Prism-coupling systems and methods for characterizing large depth-of-layer waveguides
US-2015338308-A1 · Nov 26, 2015 · US
US11079280B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11079280-B2 |
| Application number | US-201815971455-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 4, 2018 |
| Priority date | Oct 30, 2013 |
| Publication date | Aug 3, 2021 |
| Grant date | Aug 3, 2021 |
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Apparatus and methods for measuring mode spectra for ion-exchanged glass substrates having a steep index region are disclosed. An interfacing fluid is provided between the coupling prism and the glass substrate. The interfacing fluid thickness is selected so that the variation in modal birefringence with fluid thickness is reduced to an acceptable level. The coupling prism can include a prism coating on the coupling surface so that the substrate-prism interface includes the prism coating. The coupling prism can also include stand-off members that serve to define the thickness of the interfacing fluid.
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What is claimed is: 1. A coupling prism apparatus for a prism coupling system for measuring mode spectra of an ion-exchanged waveguide having a refractive index n s , comprising: a coupling prism having a coupling prism body with a refractive index n p , an input surface, an output surface and a coupling surface; a light source configured to emit and direct measurement light to the input surface of the coupling prism, the measurement light having a vacuum wavelength λ; a prism coating on the coupling surface, the prism coating having a thickness d 2 and refractive index n c wherein 0.2λ≤n c ·d2≤0.8λ; a substrate having a substrate body with a substrate surface, wherein the substrate body comprises the ion-exchanged waveguide adjacent the substrate surface; an interfacing fluid of refractive index n f disposed between the prism coating and the substrate surface to define a prism-substrate interface through which the measurement light is directed via the input surface of the coupling prism when measuring the mode spectra; and wherein n c <n f <n s <n p . 2. The coupling prism apparatus of claim 1 , wherein the prism coating thickness increases in thickness in the direction from the input surface to the output surface. 3. The coupling prism apparatus of claim 1 , further comprising: one or more stand-off members disposed between the substrate surface and the prism coating to define a thickness of the interfacing fluid. 4. The coupling prism apparatus of claim 1 , wherein the interfacing fluid comprises an oil and has a thickness d 1 , and at least one of the interfacing fluid thickness d 1 and the prism coating thickness d 2 is constant. 5. The coupling prism apparatus of claim 3 , wherein at least one of the thickness of the interfacing fluid and the prism coating thickness d 2 is constant. 6. The coupling prism apparatus of claim 1 , wherein the interfacing fluid has a thickness d 1 and a median thickness d 1 m , and wherein (0.5)·d 1 m ≤d 1 ≤(1.5)·d 1 m. 7. The coupling prism apparatus of claim 1 , wherein (n s −0.01)≤n f ≤n s . 8. The coupling prism apparatus of claim 1 , wherein the substrate comprises glass. 9. The coupling prism apparatus of claim 1 , wherein the substrate comprises in-diffused K + and Ag + ions that form the ion-exchanged waveguide. 10. The coupling prism apparatus of claim 1 , wherein the prism coating comprises at least one of SiO 2 , CaF 2 , and MgF 2 . 11. The coupling prism apparatus of claim 1 , wherein 0.45λ≤n c ·d 2 ≤0.8λ. 12. The coupling prism apparatus of claim 1 , wherein the ion-exchanged waveguide defines in the substrate body a refractive index profile n(x) with a steep and shallow near-surface region R 1 , wherein the refractive index profile n(x) in the steep and shallow near-surface region R 1 satisfies (λ/n)[dn(x)/dx]≥0.0004. 13. The coupling prism apparatus of claim 1 , wherein the vacuum wavelength of the measurement light comprises either a near ultraviolet wavelength, a visible wavelength or an infrared wavelength.
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