Low temperature method for hermetically joining non-diffusing ceramic materials in multi-layer plate devices

Patent metadata

Field	Value
Publication number	US-11091397-B2
Application number	US-201916406543-A
Country	US
Kind code	B2
Filing date	May 8, 2019
Priority date	Nov 30, 2011
Publication date	Aug 17, 2021
Grant date	Aug 17, 2021

Abstract

A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be on a non-diffusable type, such as aluminum nitride, alumina, beryllium oxide, and zirconia, and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

First claim

What is claimed is:

1. A method for the manufacture of a ceramic multi-layer plate device used as a plate in an electrostatic chuck, or in a heater, or other wafer support, used in semiconductor wafer processing, said method comprising the steps of:
depositing aluminum onto one or both of a joining interface surface of an upper plate layer and a joining interface surface of a lower plate layer, wherein said joining interface surfaces of said upper plate layer and said lower plate layer are annular rings around an outer area of said upper plate layer and said lower plate area;
arranging said upper plate layer and said lower plate layer into a stack to form a joining pre-assembly, wherein said aluminum is disposed between said upper plate layer and said lower plate layer, thereby defining an inner space between said upper plate layer and said lower plate layer within the interior of the deposited aluminum, wherein said upper plate layer comprises a ceramic from the group of aluminum nitride, alumina, beryllium oxide, and zirconia, and said lower plate layer comprises a ceramic from the group of aluminum nitride, alumina, beryllium oxide, and zirconia, and wherein said aluminum comprises 99% by weight or greater aluminum;
placing the components of said joining pre-assembly into a process chamber;
removing oxygen from said process chamber;
heating at least said aluminum brazing element of said joining pre-assembly to a first joining temperature of between 770 C and 1200 C, thereby joining said upper plate layer to said lower plate layer with a hermetically sealed aluminum joint which hermetically seals said inner space from an area outside of said brazing layer across said joint, and wherein said aluminum has not diffused into said upper plate layer or said lower plate layer, and wherein the thickness of said final joint is greater than zero.

2. The method of claim 1 wherein the step of removing oxygen from said process chamber comprises applying a pressure of lower than 1×10E-4 Torr to said process chamber.

3. The method of claim 1 wherein the step of removing oxygen from said process chamber comprises applying a pressure of lower than 1×10E-5 Torr to said process chamber.

4. The method of claim 1 wherein the step of removing oxygen from said process chamber comprises purging and re-filling the chamber with pure, dehydrated inert gas.

5. The method of claim 1 wherein the step of removing oxygen from said process chamber comprises purging and re-filling the chamber with purified hydrogen.

6. The method of claim 1 wherein said step of heating said joining pre-assembly to a first joining temperature comprises heating said joining pre-assembly for a duration of between 10 minutes and 2 hours.

7. The method of claim 1 wherein said step of heating said joining pre-assembly to a first joining temperature comprises heating said joining pre-assembly for a duration of between 30 minutes and 1 hour.

8. A method for the manufacture of a ceramic multi-layer plate device used as a plate in an electrostatic chuck, or in a heater, or other wafer support, used in semiconductor wafer processing, said method comprising the steps of:
depositing aluminum onto one or both of a joining interface surface of an upper plate layer and a joining interface surface of a lower plate layer, wherein said joining interface surfaces of said upper plate layer and said lower plate layer are annular discs around an outer area of said upper plate layer and said lower plate area;
arranging said upper plate layer and said lower plate layer into a stack to form a joining pre-assembly, wherein said aluminum is disposed between said upper plate layer and said lower plate layer, thereby defining an inner space between said upper plate layer and said lower plate layer within the interior of the deposited aluminum, wherein said upper plate layer comprises a ceramic from the group of aluminum nitride, alumina, beryllium oxide, and zirconia, and said lower plate layer comprises a ceramic from the group of aluminum nitride, alumina, beryllium oxide, and zirconia, and wherein said aluminum comprises 99% by weight or greater aluminum;
placing the components of said joining pre-assembly into a process chamber;
removing oxygen from said process chamber;
heating at least said aluminum brazing element of said joining pre-assembly to a joining temperature, thereby joining said upper plate layer to said lower plate layer with a hermetically sealed aluminum joint which hermetically seals said inner space from an area outside of said brazing layer across said joint, and wherein said aluminum has not diffused into said upper plate layer or said lower plate layer, and wherein the thickness of said final joint is greater than zero.

9. The method of claim 8 wherein the heating at least said aluminum brazing element of said joining pre-assembly comprises heating at least said aluminum brazing element of said joining pre-assembly to a joining temperature of between 770 C and 1300 C.

10. The method of claim 8 wherein the heating at least said aluminum brazing element of said joining pre-assembly comprises heating at least said aluminum brazing element of said joining pre-assembly to a joining temperature of between 1000 C and 1150 C.

11. The method of claim 8 wherein the step of removing oxygen from said process chamber comprises applying a pressure of lower than 1×10E-4 Torr to said process chamber.

12. The method of claim 8 wherein the step of removing oxygen from said process chamber comprises purging and re-filling the chamber with pure, dehydrated inert gas.

13. The method of claim 8 wherein the step of removing oxygen from said process chamber comprises purging and re-filling the chamber with purified hydrogen.

14. The method of claim 8 wherein said step of heating said joining pre-assembly to a joining temperature comprises heating said joining pre-assembly for a duration of between 10 minutes and 2 hours.

15. A method for the manufacture of a ceramic multi-layer plate device used as a plate in an electrostatic chuck, or in a heater, or other wafer support, used in semiconductor wafer processing, said method comprising the steps of:
depositing aluminum onto one or both of a joining interface surface of an upper plate layer and a joining interface surface of a lower plate layer, wherein said joining interface surfaces of said upper plate layer and said lower plate layer are annular rings comprising mesas around an outer area of said upper plate layer and said lower plate area;
arranging said upper plate layer and said lower plate layer into a stack to form a joining pre-assembly, wherein said aluminum is disposed between said upper plate layer and said lower plate layer, thereby defining an inner space between said upper plate layer and said lower plate layer within the interior of the deposited aluminum, wherein said upper plate layer comprises a ceramic from the group of aluminum nitride, alumina, beryllium oxide, and zirconia, and said lower plate layer comprises a ceramic from the group of aluminum nitride, alumina, beryllium oxide, and zirconia, and wherein said aluminum comprises 99% by weight or greater aluminum;
placing the components of said joining pre-assembly into a process chamber;
removing oxygen from said process chamber;
heating at least said aluminum brazing element of said joining pre-assembly to a joining temperature, thereby joining said upper plate layer to said lower plate layer with a hermetically sealed aluminum joint which hermetically seals said inner space from an area outside of said brazing layer across said joint, and wherein said aluminum

Assignees

• Watlow Electric Mfg

Inventors

• Elliot Alfred Grant
• Elliot Brent Donald Alfred
• Balma Frank
• Schuster Richard Erich
• Rex Dennis George
• Veytser Alexander

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/722

  Details of electrostatic chucks · CPC title

• H10P72/0432

  mainly by conduction · CPC title