Measuring apparatus and measuring method

Patent metadata

Field	Value
Publication number	US-11092422-B2
Application number	US-201916437765-A
Country	US
Kind code	B2
Filing date	Jun 11, 2019
Priority date	Jun 22, 2018
Publication date	Aug 17, 2021
Grant date	Aug 17, 2021

Abstract

A measuring apparatus and a measuring method capable of measuring a surface of an object includes a movable body having a mounting portion on which the object is mounted, and first and second surfaces not coplanar with each other, a first scale portion provided to press the first surface and to measure a first scale position along a first scale axis parallel to a normal direction of the first surface, a second scale portion provided to press the second surface and to measure a second scale position along a second scale axis parallel to a normal direction of the second surface, a first probe having a reference point of position measurement set on a probe axis parallel to the second direction and at an intersection of the first scale axis and the second scale axis, and a second probe measuring a position along the probe axis.

First claim

What is claimed is:

1. A measuring apparatus for measuring a position of a surface of an object in a first direction and a second direction orthogonal to the first direction, the measuring apparatus comprising:
a movable body having a mounting portion for mounting the object, a first surface, and a second surface which are not coplanar with each other;
a first scale portion for measuring a first scale position, which is a position along a first scale axis parallel to a normal direction of the first surface and provided to press the first surface;
a second scale portion for measuring a second scale position, which is a position along a second scale axis parallel to a normal direction of the second surface and provided to press the second surface;
a first probe in which a reference point of position measurement is set, on a probe axis parallel to the second direction and at an intersection of the first scale axis and the second scale axis; and
a second probe for measuring the position along the probe axis,
wherein the movable body is moved in the first direction and the second direction driven by the first scale portion and the second scale portion, the coordinate values in the first direction and the second direction of a first measurement point are obtained based on the first scale position and the second scale position when the reference point is aligned with the first measurement point on the surface on one side of the object, and the position of a second measurement point on the surface on the other side of the object along the probe axis is measured by the second probe, and the coordinate values in the first direction and the second direction of the second measurement point are obtained based on the result of the measurement.

2. The measuring apparatus according to claim 1 , wherein the mounting portion of the movable body is provided with a through hole, and
wherein the second probe is provided to measure the position of the surface on the other side of the object through the through hole.

3. The measuring apparatus according to claim 1 , wherein the direction orthogonal to the first direction and the second direction is defined to be a third direction,
wherein the movable body has a third surface that is non-parallel to the first surface and the second surface,
the measuring apparatus further comprises a third scale portion for measuring a third scale position, which is a position along a third scale axis parallel to a normal direction of the third surface and is provided to press the third surface,
wherein the reference point of the first probe is set to the intersection of the first scale axis, the second scale axis, and the third scale axis,
wherein the movable body is moved in the first direction, the second direction, and the third direction driven by the first scale portion, the second scale portion, and the third scale portion, and the coordinate values in the first direction, the second direction, and the third direction of the first measurement point are obtained based on the first scale position, the second scale position, and the third scale position when the reference point is aligned with the first measurement point, and the coordinate values in the first direction, the second direction, and the third direction of the second measurement point are obtained based on the result of measurement by the second probe.

4. The measuring apparatus according to claim 1 , wherein the second probe is movably provided along the probe axis.

5. The measuring apparatus according to claim 1 , further comprises:
a fixing frame for fixing the first probe; and
a movable frame movably provided along the probe axis with respect to the fixed frame,
wherein the second probe is mounted on the movable frame and is movably provided on the probe axis together with the movable frame.

6. A measuring method for measuring a position of a surface of an object in a first direction and a second direction orthogonal to the first direction,
the measuring method uses measuring apparatus comprising:
a movable body having a mounting portion for mounting the object, a first surface, and a second surface which are not coplanar with each other;
a first scale portion for measuring a first scale position, which is a position along a first scale axis parallel to a normal direction of the first surface and provided to press the first surface;
a second scale portion for measuring a second scale position, which is a position along a second scale axis parallel to a normal direction of the second surface and provided to press the second surface;
a first probe in which a reference point of position measurement is set on a probe axis parallel to the second direction and at an intersection of the first scale axis and the second scale axis; and
a second probe for measuring the position along the probe axis,
wherein the measuring method comprising:
a step of mounting the object on the mounting portion,
a step of moving the movable body in the first direction and the second direction driven by the first scale portion and the second scale portion, and aligning the reference point with a first measurement point on a surface on one side of the object; and
a step of obtaining the coordinate values in the first direction and the second direction of the first measurement point based on the first scale position and the second scale position when the reference point is aligned with the first measurement point, measuring the position of a second measurement point on the surface on the other side of the object along the probe axis with the second probe, and obtaining the coordinate values in the first direction and the second direction of the second measurement point based on the result of the measurement by the second probe.

7. A measuring method for measuring a position of a surface of an object in a first direction, a second direction orthogonal to the first direction, and a third direction orthogonal to the first direction and the second direction,
the measuring method uses measuring apparatus comprising:
a movable body having a mounting portion for mounting the object, and a first surface, a second surface, and a third surface that are not coplanar with each other;
a first scale portion for measuring a first scale position, which is a position along a first scale axis parallel to a normal direction of the first surface and provided to press the first surface;
a second scale portion for measuring a second scale position, which is a position along a second scale axis parallel to a normal direction of the second surface and provided to press the second surface;
a third scale portion for measuring a third scale position, which is a position along a third scale axis parallel to a normal direction of the third surface and provided to press the third surface;
a first probe in which a reference point of position measurement is set on a probe axis parallel to the second direction and at an intersection of the first scale axis, the second scale axis, and the third scale axis; and
a second probe for measuring the position along the probe axis,
wherein the measuring method comprising:
a step of mounting the object on the mounting portion;
a step of moving the movable body in the first direction, the second direction, and the third direction driven by the first scale portion, the second scale portion, and the third scale portion, and aligning the reference point with a first measurement point on a surface on one side of the object;
a step of obtaining coordinate values in the first direction, the second direction, and the third direction of the first measurement point based on the first scale position, the second scale position, and the third scale position when the reference point is aligned with

Assignees

• Mitutoyo Corp

Inventors

• Kawabata Takeshi
• Hidaka Kazuhiko

Classifications

• G01B21/20

  for measuring contours or curvatures, e.g. determining profile · CPC title

• G01B5/20 Primary

  for measuring contours or curvatures · CPC title

• G01B5/0004

  Supports (G01B5/025 takes precedence) · CPC title

• G01B5/207

  using a plurality of fixed, simultaneously operating transducers (G01B5/213 - G01B5/22 take precedence) · CPC title

• G01B5/008 Primary

  using coordinate measuring machines · CPC title