Graphene nanomechanical radiation detector

Patent metadata

Field	Value
Publication number	US-11099076-B2
Application number	US-201916297384-A
Country	US
Kind code	B2
Filing date	Mar 8, 2019
Priority date	Mar 8, 2018
Publication date	Aug 24, 2021
Grant date	Aug 24, 2021

Abstract

A thermo-mechanical resonating microbolometer has a graphene absorber suspended above a metallic silicon substrate to form a mechanical resonator. Microelectronic circuitry electrically connected to the graphene resonator and the metallic silicon substrate drives electronically the motion of the graphene absorber. Shifts in the mechanical resonant frequency of the graphene layer due to the absorption of incident radiation is measured electronically or using optical interferometry. A bolometer sensor array may be fabricated using such graphene microbolometer elements.

First claim

The invention claimed is:

1. A thermo-mechanical resonating radiation detector comprising:
a silicon substrate;
a graphene resonator having a diameter d;
graphene tethers attached to the graphene resonator, wherein the graphene tethers extend outward from the graphene resonator, have a tapered shape, and have minimum widths w less than the diameter d of the graphene resonator;
silicon dioxide supports between the silicon substrate and the graphene tethers, supporting the tethers to suspend the graphene resonator above a cylindrical well formed within a silicon dioxide layer on the silicon substrate, such that the graphene resonator forms a mechanical resonator;
microelectronic circuitry electrically connecting the graphene resonator and the silicon substrate.

2. The thermo-mechanical resonating radiation detector of claim 1 wherein the graphene resonator has a thickness less than 1 nm.

3. The thermo-mechanical resonating radiation detector of claim 1 wherein the graphene resonator is a monolayer of carbon atoms.

4. The thermo-mechanical resonating radiation detector of claim 1 wherein the graphene resonator has a diameter in the range 1-10 μm.

5. The thermo-mechanical resonating radiation detector of claim 1 wherein the minimum width w is at most 820 nm.

6. The thermo-mechanical resonating radiation detector of claim 1 wherein the graphene resonator and the graphene tethers have a discrete rotational symmetry around a point in a plane of the graphene resonator.

7. The thermo-mechanical resonating radiation detector of claim 1 further comprising a probe laser, optical interferometer, and photodiode for measuring a resonant frequency of the graphene resonator.

8. The thermo-mechanical resonating radiation detector of claim 1 further comprising microelectronic circuitry electrically connected to the graphene resonator and the silicon substrate configured to drive electronically the motion of the graphene resonator using capacitive force, and to measure the motion of the graphene resonator, and thereby determine shifts in the mechanical resonant frequency of the graphene resonator due to incident radiation.

9. An array of radiation detectors, wherein each of the radiation detectors is the thermo-mechanical resonating radiation detector according to claim 1 .

Assignees

• Univ Oregon

Inventors

• Alemán Benjamin J
• Blaikie Andrew D
• Miller David J

Classifications

• G01J2005/202

  Arrays · CPC title

• G01J5/44

  using change of resonant frequency, e.g. of piezoelectric crystals · CPC title

• G01J5/20 Primary

  using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices · CPC title

• G01J5/023

  Particular leg structure or construction or shape; Nanotubes · CPC title

• G01J5/046

  Materials; Selection of thermal materials · CPC title