Multilayer fluidic devices and methods for their fabrication

Patent metadata

Field	Value
Publication number	US-11110452-B2
Application number	US-201816026847-A
Country	US
Kind code	B2
Filing date	Jul 3, 2018
Priority date	Mar 13, 2013
Publication date	Sep 7, 2021
Grant date	Sep 7, 2021

Abstract

A method of making a flowcell includes bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer, wherein the organic solid support includes a plurality of elongated cutouts. The method further includes bonding a surface of a second inorganic solid support to a second surface of the organic solid support via a second bonding layer, so as to form the flowcell. The formed flowcell includes a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts.

First claim

What is claimed is:

1. A method of making a flowcell, the method comprising:
bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer formed of a radiation-absorbing material, wherein the organic solid support includes a plurality of elongated cutouts; and
bonding a surface of a second inorganic solid support to a second surface of the organic solid support via a second bonding layer formed of the radiation-absorbing material, so as to form the flowcell;
wherein:
the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts;
prior to bonding the first surface of the organic solid support to the surface of the first inorganic solid support, the method further comprises:
coating the surface of the first inorganic solid support with (3-aminopropyl)-triethoxysilane (APTES) to form an amino silane layer; and
reacting amino groups of the amino silane layer with N-Hydroxysuccinimidyl-4-azidosalicylic Acid (HSAB) to form a phenyl azide layer; and

wherein prior to bonding the surface of the second inorganic solid support to the second surface of the organic solid support, the method further comprises:
coating the surface of the second inorganic solid support with (3-aminopropyl)-triethoxysilane (APTES) to form a second amino silane layer; and
reacting amino groups of the second amino silane layer with N-Hydroxysuccinimidyl-4-azidosalicylic Acid (HSAB) to form a second phenyl azide layer.

2. The method of claim 1 , wherein:
bonding the first surface of the organic solid support to the surface of the first inorganic solid support comprises irradiating the first bonding layer with a laser; and
bonding the surface of the second inorganic solid support to the second surface of the organic solid support comprises irradiating the second bonding layer with the laser.

3. The method of claim 2 , wherein:
in irradiating the first bonding layer with the laser, the first bonding layer is irradiated in a predetermined bonding pattern so as to avoid regions of the first bonding layer corresponding to the elongated cutouts of the organic solid support; and
in irradiating the second bonding layer with the laser, the second bonding layer is irradiated in a predetermined bonding pattern so as to avoid regions of the second bonding layer corresponding to the elongated cutouts of the organic solid support.

4. The method of claim 2 , wherein the organic solid support comprises a polyimide that contains carbon black, and wherein each of the polyimide and the carbon black absorbs radiation emitted by the laser used in the bonding.

5. The method of claim 1 , wherein each of the first and second inorganic solid supports is made of silica or a silica-based material.

6. The method of claim 1 , wherein each of the first and second inorganic solid supports comprises a plurality of wells, and each well contains a gel material.

7. A method of making a flowcell, the method comprising:
bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer, wherein the organic solid support includes a plurality of elongated cutouts;
bonding a surface of a second inorganic solid support to a second surface of the organic solid support via a second bonding layer, so as to form the flowcell;
wherein the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts;
and wherein each of the first and second inorganic solid supports comprises a plurality of wells, and each well contains a gel material that comprises a poly(N-(5-azidoacetamidylpentyl)acrylamide-co-acrylamide (PAZAM) polymer.

8. A method of making a flowcell, the method comprising:
bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer;
after bonding the first surface of the organic solid support to the surface of the first inorganic solid support, patterning the organic solid support so as to form a patterned organic solid support including a plurality of elongated cutouts in the organic solid support; and
bonding a surface of a second inorganic solid support to a second surface of the patterned organic solid support via a second bonding layer, so as to form the flowcell;
wherein the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts.

9. The method of claim 8 , wherein:
each of the first and second bonding layers is formed of a radiation-absorbing material;
bonding the first surface of the organic solid support to the surface of the first inorganic solid support comprises irradiating the first bonding layer with a laser; and
bonding the surface of the second inorganic solid support to the second surface of the patterned organic solid support comprises irradiating the second bonding layer with the laser.

10. The method of claim 9 , wherein:
in irradiating the first bonding layer with the laser, the first bonding layer is irradiated in a predetermined bonding pattern so as to avoid regions of the first bonding layer at which the elongated cutouts are to be formed in the organic solid support;
in patterning the organic solid support, the elongated cutouts are formed by cutting a pattern for the elongated cutouts in the organic solid support, and removing portions of the organic solid support at regions corresponding to the regions of the first bonding layer that were avoided when irradiating the first bonding layer with the laser.

11. The method of claim 8 , wherein each of the first and second inorganic solid supports is made of silica or a silica-based material.

12. The method of claim 8 , wherein:
bonding the first surface of the organic solid support to the surface of the first inorganic solid support comprises irradiating the first bonding layer with a laser;
bonding the surface of the second inorganic solid support to the second surface of the organic solid support comprises irradiating the second bonding layer with the laser; and
the organic solid support comprises a polyimide that contains carbon black, and each of the polyimide and the carbon black absorbs radiation emitted by the laser.

13. The method of claim 8 , wherein each of the inorganic solid supports comprises a plurality of wells, and each well contains a gel material.

14. A method of making a flowcell, the method comprising:
bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer;
after bonding the first surface of the organic solid support to the surface of the first inorganic solid support, patterning the organic solid support so as to form a plurality of elongated cutouts in the organic solid support;
bonding a surface of a second inorganic solid support to a second surface of the patterned organic solid support via a second bonding layer, so as to form the flowcell;
wherein the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts;
and wherein each of the inorganic solid supports comprises a plurality of wells, and each well contains a gel material comprising a poly(N-(5-azidoacetamidylpentyl)

Assignees

• Illumina Inc

Inventors

• Fisher Jeffrey S
• Moon John A
• Venkatesan Bala Murali

Classifications

• B29C65/1612

  Infrared [IR] radiation, e.g. by infrared lasers · CPC title

• B29L2031/756

  Microarticles, nanoarticles · CPC title

• B29C66/71

  characterised by the composition of the plastics material of the parts to be joined (welding bar compositions B29C65/125) · CPC title

• B01L2200/0689

  Sealing · CPC title

• B81B2201/058

  Microfluidics not provided for in B81B2201/051 - B81B2201/054 · CPC title