Laser crystallization device

Patent metadata

Field	Value
Publication number	US-11087980-B2
Application number	US-201715466330-A
Country	US
Kind code	B2
Filing date	Mar 22, 2017
Priority date	Jun 14, 2016
Publication date	Aug 10, 2021
Grant date	Aug 10, 2021

Abstract

A laser crystallization method includes exciting gas medium in an airtight container to generate laser beams; amplifying the laser beams by reflecting the laser beams between a high reflection mirror and a low reflection mirror respectively disposed facing opposite end portions of the airtight container, wherein a first transparent window and a second transparent window are fixed to respective end portions of the airtight container, and outputting the amplified laser beams; and disposing a cleaning mirror in a path of the laser beams that have propagated through the second transparent window.

First claim

What is claimed is:

1. A laser crystallization method, comprising:
exciting a gas medium in an airtight container wherein laser beams are generated;
amplifying the laser beams by reflecting the laser beams between a first high reflection mirror and a low reflection mirror respectively disposed facing opposite end portions of the airtight container, wherein a first transparent window and a second transparent window are fixed to respective end portions of the airtight container; and
outputting the amplified laser beams through the second transparent window and the low reflection mirror, wherein the amplified laser beams are irradiated onto a target; and
disposing a second high reflection mirror in a path of the laser beams that have propagated through the second transparent window, wherein the laser beams are reflected back into the airtight container through the second transparent window,
wherein the second high reflection mirror is moved away from the path of laser beams during the outputting of the amplified laser beams,
wherein the low reflection mirror and the second high reflection mirror are combined with a driving means that is configured to dispose the second high reflection mirror in the path of the laser beams and to move the second high reflection mirror away from the path of the laser beams.

2. The laser crystallization method of claim 1 , wherein
outputting the amplified laser beams is a running state wherein the laser beams are irradiated to an irradiation target, and
disposing the second high reflection mirror is an idle state of waiting for a next output run.

3. The laser crystallization method of claim 1 , wherein
the driving means displaces the second high reflection mirror between a first position in the path of the laser beams and a second position away from and out of the path of the laser beams.

4. The laser crystallization method of claim 3 , wherein
The driving means includes a driving motor and a mirror frame that is rotated by the driving motor and that fixes the second high reflection mirror, and
the second high reflection mirror is displaced between the first position and the second position by rotation of the mirror frame.

5. The laser crystallization method of claim 3 , wherein
The driving means includes a driving motor and a mirror frame that is linearly displaced by the driving motor and that fixes the second high reflection mirror, and
the second high reflection mirror is displaced between the first position and the second position by linear motion of the mirror frame.

6. The laser crystallization method of claim 1 , wherein
the driving means exchanges positions of the low reflection mirror and the second high reflection mirror between outputting the amplified laser beams and disposing the second high reflection mirror.

7. The laser crystallization method of claim 6 , wherein
the driving means includes a driving motor and a mirror frame that is rotated by the driving motor and that fixes the low reflection mirror and the second high reflection mirror, and
the positions of the low reflection mirror and the second high reflection mirror are exchanged by rotating the mirror frame.

8. The laser crystallization method of claim 1 , wherein
the low reflection mirror is moved away from the path of laser beams when disposing the second high reflection mirror.

9. The laser crystallization method of claim 8 , wherein
the driving means includes a driving motor and a mirror frame that is linearly translated by the driving motor and that fixes the low reflection mirror and the second high reflection mirror, and
one of the low reflection mirror and the second high reflection mirror is disposed to face the second transparent window by linear translation of the mirror frame.

10. A laser crystallization device, comprising:
an airtight container that is a gas laser device charged with a gas medium,
a first transparent window and a second transparent window fixed to respective end portions of the airtight container that face each other along a center axis of the airtight container;
a first high reflection mirror installed outside the first transparent window and a low reflection mirror installed outside the second transparent window, wherein the low reflection mirror has a reflectivity that is lower than its transmittance;
a second high reflection mirror; and
a driving means that includes a driving motor and a mirror frame and that is combined with the low reflection mirror and the second high reflection mirror, wherein
during a running state, laser beams are output from the airtight container through the second transparent window and the low reflection mirror to an irradiation target, and the second high reflection mirror is positioned by the driving means away from and out of a path of laser beams output from the airtight container, and
during an idle state, the second high reflection mirror is disposed by the driving means in the path of the laser beams output from the airtight container, wherein the laser beams are reflected back into the airtight container through the second transparent window.

11. The laser crystallization device of claim 10 , further comprising a shutter that transmits laser beams propagating through the low reflection mirror in the running state, and blocks laser beams propagating through the low reflection mirror in the running state, and blocks in the idle state.

12. The laser crystallization device of claim 10 , wherein one of the low reflection mirror and the second high reflection mirror is disposed in the path of the laser beams by operation of the driving motor.

13. The laser crystallization device of claim 12 , wherein
the mirror frame is rotated by the driving motor and that fixes the low reflection mirror and the second high reflection mirror, and
the positions of the low reflection mirror and the second high reflection mirror are exchanged by rotating the mirror frame.

14. The laser crystallization device of claim 12 , wherein
the mirror frame is linearly translated by the driving motor and that fixes the low reflection mirror and the second high reflection mirror, and
one of the low reflection mirror and the second high reflection mirror is disposed to face the second transparent window by linear translation of the mirror frame.

15. The laser crystallization device of claim 10 , wherein
the driving means displaces the second high reflection mirror between a first position in the path of the laser beams and a second position away from and out of the path of the laser beams.

16. The laser crystallization device of claim 15 , wherein
the mirror frame is rotated by the driving motor and that fixes the second high reflection mirror, and
the second high reflection mirror is displaced between the first position and the second position by rotation of the mirror frame.

17. The laser crystallization device of claim 15 , wherein
the mirror frame is linearly displaced by the driving motor and that fixes the second high reflection mirror, and
the second high reflection mirror is displaced between the first position and the second position by linear motion of the mirror frame.

18. The laser crystallization device of claim 10 , wherein the laser beams reflected back into the airtight container remove contamination material attached to an internal side of the second transparent window.

19. The laser crystallization device of claim 10 , further comprising:
a pair of electrodes symmetrically disposed with respect to the center axis of the airtight co

Assignees

• Samsung Display Co Ltd

Inventors

• So Byung Soo
• Kang Mee Jae
• Lee Ho Seok
• Lim Jae Gyun
• Jeon Sang Ho
• Jeon Yeon Hee

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H10P14/3808 Primary

  using laser beams · CPC title

• H10P34/42 Primary

  with electromagnetic radiation, e.g. laser annealing (laser cutting H10P54/20) · CPC title

• H10D86/0223

  comprising crystallisation of amorphous, microcrystalline or polycrystalline semiconductor materials · CPC title

• H01S3/0346 Primary

  Protection of windows or mirrors against deleterious effects (cooling arrangements H01S3/0401) · CPC title