Large scale microdroplet generation apparatus and methods of manufacturing thereof

Patent metadata

Field	Value
Publication number	US-11097267-B2
Application number	US-201616062724-A
Country	US
Kind code	B2
Filing date	Dec 14, 2016
Priority date	Dec 16, 2015
Publication date	Aug 24, 2021
Grant date	Aug 24, 2021

Abstract

A microfluidic device includes at least one substrate formed of one or more silicon wafers. The substrate includes an inlet for receiving a continuous phase fluid; an inlet for receiving a dispersed phase fluid; and a plurality of channels. The plurality of channels are in fluid communication with both the inlet of the continuous phase fluid and the inlet of the dispersed phase fluid. The substrate further includes a plurality of droplet generators configured to produce microdroplets. Each of the droplet generators are in fluid communication with the plurality of channels. Additionally, the substrate includes one or more outlets for delivery of the microdroplets. The number of the plurality of droplet generators is more than two greater than a number of the one or more outlets for delivery of the microdroplets.

First claim

What is claimed:

1. A microfluidic device comprising:
at least one substrate formed of one or more silicon wafers, the substrate including
a first inlet for receiving a continuous phase fluid;
a second inlet for receiving a dispersed phase fluid;
a plurality of channels, the plurality of channels in fluid communication with the first and second inlets;
a plurality of droplet generators configured to produce microdroplets, each of the droplet generators in fluid communication with the plurality of channels; and
one or more outlets for delivery of the microdroplets,

wherein a number of the plurality of droplet generators is more than two greater than a number of the one or more outlets for delivery of the microdroplets.

2. The microfluidic device of claim 1 , wherein the substrate is heat resistant, pressure resistant, and non-porous.

3. The microfluidic device of claim 1 , wherein the substrate includes one or more glass wafers in contact with the one or more silicon wafers.

4. The microfluidic device of claim 1 , wherein the microfluidic device is operable at a temperature of 100° C. or more.

5. The microfluidic device of claim 4 , wherein the microfluidic device is operable at a temperature of 500° C. or more.

6. The microfluidic device of claim 1 , wherein the microfluidic device is operable at a pressure of 8000 psi or more.

7. The microfluidic device of claim 1 , wherein the microfluidic device includes 10,000 droplet generators or more.

8. The microfluidic device of claim 1 , further comprising at least one outer support in contact with the at least one substrate, the at least one outer support including an aperture in fluid communication with one of the first or second inlets.

9. The microfluidic device of claim 8 , wherein the at least one outer support is glass.

10. The microfluidic device of claim 1 , further comprising:
a first outer support comprised of glass, the first outer support connected to a top surface, the first outer support including a first aperture that is in fluid communication with the first inlet for receiving the continuous phase fluid; and
a second outer support comprised of glass, the second outer support connected to a bottom surface, the second outer support including a second aperture that is in fluid communication with the second inlet for receiving the dispersed phase fluid.

11. A method for manufacturing a microfluidic device from at least one silicon wafer, the method comprising the steps of:
forming a first mask layer on a first side of the at least one silicon wafer and forming a second mask layer on a second side of the at least one silicon wafer; and
etching the first side and the second side of the at least one silicon wafer to create:
a first inlet for receiving a continuous phase fluid,
a second inlet for receiving a dispersed phase fluid,
a plurality of channels, the plurality of channels in fluid communication with the first and second inlets,
a plurality of droplet generators configured to produce microdroplets, each of the droplet generators in fluid communication with the plurality of channels, and
one or more outlets for delivery of the microdroplets,
wherein a number of the plurality of droplet generators is more than two greater than a number of the one or more outlets for delivery of the microdroplets; and
connecting the at least one silicon wafer to both a first outer support and a second outer support.

12. The method of claim 11 , wherein the forming step comprises:
spin coating a masking material on the first side of the at least one silicon wafer and baking the at least one silicon wafer to form the first mask layer.

13. The method of claim 11 , wherein the etching step is performed by wet etching.

14. The method of claim 11 , wherein the etching step is performed by plasma etching.

15. The method of claim 14 , wherein the plasma etching is deep reactive ion etching.

16. The method of claim 11 , wherein the etching is anisotropic.

17. The method of claim 11 , further comprising:
forming a third mask layer on one of the at least the first or second side of the at least one silicon wafer.

18. The method of claim 11 , wherein the first side of the at least one silicon wafer is connected to the first outer support and the second side of the at least silicon wafer is connected to the second outer support.

19. The method of claim 11 , wherein both of the first support and the second support are heat resistant, pressure resistant, and non-porous.

20. The method of claim 19 , wherein the first support and the second support are glass.

21. The method of claim 11 wherein the forming step comprises:
forming the first mask layer on a first surface of a first silicon wafers; and
forming the second mask layer on a second surface of a second silicon wafer.

22. The method of claim 21 , further comprising the step of:
connecting the first silicon wafer to the second silicon wafer.

23. The microfluidic device of claim 1 , wherein the plurality of channels comprises:
one or more dispersed phase supply channels coupled to a first inlet and a plurality of dispersed phase delivery channels, the plurality of dispersed phase delivery channels coupled to the droplet generators, such that the first phase inlet is in fluid communication with the plurality of droplet generators; and
one or more continuous phase supply channels coupled to a second inlet and a plurality of continuous phase delivery channels, the plurality of continuous phase delivery channels coupled to the droplet generators, such that the continuous phase inlet is in fluid communication with the plurality of droplet generators.

24. The microfluidic device of claim 23 , wherein the dispersed phase delivery channels include a resistance increasing section and a velocity reduction section.

25. The microfluidic device of claim 24 , wherein the resistance increasing section of the dispersed phase delivery channels includes two or more elbow turns.

26. The microfluidic device of claim 24 , wherein the velocity reduction section of the dispersed phase delivery channels has a cross-sectional area that is greater than a cross-sectional area of the resistance increasing section of the dispersed phase delivery channels.

27. The microfluidic device of claim 26 , wherein the cross-sectional area of the velocity reduction section is at least 400% greater than the cross-sectional area of the resistance increasing section.

28. The microfluidic device of claim 23 , wherein the continuous phase delivery channels include a resistance increasing section and a velocity reduction section.

29. The microfluidic device of claim 28 , wherein the resistance increasing section of the continuous phase delivery channels includes at least one elbow turn.

30. The microfluidic device of claim 28 , wherein the velocity reduction section of the continuous phase delivery channels has a cross-sectional area that is greater than a cross-sectional area of the resistance increasing section of the continuous phase delivery channels.

31. The microfluidic device of claim 30 , wherein the cross-sectional area of the velocity reduction section is at least 200% greater than the cross-sectional area of the resistance increasing section.

Assignees

• Univ Pennsylvania

Inventors

• Yadavali Sagar
• Issadore David
• Lee Daeyeon

Classifications

• B01F33/3011

  using a sheathing stream of a fluid surrounding a central stream of a different fluid, e.g. for reducing the cross-section of the central stream or to produce droplets from the central stream · CPC title

• B01F25/314

  wherein additional components are introduced at the circumference of the conduit · CPC title

• B01F23/41

  Emulsifying · CPC title

• B01F33/813

  mixing simultaneously in two or more mixing receptacles · CPC title

• B05B1/08

  of pulsating nature, e.g. delivering liquid in successive separate quantities · CPC title