Low warp fan-out processing method and production of substrates therefor
US-11875993-B2 · Jan 16, 2024 · US
US11091383B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11091383-B2 |
| Application number | US-201815882187-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 29, 2018 |
| Priority date | Jan 27, 2017 |
| Publication date | Aug 17, 2021 |
| Grant date | Aug 17, 2021 |
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A plate-like glass element including a pair of opposite side faces and at least one channel introduced into the glass of the glass element. The at least one channel joins the side faces and opens into the side faces. The at least one channel has a rounded wall and a transverse dimension of less than 100 μm. The at least one channel extends in a longitudinal direction that runs transverse to the side faces. The rounded wall of the at least one channel has a plurality of rounded, substantially hemispherical depressions.
Opening claim text (preview).
What is claimed is: 1. A plate-like glass element, comprising: a pair of opposite side faces; and at least one channel introduced into a glass of said glass element, said at least one channel joining said side faces and opening into said side faces, said at least one channel having a rounded wall and a transverse dimension of less than 100 μm, and said at least one channel extends in a longitudinal direction which runs transverse to said side faces, wherein the rounded wall of said at least one channel has a plurality of rounded, substantially hemispherical depressions that adjoin one another, said plurality of rounded, substantially hemispherical depressions having abutting concave roundings which form ridges, said ridges forming polygonal delimiting lines as viewed in a plan-view of said plurality of rounded, substantially hemispherical depressions. 2. The plate-like glass element according to claim 1 , wherein said glass element has a thickness in the range from 30 microns to 3 millimetres. 3. The plate-like glass element according to claim 1 , wherein an angle of taper of the at least one channel deviates from a right angle by less than 5°. 4. The plate-like glass element according to claim 1 , wherein said at least one channel is open at one of said side faces and forms part of an edge of the glass element. 5. The plate-like glass element according to claim 4 , wherein said at least one channel is in the form of a plurality of channels, and said edge includes said plurality of channels which run parallel to one another and are open at said side faces. 6. The plate-like glass element according to claim 5 , wherein a plurality of flat edge sections extend between said plurality of channels. 7. The plate-like glass element according to claim 5 , wherein said plurality of channels adjoin one another so that a plurality of ridges, which run parallel to the longitudinal direction of said plurality of channels, are formed between said plurality of channels. 8. The plate-like glass element according to claim 5 , wherein at least one of: the spacing of said plurality of channels, measured from a middle of one channel to another middle of another channel, is in the range from 3 to 70 microns, and a diameter of each said channel is in the range from 3 microns to 50 microns. 9. The plate-like glass element according to claim 5 , wherein a surface area of said edge including said plurality of channels is greater, by a factor from 1.1 to 1.4, than a smooth edge surface without said plurality of channels. 10. The plate-like glass element according to claim 1 , wherein said at least one channel has an opening, and a deviation from roundness of the opening of said at least one channel in one of said side faces of the glass element is less than 1.15. 11. The plate-like glass element according to claim 1 , wherein said glass element has a thickness in the range from 30 microns to 3 millimetres and has said two opposite side faces such that a contour of the glass element comprises an elongated web whose length is at least five times greater than its width, with the length and width each being measured in a direction along one of said side faces and a plurality of edges running next to one another of the web each having a plurality of adjoining, rounded, substantially hemispherical depressions. 12. The plate-like glass element according to claim 11 , wherein the glass element has a frame, with the web being joined at both ends to the frame. 13. The plate-like glass element according to claim 11 , wherein an edge surface of an edge of said plurality of edges runs at right angles to said side faces with a deviation of not more than 5° from a right angle. 14. The plate-like glass element according to claim 1 , wherein the glass element has at least one edge, and said at least one edge has a plurality of substantially hemispherical depressions and has: an average fracture strength of at least 200 MPa, or a Weibull modulus of the Weibull distribution of the tensile stress values for a fracture test for fractures extending from said at least one edge of at least 5.5. 15. The plate-like glass element according to claim 1 , wherein the glass of the glass element is a silicate glass having a content of alkali metal oxides of less than 17 percent by weight such that the silicate glass has a basicity in the range from 0.45 to 0.55. 16. The plate-like glass element according to claim 1 , wherein said plate-like glass element has an opening having an edge having substantially hemispherical depressions, and the opening has a transverse dimension of at least 200 μm. 17. A plate-like glass element having a thickness in a range from 30 micrometres to 3 millimetres, comprising: a pair of opposite side faces, said two side faces facing each other; at least one channel introduced into a glass of said glass element, said at least one channel joining said side faces and opening into said side faces, said at least one channel having a rounded wall and a transverse dimension of less than 100 μm, said at least one channel extends in a longitudinal direction which runs transverse to said side faces, and said rounded wall of said at least one channel has a plurality of rounded, substantially hemispherical depressions that adjoin one another, said plurality of rounded, substantially hemispherical depressions having abutting concave roundings which form ridges, said ridges forming polygonal delimiting lines as viewed in a plan-view of said plurality of rounded, substantially hemispherical depressions; and at least two openings inserted in said glass element such that a region of said glass element between said openings forms a structure with at least one web whose minimal width is less than 1 mm, wherein a parameter G is defined for the structure, and G is defined by: G = l 1 2 l 2 · b · h 2 · N wherein the parameter G has a value of at least 10 mm -1/3 and of at most 400 mm -1/3 , wherein l 1 is a longest edge length between a pair of contact regions being adjacent along an edge of one of said openings, and 1 2 is a length of a shortest possible straight-line connection between said two contact regions, and wherein each said contact region of said at least one web is each defined as a circular region of the glass element, having a diameter of 1 mm, and said circular region is arranged at said at least one web such that each border of said circular region touches a corresponding border of both of said openings on at least one point, an intermediate range of said openings forming said at least one web, and wherein b denotes a minimal web width, h denotes a thickness of the glass element, and N is a number of said contact regions.
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