Apparatus for adjusting a pedestal assembly for a reactor

Patent metadata

Field	Value
Publication number	US-11088015-B2
Application number	US-201816210440-A
Country	US
Kind code	B2
Filing date	Dec 5, 2018
Priority date	Jul 21, 2014
Publication date	Aug 10, 2021
Grant date	Aug 10, 2021

Abstract

The invention is directed to an alignment assembly for changing the relative position of a plate of a pedestal assembly with respect to a processing chamber of a reactor. The alignment assembly is connected at a first end to a riser shaft of the heating assembly and at a second end to a drive shaft. One or more portions of the alignment assembly may be selectively axially rotated or laterally moved change the relative position of the plate with respect to the processing chamber as desired.

First claim

The invention claimed is:

1. An alignment assembly adapted to connect a riser shaft of a pedestal assembly to a drive shaft, wherein the riser shaft includes a longitudinal central riser axis extending through the center of the riser shaft, and wherein the drive shaft includes a longitudinal central drive axis extending through the center of the drive shaft, the alignment assembly comprising:
an axial adjustment assembly having a first portion, and wherein selective axial rotation of the first portion of the axial adjustment assembly changes the orientation of the riser axis with respect to the drive axis; and
a concentric adjustment assembly;
wherein the axial adjustment assembly further includes measurement indicia having a series of spaced apart lines with an upper portion disposed on an upper plate, a middle portion disposed on a middle plate, and a lower portion disposed on a lower plate.

2. The alignment assembly of claim 1 , wherein the first portion includes a non-uniform cross-sectional thickness.

3. The alignment assembly of claim 2 , wherein the axial adjustment assembly further includes a cam surface on the first portion and a second portion, and wherein selective axial rotation of the first portion cams the cam surface of the first portion against the second portion to change the orientation of the riser axis with respect to the drive axis.

4. The alignment assembly of claim 2 , wherein the first portion that includes the non-uniform cross-sectional thickness is a circular plate.

5. The alignment assembly of claim 4 , wherein rotation of the circular plate about the longitudinal central drive axis causes the alignment assembly to changes the angular position of the alignment assembly relative to a plate.

6. The alignment assembly of claim 5 , wherein the circular plate is beneath the plate.

7. The alignment assembly of claim 4 , wherein rotation of the circular plate about the longitudinal central drive axis causes the alignment assembly to changes the angular position of the alignment assembly relative to a processing chamber.

8. The alignment assembly of claim 7 , wherein the circular plate is beneath the processing chamber.

9. The alignment assembly of claim 1 , wherein the axial adjustment assembly defines an actuation recess adapted to removably receive a key therein.

10. The alignment assembly of claim 1 , wherein selective movement of a third portion changes the orientation of the riser axis with respect to the drive axis.

11. The alignment assembly of claim 10 , wherein the third portion is a riser flange secured to the riser shaft, and wherein the axial adjustment assembly is connected to the riser flange.

12. The alignment assembly of claim 10 , further comprising a screw disposed in a channel defined by the riser flange, and wherein rotation of the screw actuates movement of the riser flange.

13. The alignment assembly of claim 1 , wherein the concentric adjustment assembly includes:
a riser flange.

14. The alignment assembly of claim 1 , wherein the axial adjustment assembly includes: three generally circular plates abutting one another.

15. The alignment assembly of claim 1 , wherein the axial adjustment assembly defines a series of actuation recesses adapted to effectuate application of torque to rotate a portion of the axial adjustment assembly about the longitudinal central drive axis.

Assignees

• Asm Ip Holding Bv

Inventors

• Halpin Michael

Classifications

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/7626 Primary

  characterised by the construction of the shaft · CPC title

• B23P19/04

  for assembling or disassembling parts · CPC title

• F16D1/033

  by clamping together two faces perpendicular to the axis of rotation, e.g. with bolted flanges · CPC title

• F16D1/02

  for connecting two abutting shafts or the like · CPC title