Semiconductor storage device

Patent metadata

Field	Value
Publication number	US-11101282-B2
Application number	US-201916560600-A
Country	US
Kind code	B2
Filing date	Sep 4, 2019
Priority date	Mar 5, 2019
Publication date	Aug 24, 2021
Grant date	Aug 24, 2021

Abstract

According to one embodiment, a semiconductor storage device includes: a substrate; a plurality of first gate electrodes arranged in a first direction intersecting with a substrate surface; a first semiconductor film extending in the first direction and facing the plurality of first gate electrodes; a first gate insulating film provided between the plurality of first gate electrodes and the first semiconductor film; a second gate electrode disposed farther away from the substrate than the plurality of first gate electrodes; a second semiconductor film that extends in the first direction, faces the second gate electrode, and has, in the first direction, one end connected to the first semiconductor film; and a second gate insulating film provided between the second gate electrode and the second semiconductor film. The second gate electrode includes: a first portion; and a second portion provided between the first portion and the second semiconductor film, and facing the second semiconductor film. At least a portion of the second portion is provided closer to a side of the substrate than a surface of the first portion on the side of the substrate side in the first direction.

First claim

What is claimed is:

1. A semiconductor storage device comprising:
a plurality of first gate electrodes spaced apart from one another in a first direction;
a first semiconductor film extending through the plurality of first gate electrodes in the first direction;
a second semiconductor film provided in a second direction of the first semiconductor film and extending through the plurality of first gate electrodes in the first direction, the second direction crossing the first direction;
a first gate insulating film provided between the plurality of first gate electrodes and the first semiconductor film;
a second gate insulating film provided between the plurality of first gate electrodes and the second semiconductor film;
a second gate electrode disposed above an upmost one of the plurality of first gate electrodes;
a third semiconductor film, extending through the second gate electrode in the first direction and includes one end in contact with an upper end of the first semiconductor film;
a fourth semiconductor film, extending through the second gate electrode in the first direction and includes one end in contact with an upper end of the second semiconductor film;
a third gate insulating film provided between the second gate electrode and the third semiconductor film; and
a fourth gate insulating film provided between the second gate electrode and the fourth semiconductor film,
wherein the second gate electrode includes:
a first portion provided between the third semiconductor film and the fourth semiconductor film; and
a second portion, provided between the first portion and the third semiconductor film, and

wherein at least a portion of the second portion is provided closer to the upmost first gate electrode than the first portion along the first direction.

2. The semiconductor storage device according to claim 1 , further comprising:
a third gate electrode disposed farther away from the substrate than the second gate electrode along the first direction,
wherein the third gate electrode includes:
a third portion aligned with the first portion of the second gate electrode along the first direction; and
a fourth portion aligned with the second portion of the second gate electrode along the first direction.

3. The semiconductor storage device according to claim 2 , wherein, when a first distance, which is measured from the first portion of the second gate electrode to the third portion of the third gate electrode along the first direction, is shorter than a second distance, which is measured from the second portion of the second gate electrode to the fourth portion of the third gate electrode along the first direction.

4. The semiconductor storage device according to claim 2 , wherein at least a portion of the fourth portion is provided closer to the substrate than the third portion along the first direction.

5. The semiconductor storage device according to claim 1 , wherein the second gate electrode includes:
a first facing portion facing a first side of the second semiconductor film along a second direction perpendicular to the first direction; and
a second facing portion facing a second side of the second semiconductor film along the second direction,
wherein a central axis of the second semiconductor film along the first direction is shifted from a central axis of the first semiconductor film toward the second side in the second direction, and
wherein the first facing portion is closer to the first semiconductor film than the second facing portion along the second direction.

6. The semiconductor storage device according to claim 1 , wherein
the upper surface of the first semiconductor film has two or more different heights measured along the first direction relative to the surface of the substrate.

7. The semiconductor storage device according to claim 1 , wherein
the upper surface of the first semiconductor film includes a first height and a second height measured along the first direction relative to the surface of the substrate,
and wherein
the first height, which is closer to a central axis of the first semiconductor film along the first direction than the second height, is less than the second height.

Assignees

• Toshiba Memory Corp

Inventors

• Sato Hiroyasu

Classifications

• G11C5/02

  Disposition of storage elements, e.g. in the form of a matrix array · CPC title

• G11C5/063

  Voltage and signal distribution in integrated semi-conductor memory access lines, e.g. word-line, bit-line, cross-over resistance, propagation delay · CPC title

• H01L27/11573 Primary

  Electricity · mapped topic

• H01L27/11519

  Electricity · mapped topic

• H01L27/11553

  Electricity · mapped topic