Laser sensor module for particle detection with offset beam

Patent metadata

Field	Value
Publication number	US-11092536-B2
Application number	US-201916569750-A
Country	US
Kind code	B2
Filing date	Sep 13, 2019
Priority date	Mar 15, 2017
Publication date	Aug 17, 2021
Grant date	Aug 17, 2021

Abstract

A laser sensor module for detecting a particle density of particles, which includes: a laser; a detector; and a mirror. The laser is arranged to emit a laser beam to the mirror. A movement of the mirror is arranged to redirect the laser beam. The laser beam is displaced with respect to a rotation axis of the mirror such that a focus region of the laser beam is moving with a velocity having components normal and parallel to the optical axis of the redirected laser beam such that an angle between the parallel and the normal velocity component is at least a threshold angle of 2°. The detector is arranged to determine a self mixing interference signal of an optical wave within a laser cavity of the laser, the self mixing interference signal being generated by laser light of the laser beam reflected by at least one of the particles.

First claim

The invention claimed is:

1. A laser sensor module for detecting a particle density of particles with a size of less than 20 μm, wherein the laser sensor module comprises:
a laser;
a detector; and
a mirror rotatable about a rotation axis,
wherein the laser beam is focused to a focus region,
wherein the laser is arranged to emit a laser beam to the mirror,
wherein a movement of the mirror is arranged to dynamically redirect the laser beam,
wherein a direction of the redirected laser beam defines an optical axis,
wherein the laser beam is displaced with respect to the rotation axis of the mirror such that the focus region of the laser beam is moving with a velocity comprising components normal and parallel to the optical axis of the redirected laser beam such that an angle α between the focus velocity with its normal velocity component is at least a threshold angle of 2°, and
wherein the detector is arranged to determine a self mixing interference signal of an optical wave within a laser cavity of the laser, the self mixing interference signal being generated by laser light of the laser beam reflected by at least one of the particles.

2. The laser sensor module according to claim 1 , wherein the rotation axis is arranged off-center with respect to the mirror.

3. The laser sensor module according to claim 1 , wherein the rotation axis is arranged across a center of the mirror.

4. The laser sensor according to claim 1 , wherein the laser is arranged to emit the laser beam off-set to the rotation axis such that the angle α of the redirected laser beam is at least the threshold angle of 2°.

5. The laser sensor module according to claim 1 , wherein the laser sensor module comprises at least one optical unit, wherein the at least one optical unit is arranged to focus the laser beam to the particles.

6. The laser sensor module according to claim 1 , wherein the laser sensor module is arranged such that the angle α can be changed.

7. The laser sensor module according to claim 6 , wherein a relative position between the laser and the rotation axis can be changed.

8. The laser sensor module according to claim 6 , wherein at least one optical device arranged between the laser and the mirror is arranged to change the threshold angle.

9. The particle detector comprising a laser sensor module according to claim 1 , wherein the particle detector comprises an evaluator, wherein the evaluator is arranged to extract a shifted self mixing interference signal from a measurement signal provided by the detector.

10. The particle detector according to claim 9 , wherein the evaluator is arranged to filter frequency components of the measurement signal below a threshold frequency, wherein the threshold frequency is smaller than the frequency shift of the self mixing interference signal.

11. A mobile communication device comprising the laser sensor module according to claim 1 .

12. A method of measuring a particle density of particles with a size of less than 20 μm, the method comprising:
emitting a laser beam to a mirror rotatable about a rotation axis, wherein the laser beam is focused to a focus region,
dynamically redirecting the laser beam by a movement of the mirror, wherein a direction of the redirected laser beam defines an optical axis moving in accordance with the movement of the mirror, wherein the laser beam is displaced with respect to the rotation axis of the mirror such that the focus region of the laser beam is moving with a velocity comprising components normal and parallel to the optical axis of the redirected laser beam such that an angle α between the focus velocity with its normal velocity component is at least a threshold angle of 2°,
determining a self mixing interference signal of an optical wave within a laser cavity of the laser, the self mixing interference signal being generated by laser light of the laser beam reflected by at least one of the particles,
analyzing the self mixing interference signal based on the shift of the self mixing interference signal to higher frequencies.

13. The method according to claim 12 , wherein the step of analyzing the self mixing interference signal comprises:
filtering frequency components of the measurement signal below a threshold frequency, wherein the threshold frequency is smaller than the frequency shift of the self mixing interference signal.

14. A computer readable medium comprising a computer program product comprising instructions, which when executed by a computer processor cause the processor to perform the following operations:
emit a laser beam to a mirror rotatable about a rotation axis, wherein the laser beam is focused to a focus region,
dynamically redirect the laser beam by a movement of the mirror, wherein a direction of the redirected laser beam defines an optical axis moving in accordance with the movement of the mirror, wherein the laser beam is displaced with respect to the rotation axis of the mirror such that the focus region of the laser beam is moving with a velocity comprising components normal and parallel to the optical axis of the redirected laser beam such that an angle α between the focus velocity with its normal velocity component is at least a threshold angle of 2°,
determine a self mixing interference signal of an optical wave within a laser cavity of the laser, the self mixing interference signal being generated by laser light of the laser beam reflected by at least one of the particles,
analyze the self mixing interference signal based on the shift of the self mixing interference signal to higher frequencies.

Assignees

• Philips Photonics Gmbh
• Trumpf Photonic Components Gmbh

Inventors

• Van Der Lee Alexander Marc
• Spruit Johannes Hendrikus Maria
• Jutte Petrus Theodorus

Classifications

• G01S7/4916

  using self-mixing in the laser cavity · CPC title

• G01S7/4817

  relating to scanning · CPC title

• H01S5/0028

  Laser diodes used as detectors · CPC title

• G01N2015/1454

  using phase shift or interference, e.g. for improving contrast · CPC title

• G01B9/02092

  Self-mixing interferometers, i.e. feedback of light from object into laser cavity · CPC title