Particle measuring method and detection liquid

Patent metadata

Field	Value
Publication number	US-11112344-B2
Application number	US-202016807459-A
Country	US
Kind code	B2
Filing date	Mar 3, 2020
Priority date	Mar 8, 2019
Publication date	Sep 7, 2021
Grant date	Sep 7, 2021

Abstract

According to one embodiment, a particle measuring method is disclosed. The method includes irradiating a detection liquid with light. The detection liquid contains methyl salicylate. The method further includes converting scattered light from the detection liquid into an electric signal by using photoelectric conversion after irradiating the detection liquid with the light. The method further includes performing a particle measurement on the detection liquid by using the electric signal.

First claim

What is claimed is:

1. A particle measuring method comprising:
irradiating a detection liquid whose solvent is a methyl salicylate with light;
converting scattered light from particles in the detection liquid into an electric signal by using photoelectric conversion after irradiating the detection liquid with the light; and
performing a particle measurement on the detection liquid by using the electric signal.

2. The particle measuring method of claim 1 , wherein the particles include fluororesin.

3. The particle measuring method of claim 2 , wherein the fluororesin comprises perfluoroalkoxy alkane (PFA) or polytetrafluoroethylene (PTFE).

4. The particle measuring method of claim 2 , wherein the particle measurement comprises calculating the number of the particles based on the number of pulse waves in the electric signal.

5. The particle measuring method of claim 2 , wherein the particle measurement comprises calculating a particle size of the particles based on amplitude of pulse waves in the electric signal.

6. The particle measuring method of claim 2 , wherein the particle measurement comprises calculating a particle size of the particles based on intensity change of the electric signal resulting from Brownian movement of the particles in the detection liquid.

7. The particle measuring method of claim 2 , wherein the particle measurement comprises calculating a particle size distribution of the particles based on intensity change of the electric signal resulting from Brownian movement of the particles in the detection liquid.

8. The particle measuring method of claim 2 , wherein the particle measurement comprises calculating a particle size of the particles based on amount of movement of the particles resulting from Brownian movement of the respective particles in the detection liquid.

9. The particle measuring method of claim 2 , wherein the particle measurement comprises calculating a particle size distribution of the particles based on amount of movement of the particles resulting from Brownian movement of the respective particles in the detection liquid.

10. The particle measuring method of claim 1 , wherein the scattered light is converted into the electric signal by using a photomultiplier tube.

11. The particle measuring method of claim 1 , wherein the light includes laser light.

12. The particle measuring method of claim 1 , further comprising making the detection liquid flow through a part containing a fluororesin particle.

13. The particle measuring method of claim 12 , wherein the part is used for manufacturing semiconductor devices.

14. The particle measuring method of claim 13 , wherein the part comprises a pipe, a joint, a valve, a pump or a filter.

15. The particle measuring method of claim 12 , wherein the detection liquid is stored in a tank that is subjected to nitrogen gas sealing before the detection liquid flows through the part.

Assignees

• Kioxia Corp
• Rion Co

Inventors

• Tomita Hiroshi
• Hayashi Hidekazu
• Shiobara Eishi
• Kondo Kaoru
• Tabuchi Takuya
• Bando Kazuna
• Kondo Sota

Classifications

• G01N2015/0053

  in liquids, e.g. trouble · CPC title

• G01N15/1429 Primary

  Signal processing · CPC title

• G01N2201/067

  Electro-optic, magneto-optic, acousto-optic elements · CPC title

• G01N15/1459 Primary

  the analysis being performed on a sample stream · CPC title

• G01N2015/0222

  from dynamic light scattering, e.g. photon correlation spectroscopy · CPC title