Strain sensor unit and skin sensor module comprising the same

Patent metadata

Field	Value
Publication number	US-11076775-B2
Application number	US-201916372150-A
Country	US
Kind code	B2
Filing date	Apr 1, 2019
Priority date	Nov 9, 2017
Publication date	Aug 3, 2021
Grant date	Aug 3, 2021

Abstract

A strain sensor unit and a skin sensor module comprising the same are provided. The strain sensor unit according to an embodiment of the present disclosure includes a substrate having a through-hole, and including a first electrode and a second electrode formed at one side and the other side of the through-hole on one surface of the substrate, a piezoelectric device drawn from the first electrode and extending inward the through-hole, and a piezoresistor drawn from the second electrode and extending inward the through-hole, wherein the piezoresistor overlaps with a whole or part of the piezoelectric device.

First claim

What is claimed is:

1. A skin sensor module comprising:
a substrate having a plurality of through-holes; and
a plurality of strain sensor units located at the plurality of through-holes, respectively, each strain sensor unit comprising:
a piezoelectric device located at one side of the through-hole on the substrate, and extending toward another side of the through-hole;
a piezoresistor located at another side of the through-hole on the substrate, and extending toward one side of the through-hole;
a first electrode located on the piezoelectric device; and
a second electrode located on the piezoresistor,

wherein the piezoresistor overlaps with a whole or part of the piezoelectric device, and
wherein the piezoresistor is a nanocrack-control based metal piezoresistive device.

2. The skin sensor module according to claim 1 , wherein the piezoelectric device is a piezoelectric semiconductor.

3. The skin sensor module according to claim 1 , wherein an interfacial layer made of amorphous oxide semiconductor is further formed on a contact surface between the piezoelectric device and the piezoresistor.

4. The skin sensor module according to claim 1 , wherein the substrate has a plurality of air permeable holes having the diameter of 50 to 150 pm.

5. The skin sensor module according to claim 4 , wherein a distance between the plurality of air permeable holes is 50 to 150 μm.

6. The skin sensor module according to claim 4 , wherein all or some of the plurality of air permeable holes comprise the plurality of through-holes.

7. The skin sensor module according to claim 1 , wherein the substrate is made of a material including polydimethylsiloxane (PDMS).

8. The skin sensor module according to claim 1 , wherein a plurality of micro suction cups is patterned on a surface opposite to one surface of the substrate to be attached to the skin.

9. The skin sensor module according to claim 1 , wherein the plurality of strain sensor units are arranged at centers of the plurality of through-holes that are formed on the substrate, respectively, and
wherein the plurality of strain sensor units are arranged on the substrate in at least one array structure of a radial array structure, a linear array structure, a curved array structure, a crossed array structure, a circular array structure, a rectangular array structure, and a polygonal array structure.

Assignees

• Amorepacific Corp
• Massachusetts Inst Technology

Inventors

• Han Jiyeon
• Yeun Han-Wool
• Kim Eunjoo
• Kim Jeehwan
• Lee Kyusang
• Lee Haekwang

Classifications

• A61B5/443 Primary

  Evaluating skin constituents, e.g. elastin, melanin, water · CPC title

• G01L5/167

  using piezoelectric means · CPC title

• G01L1/16

  using properties of piezoelectric devices · CPC title

• A61B5/103 Primary

  Measuring devices for testing the shape, pattern, {colour,} size or movement of the body or parts thereof, for diagnostic purposes (measuring instruments specially adapted for dentistry A61C19/04) · CPC title

• A61B5/442 Primary

  Evaluating skin mechanical properties, e.g. elasticity, hardness, texture, wrinkle assessment · CPC title