Fan filter unit, sterilization apparatus and clean room

Patent metadata

Field	Value
Publication number	US-11112143-B2
Application number	US-201816470276-A
Country	US
Kind code	B2
Filing date	Feb 15, 2018
Priority date	Jun 6, 2017
Publication date	Sep 7, 2021
Grant date	Sep 7, 2021

Abstract

Provided are a fan filter unit and a sterilization apparatus capable of shortening a sterilization operation time to be performed at a changeover. The sterilization apparatus has: a working space; a fan filter unit for supplying clean air to the working space; and a sterilizing gas charging unit on the air suction side of the fan filter unit. The fan filter unit comprises: a fan unit section constituted by an air blower and a pressurization chamber; a dust removal filter provided on the downstream side of the fan unit section; a passage bypassing the dust removal filter; and an opening and closing mechanism of the passage. By opening the opening and closing mechanism, the air flow not passing through the dust removal filter can be supplied to the secondary side of the fan filter unit.

First claim

The invention claimed is:

1. A fan filter unit including a fan unit section constituted by an air blower and a pressurization chamber, and a dust removal filter provided on a downstream side of the fan unit section, comprising:
a passage bypassing the dust removal filter;
an opening and closing mechanism of the passage; and
an opening equipped with the opening and closing mechanism to discharge the air flow provided on a side surface of the pressurization chamber;
wherein the passage connects the opening and a secondary side of the fan filter unit, and
wherein by opening the opening and closing mechanism, an air flow not passing through the dust removal filter can be supplied to the secondary side of the fan filter unit.

2. The fan filter unit according to claim 1 , wherein the passage bypassing the dust removal filter is provided at a position passing through a surface to which the dust removal filter is attached.

3. The fan filter unit according to claim 1 , wherein a sterilizing gas charging unit is provided in the pressurization chamber.

4. A sterilization apparatus having a working space, a fan filter unit configured to supply clean air to the working space, and a sterilizing gas charging unit on a suction side of air of the fan filter unit,
wherein the fan filter unit includes:
a fan unit section constituted by an air blower and a pressurization chamber;
a dust removal filter provided on a downstream side of the fan unit section;
a passage bypassing the dust removal filter; and
an opening and closing mechanism of the passage,
wherein by opening the opening and closing mechanism, an air flow not passing through the dust removal filter can be supplied to a secondary side of the fan filter unit;
wherein an opening equipped with the opening and closing mechanism to discharge the air flow is provided on a side surface of the pressurization chamber of the fan filter unit, and
wherein the passage connects the opening and the working space.

5. The sterilization apparatus according to claim 4 , wherein the passage bypassing the dust removal filter is provided at a position passing through a surface to which the dust removal filter of the fan filter unit is attached.

6. The sterilization apparatus according to claim 4 , wherein the sterilization apparatus is a clean booth.

7. The sterilization apparatus according to claim 4 , wherein the sterilization apparatus is a safety cabinet.

8. The sterilization apparatus according to claim 4 , wherein the sterilization apparatus is an isolator.

9. The sterilization apparatus according to claim 4 , wherein the sterilization apparatus is a clean room.

10. A clean room having an air blowing path equipped with an air blower and a sterilization apparatus, and a working chamber to which air is blown via the sterilization apparatus connected to the air blowing path, the clean room comprising:
a freely openable and closable opening and closing unit; and
a second air blowing path connected to a sterilizing gas insertion unit, passing through the opening and closing unit opened from the air blower without passing through the sterilization apparatus and connected to the working chamber;
wherein the sterilization apparatus has a fan filter unit configured to supply clean air to the working chamber, and a sterilizing gas charging unit on a suction side of air of the fan filter unit;
wherein the fan filter unit includes:
a fan unit section including the air blower and a pressurization chamber;
a dust removal filter provided on a downstream side of the fan unit section;
a passage bypassing the dust removal filter; and
an opening and closing mechanism of the passage,
wherein by opening the opening and closing mechanism, an air flow not passing through the dust removal filter can be supplied to a secondary side of the fan filter unit,
wherein an opening equipped with the opening and closing mechanism to discharge the air flow is provided on a side surface of the pressurization chamber of the fan filter unit, and
wherein the passage connects the opening and the working chamber.

Assignees

• Hitachi Industry Equipment Systems Co Ltd

Inventors

• Yokoyama Makoto
• Matsumura Takeshi
• Sato Hirotoshi

Classifications

• F24F13/28 Primary

  Arrangement or mounting of filters · CPC title

• B01L1/04 Primary

  Dust-free rooms or enclosures · CPC title

• F24F13/20

  Casings or covers · CPC title

• F24F7/007

  with forced flow (using ducting systems F24F7/06) · CPC title

• F24F3/167

  Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed (air distribution by perforated walls F24F7/10) · CPC title