Low dielectric loss glasses for electronic devices

Patent metadata

Field	Value
Publication number	US-11117828-B2
Application number	US-202016809102-A
Country	US
Kind code	B2
Filing date	Mar 4, 2020
Priority date	Jan 18, 2019
Publication date	Sep 14, 2021
Grant date	Sep 14, 2021

Abstract

An article including a glass having that includes SiO 2 , Al 2 O 3 , and B 2 O 3 and least one of Li 2 O, Na 2 O, K 2 O, MgO, CaO, SrO, BaO, SnO 2 , ZnO, La 2 O 3 , F, and Fe 2 O 3 , wherein the glass includes a dielectric constant of about 10 or less and/or a loss tangent of about 0.01 or less, both as measured with signals at 10 GHz.

First claim

What is claimed is:

1. An article, comprising:
an electrically-insulating layer supporting copper, wherein the electrically-insulating layer comprises a glass comprising by mole percent of oxides:
SiO 2 from about 60% to about 80%;
Al 2 O 3 from 0% to about 13%;
B 2 O 3 from about 7% to about 20%;
from 0% to about 1% of at least one fining agent;
alkaline earth oxides (RO) totaling from 3% to about 15% (by mole of oxide), wherein the RO are selected from the group consisting of CaO, MgO, BaO, and SrO, wherein a ratio of MgO to total RO is at least 0.3, but wherein the RO are mixed RO species such that the ratio of MgO to total RO is no more than 0.9;

wherein a ratio of B 2 O 3 :(Al 2 O 3 +SiO 2 ) is from about 0.13 to about 0.35,
wherein the glass comprises a dielectric constant of about 10 or less and a loss tangent of about 0.01 or less, both as measured with signals at 10 GHz, and
wherein the glass further comprises a 35,000 Poise Temperature from about 1,110° C. to about 1,325° C.

2. The article of claim 1 , wherein the fining agent comprises one or more of SnO 2 , Sb 2 O 3 , As 2 O 3 , and a halogen salt.

3. The article of claim 1 , wherein the glass further comprises MgO from about 1% to about 13% and CaO from about 0.1% to about 10% (by mole of oxide).

4. The article of claim 1 , wherein the glass comprises 0 mol %<RO≤8.5 mol %, and further comprises a dielectric constant of about 6 or less and/or a loss tangent of about 0.004 or less, both as measured with signals at 10 GHz.

5. The article of claim 1 , wherein a ratio of RO:(Al 2 O 3 +(0.5*B 2 O 3 )) is from 0 to about 0.9.

6. The article of claim 1 , wherein a ratio of RO:(Al 2 O 3 +(0.5*B 2 O 3 )) is from about 0.2 to about 0.9.

7. The article of claim 1 , wherein the glass further comprises:
SiO 2 from about 64% to about 75%;
Al 2 O 3 from about 1% to about 12%; and
B 2 O 3 from about 7% to about 15% (by mole of oxide).

8. The article of claim 1 , wherein the glass comprises a dielectric constant of about 7.5 or less and a loss tangent of about 0.005 or less, as measured with signals at 10 GHz.

9. The article of claim 1 , wherein the glass comprises a dielectric constant of about 5 or less and a loss tangent of about 0.005 or less, as measured with signals at 10 GHz.

10. The article of claim 1 , wherein the glass comprises no more than trace amounts of alkali metal oxides.

11. The article of claim 10 , wherein a ratio of the total RO to Al 2 O 3 is greater than 1.

12. The article of claim 11 , wherein the ratio of MgO to total RO is at least 0.38 and no more than 0.86.

13. The article of claim 12 , wherein the ratio of MgO to total RO is at least 0.5 and no more than 0.7.

14. The article of claim 13 , wherein the MgO>5 mol %, with alkaline earth oxides (RO) totaling up to about 15%.

15. The article of claim 14 , wherein the CaO>3 mol %, with alkaline earth oxides (RO) totaling up to about 15%.

16. The article of claim 1 , wherein the glass comprises an average coefficient of thermal expansion (CTE) of about 25×10 −7 ° C. to about 65×10 −7 /° C., as measured from 0° C. to 300° C.

17. The article of claim 1 , wherein the glass comprises dimensional stability for 30 seconds at 260° C.

18. The article of claim 1 , wherein the insulating layer is between 100 to 700 micrometers thick.

19. The article of claim 18 , wherein the copper is in the form of copper films, and wherein insulating layer is disposed between the copper films.

20. The article of claim 18 , further comprising one or more polymeric substrate layers in combination with the glass.

Assignees

• Corning Inc

Inventors

• Boek Heather Debra
• Cai Ling
• Heine Jennifer Anella
• Lamberson Lisa Ann
• Tandia Adama
• Vargheese Kochuparambil Deenamma
• Weller Mark Owen

Classifications

• C03C4/16

  for dielectric glass · CPC title

• C03C2201/02

  Pure silica glass, e.g. pure fused quartz · CPC title

• C03C3/091 Primary

  containing aluminium · CPC title