Fluid synthesis monitoring system

Patent metadata

Field	Value
Publication number	US-11090587-B2
Application number	US-201816480592-A
Country	US
Kind code	B2
Filing date	Feb 8, 2018
Priority date	Feb 10, 2017
Publication date	Aug 17, 2021
Grant date	Aug 17, 2021

Abstract

A system ( 10 ) for moving a fluid ( 12 ) includes a flow-circuit element ( 30 ) and a control system ( 32 ) that monitors an operational condition of the flow-circuit element ( 30 ). The control system ( 32 ) includes a first sensor ( 82 ) that monitors a first sensed condition, and a second sensor ( 84 ) that monitors a second sensed condition that is different from the first sensed condition. Further, the control system ( 32 ) includes a processor ( 76 ) that analyzes the first sensed condition and the second sensed condition to monitor the operational condition of the flow-circuit element ( 30 ).

First claim

What is claimed is:

1. A system for moving a fluid, the system comprising:
a flow-circuit element, wherein at least a portion of the fluid flows through the flow-circuit element; and
a control system that monitors an operational condition of the flow-circuit element, the control system including a first sensor that monitors a first sensed condition, and a second sensor that monitors a second sensed condition that is different from the first sensed condition, wherein the control system includes a processor that analyzes the first sensed condition and the second sensed condition to monitor the operational condition of the flow-circuit element;
wherein the first sensed condition is a differential pressure across the flow-circuit element and the second sensed condition is a flow rate of the fluid through the flow-circuit element;
wherein the control system monitors a flow resistance index for the flow-circuit element to monitor the operational condition of the flow-circuit element; and
wherein the flow resistance index is based on the relationship between the differential pressure across the flow-circuit element and the flow rate of the fluid through the flow-circuit element.

2. The system of claim 1 wherein the flow-circuit element is a filter assembly that includes a filter that filters the fluid, and wherein the control system monitors an operational condition of the filter.

3. The system of claim 2 wherein the flow resistance index is based on the differential pressure across the flow-circuit element divided by the flow rate of the fluid through the flow-circuit element raised to the power of an index parameter.

4. The system of claim 1 wherein the flow-circuit element is an adjustable valve, and wherein the control system monitors an operational condition of the adjustable valve.

5. The system of claim 1 wherein the flow resistance index is based on the differential pressure across the flow-circuit element divided by the flow rate of the fluid through the flow-circuit element raised to the power of an index parameter.

6. A method for monitoring an operational condition of a flow-circuit element that transmits a fluid, the method comprising:
monitoring the operational condition of the flow-circuit element with a control system that includes a first sensor that monitors a first sensed condition, and a second sensor that monitors a second sensed condition that is different from the first sensed condition, wherein the control system includes a processor that analyzes the first sensed condition and the second sensed condition to monitor the operational condition of the flow-circuit element;
wherein the first sensed condition is a differential pressure across the flow-circuit element and the second sensed condition is a flow rate of the fluid through the flow-circuit element;
wherein the control system monitors a flow resistance index for the flow-circuit element to monitor the operational condition of the flow-circuit element; and
wherein the flow resistance index is based on the relationship between the differential pressure across the flow-circuit element and the flow rate of the fluid through the flow-circuit element.

7. The method of claim 6 wherein the flow-circuit element is a filter assembly that includes a filter that filters the fluid, and wherein monitoring includes monitoring an operational condition of the filter.

8. The method of claim 7 wherein the flow resistance index is based on the differential pressure across the flow-circuit element divided by the flow rate of the fluid through the flow-circuit element raised to the power of an index parameter.

9. The method of claim 6 wherein the flow-circuit element is an adjustable valve, and wherein monitoring includes monitoring an operational condition of the adjustable valve with the control system.

10. The method of claim 6 wherein the flow resistance index is based on the differential pressure across the flow-circuit element divided by the flow rate of the fluid through the flow-circuit element raised to the power of an index parameter.

11. The method of claim 9 wherein the flow resistance index is based on the differential pressure across the flow-circuit element divided by the flow rate of the fluid through the flow-circuit element raised to the power of an index parameter.

12. The system of claim 4 wherein the flow resistance index is based on the differential pressure across the flow-circuit element divided by the flow rate of the fluid through the flow-circuit element raised to the power of an index parameter.

Assignees

• Nikon Corp

Inventors

• Nagata Takashi

Classifications

• F15B2211/615

  Filtering means · CPC title

• B24C7/0007

  the abrasive material being fed in a liquid carrier · CPC title

• F15B2211/8636

  Circuit failure, e.g. valve or hose failure · CPC title

• B01D35/143 Primary

  Filter condition indicators · CPC title

• F15B2211/857

  Monitoring of fluid pressure systems · CPC title