a synthetic resin. 16. The flow passage unit according to claim 15 , wherein the covering part is formed from a heat-shrinkable resin, which shrinks by being heated. 17. The flow passage unit according to claim 16 , wherein the heat-shrinkable resin includes polyetheretherketone. 18. The flow passage unit according to claim 17 , wherein withstand pressure when the liquid flows into the liquid flow passage is 10 megapascals or higher. 19. The flow passage unit according to claim 1 , wherein the liquid flow passage extends from an inlet thereto toward the second plate, the inlet formed in the surface of the first plate. 20. A flow passage unit comprising: a column for use in a liquid chromatograph; a support body that supports the column; a fluid flow passage formed at the support body, wherein the column has a porous stationary phase, a porous pressure adjusting part disposed between the fluid flow passage and a flow-in end of the stationary phase, a liquid entering the flow-in end, the pressure adjusting part being harder than the stationary phase, and a covering part that covers the stationary phase and the pressure adjusting part, the support body has a first plate and a second plate that are mutually joined, the support body forming a column holding part and a liquid flow passage, the column holding part holding the column between the first plate and the second plate, the liquid flow passage communicating with the column holding part, the first and second plates surrounding the column, and the liquid flow passage including an inlet and extending from the inlet to the second plate, a diameter of a cross-section at the pressure adjusting part is larger than a diameter of a cross-section at the stationary phase, and a pressing force applied from the first plate and the second plate to the pressure adjusting part is higher than a pressing force applied to the stationary phase.
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