Method for producing liquid discharge head

Patent metadata

Field	Value
Publication number	US-11123989-B2
Application number	US-201816177907-A
Country	US
Kind code	B2
Filing date	Nov 1, 2018
Priority date	Nov 27, 2017
Publication date	Sep 21, 2021
Grant date	Sep 21, 2021

Abstract

When the metal constituting a metal layer becoming a diffusion prevention layer is defined as a first metal and the metal constituting a connection terminal is defined as a second metal, in a potential-pH diagram for the first metal-H2O system, the first metal is present in a passivation area or an insensitive area at a potential of the difference between the standard electrode potentials of the first metal and the second metal in a pH range of 1 to 14.

First claim

What is claimed is:

1. A method for producing a liquid discharge head comprising a substrate provided with an energy generating element that generates energy to be used for discharging a liquid, an electrical wiring layer electrically connected to the energy generating element, a connection terminal disposed on the electrical wiring layer and performing electrical connection to the outside, and a diffusion prevention layer between the connection terminal and the electrical wiring layer;
a channel forming member disposed on the substrate and including a resin forming a liquid flow path; and
an intermediate layer disposed between the channel forming member and the substrate, the method comprising:
disposing a metal layer to form the diffusion prevention layer on the substrate;
disposing the connection terminal on the metal layer;
etching the metal layer with an acid solution using the connection terminal as a mask to form the diffusion prevention layer;
forming a layer that becomes the intermediate layer on the substrate provided with the connection terminal and the diffusion prevention layer, providing a pattern of a photoresist on the layer becoming the intermediate layer, etching the layer becoming the intermediate layer using the pattern as a mask to form an intermediate layer, and peeling the pattern with an alkaline solution; and
forming the channel forming member on the intermediate layer,
wherein when a metal constituting the metal layer becoming the diffusion prevention layer is defined as a first metal and a metal constituting the connection terminal is defined as a second metal, in a potential-pH diagram for a first metal-H 2 O system, the first metal is present in a passivation area or an insensitive area at a potential of a difference between a standard electrode potentials of the first metal and the second metal in a pH range of 1 to 14.

2. The method for producing the liquid discharge head according to claim 1 , wherein the first metal is any metal selected from Pd, Nb, Rh, Ta, and Pt.

3. The method for producing the liquid discharge head according to claim 1 , wherein the first metal is any metal selected from Pd, Nb, and Rh.

4. The method for producing the liquid discharge head according to claim 1 , wherein the second metal is Au.

5. The method for producing the liquid discharge head according to claim 1 , wherein the acid solution is fluonitric acid.

6. The method for producing the liquid discharge head according to claim 1 , wherein the intermediate layer is at least of polyetheramide or an epoxy resin.

Assignees

• Canon Kk

Inventors

• Ozaki Teruo

Classifications

• B41J2/1628 Primary

  dry etching · CPC title

• B41J2/14072

  Electrical connections, e.g. details on electrodes, connecting the chip to the outside... · CPC title

• B41J2/1646

  thin film formation by sputtering · CPC title

• B41J2/1639

  sacrificial molding · CPC title

• B41J2/1631

  photolithography · CPC title