Surface enhanced infrared absorption stage

Patent metadata

Field	Value
Publication number	US-11125693-B2
Application number	US-201716076077-A
Country	US
Kind code	B2
Filing date	Jan 31, 2017
Priority date	Jan 31, 2017
Publication date	Sep 21, 2021
Grant date	Sep 21, 2021

Abstract

A surface enhanced infrared absorption stage may include a substrate, a static island extending from the substrate and a movable nano finger extending from the substrate. The static island may have a plasmonically active island cap and a dimension parallel to the substrate of at least one micrometer. The movable nano finger may be aligned with the dimension. The movable nano finger may have a plasmonically active finger cap closable to less than or equal to 5 nm of the island cap.

First claim

The invention claimed is:

1. A sensing apparatus comprising:
surface enhanced infrared absorption stage comprising
a substrate;
a static island extending from the substrate having a dimension parallel to the substrate of at least one micrometer, the static island having a plasmonically active island cap; and
a movable nano finger extending from the substrate and aligned with the dimension, the movable nano finger having a plasmonically active finger cap closable to less than or equal to 5 nm of the island cap.

2. The sensing apparatus of claim 1 , wherein the island cap and the finger cap are each formed from a metal selected from a group of metals consisting of gold and silver.

3. The sensing apparatus of claim 1 , wherein the island cap and the finger cap are each formed from a material selected from indium tin oxide, aluminum zinc oxide, fluorine doped tin oxide, doped zinc oxides, titanium nitride, carbon nanotubes networks and graphene.

4. The sensing apparatus of claim 1 , wherein the dimension comprise
a length of the island, the island having a width less than the length,
wherein the movable nano finger is at an end of the length.

5. The sensing apparatus of claim 4 , further comprising a second movable nano finger extending from the substrate at a second end of the length.

6. The sensing apparatus of claim 1 , wherein the static island comprises has a triangular cross sectional shape and wherein the movable nano finger is at a point of the triangular cross sectional shape.

7. The sensing apparatus of claim 1 , wherein the static island comprises a cylindrical rod and wherein the sensing apparatus further comprises a plurality of second movable nano fingers encircling a perimeter of the cylindrical rod, each of the second movable nano fingers having a plasmonically active finger cap being closable to within a nanometer of the island cap.

8. The sensing apparatus of claim 1 , and the static island has an oval cross sectional shape and wherein the sensing apparatus further comprises a plurality of second movable nano fingers encircling a perimeter of the oval cross sectional shape, each of the second movable nano fingers having a plasmonically active finger cap being closable to within a nanometer of the island cap.

9. The sensing apparatus of claim 1 comprising:
a Raman spectroscopy stimulus source-sensor;
a surface enhanced infrared absorption (SEIRA) stimulus source-sensor; and
a controller to selectively activate one of the Raman spectroscopy stimulus source-sensor and the SEIRA stimulus source-sensor to irradiate the island cap and the finger cap with stimulus and sense interactions of the stimulus with analyte.

10. The sensing apparatus of claim 1 comprising an array of island-finger pairs extending from the substrate, each island-finger pair comprising the static island and the movable nano finger.

11. A method comprising:
applying an analyte to a surface enhanced infrared absorption (SEIRA) stage comprising:
a substrate;
a static island extending from the substrate having a dimension parallel to the substrate of at least one micrometer, the static island having a plasmonically active island cap; and
a movable nano finger extending from the substrate and aligned with the dimension, the movable nano finger having a plasmonically active finger cap closable to less than or equal to 5 nm of the island cap; and

closing the finger cap towards the island cap;
irradiating the finger cap and the island cap; and
sensing infrared absorption to analyze the analyte.

12. The method of claim 11 further comprising sensing Raman scattering from the enhancing surface to analyze the analyte.

13. The method of claim 11 , wherein the finger cap and the island cap are formed from material selected from a group of materials consisting of indium tin oxide, aluminum zinc oxide, fluorine doped tin oxide, doped zinc oxides, titanium nitride, carbon nanotubes networks and graphene.

14. A method for forming a surface enhanced infrared absorption stage comprising:
forming static islands extending from a substrate, each of the static islands having a dimension parallel to the substrate of at least one micrometer, the static island having a plasmonically active island cap; and
forming movable nano fingers extending from the substrate, each of the nano fingers being aligned with the dimension of an adjacent static island, each movable nano finger having a plasmonically active finger cap closable to less than or equal to 5 nm of the island cap the adjacent static island.

15. The method of claim 14 , wherein forming the static islands and forming the nano fingers comprises:
imprinting a polymer to form the static islands and movable nano fingers; and
coating and portions of each of the static islands and movable nano fingers with a plasmonically active material to form the island caps and the finger caps.

Assignees

• Hewlett Packard Development Co

Inventors

• D'Apuzzo Fausto
• Polyakov Aleksandr
• Rogacs Anita

Classifications

• G01N21/658 Primary

  enhancement Raman, e.g. surface plasmons · CPC title

• B82Y15/00

  Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors · CPC title

• G01N21/554 Primary

  detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance · CPC title