Optical device having a substrate and a laser unit that emits light into the substrate

Patent metadata

Field	Value
Publication number	US-11075500-B2
Application number	US-201816145349-A
Country	US
Kind code	B2
Filing date	Sep 28, 2018
Priority date	Nov 30, 2012
Publication date	Jul 27, 2021
Grant date	Jul 27, 2021

Abstract

An optical device includes a first substrate, having first and second surfaces, and a second substrate having a third surface. The first substrate includes: a laser unit, having an active layer and emitting light into the first substrate from the active layer; a reflecting mirror, having a plane obliquely intersecting an optical axis of light emitted from the laser unit, and being formed on the first surface so as to reflect the light toward the second surface; and a convex lens, being formed in a region on the second surface, the region including an optical axis of the light reflected by the reflecting mirror. The second substrate is provided with a grating coupler and an optical waveguide on the third surface, the optical waveguide having light incident on the grating coupler propagating therethrough.

First claim

What is claimed is:

1. An optical device comprising:
a first substrate formed of a semiconductor material and having a first surface and a second surface which is a rear surface of the first surface, the first substrate comprising:
a laser unit having an active layer laminated between the first surface and the second surface and emitting light into the first substrate from the active layer,
wherein the light emitted from the laser unit has a first optical axis;

a reflecting mirror, having a plane obliquely intersecting the first optical axis, provided on the first surface reflecting the light emitted from the laser unit and propagating the light emitted from the laser unit toward the second surface,
wherein an angle between the first optical axis and a normal line of the reflecting mirror is greater than 45 degrees; and

a convex lens integrally provided within a region of the second surface,
the region including a second optical axis of the light reflected by the reflecting mirror; and

a second substrate having a third surface facing the second surface, and being provided with a grating coupler and an optical waveguide on the third surface thereof,
wherein the light, incident on the grating coupler, propagates through the optical waveguide,
wherein the second optical axis obliquely intersects the convex lens,
wherein the second optical axis is shifted from an axis penetrating a center of the convex lens by an offset distance of 18 μm or less and greater than zero, and
wherein a third optical axis of the light, after being reflected by the reflecting mirror and passing through the convex lens, is incident on the grating coupler and obliquely intersects a normal direction of the grating coupler.

2. The optical device according to claim 1 , wherein the angle between the first optical axis and the normal line of the reflecting mirror is less than or equal to 48 degrees.

3. The optical device according to claim 1 , wherein the offset distance is configured to be greater than 5 μm.

4. The optical device according to claim 1 , further comprising:
an isolator disposed between the first substrate and the second substrate and on a light path of the light after having passed through the convex lens.

5. The optical device according to claim 1 , wherein the first substrate comprises a plurality of integrated laser element units and a plurality of integrated waveguide circuit units are formed on the second substrate,
wherein each integrated laser element unit, of the plurality of integrated laser element units, includes a corresponding laser unit, a corresponding reflecting mirror, and a corresponding convex lens,
wherein each integrated waveguide circuit unit, of the plurality of integrated waveguide circuit units, includes a corresponding grating coupler and a corresponding optical waveguide, and
wherein light having passed through the corresponding convex lens is incident on the corresponding grating coupler.

6. The optical device according to claim 1 , wherein the angle between the first optical axis and the normal line of the reflecting mirror is a first angle,
wherein the optical axis of the light incident on the grating coupler forms a second angle, and
wherein the first angle and the offset distance are configured such that the second angle is 20 degrees or less.

7. The optical device according to claim 1 , wherein the angle between the first optical axis and the normal line of the reflecting mirror is a first angle,
wherein the first angle is configured to be 46.5 degrees,
wherein the optical axis of the light incident on the grating coupler forms a second angle, and
wherein the offset distance is configured such that the second angle is 10 degrees.

8. The optical device according to claim 7 , wherein the offset distance is configured to be 10 μm.

9. The optical device according to claim 1 , wherein the laser unit further comprises a diffraction grating.

10. The optical device according to claim 1 , wherein the first substrate further comprises:
a first electrode formed on the first surface, and
a second electrode formed on the second surface.

11. The optical device according to claim 1 , wherein the optical waveguide is a first optical waveguide; and
wherein the second substrate comprises:
a second optical waveguide,
wherein the light propagates through the second optical waveguide after propagating through the first optical waveguide.

12. The optical device according to claim 1 , wherein the first substrate further comprises:
a electrode formed on the first surface; and
wherein the optical device further comprises:
a laser submount,
wherein the first substrate is fixed to the laser submount using the electrode.

13. The optical device according to claim 1 , further comprising:
an isolator disposed between the first substrate and the second substrate, wherein the isolator comprises an isolator chip fixed to an isolator magnet.

14. The optical device according to claim 13 , wherein the isolator magnet is fixed onto the second substrate.

15. The optical device according to claim 1 , further comprising:
a U-shaped guide fixed onto the second substrate.

16. The optical device according to claim 15 , further comprising:
a laser submount fixed to the U-shaped guide,
wherein the first substrate is fixed to the laser submount.

17. The optical device according to claim 1 , further comprising:
an isolator disposed between the convex lens and the grating coupler.

18. The optical device according to claim 17 , wherein a thickness of the isolator is 1.5 mm.

19. The optical device according claim 5 , further comprising:
an isolator disposed between the plurality of integrated laser elements and the plurality of integrated waveguide circuit units.

20. The optical device according claim 5 , further comprising:
a U-shaped guide fixed onto the second substrate;
a laser submount fixed to the U-shaped guide,
wherein the first substrate is fixed to the laser submount; and

an isolator disposed between the laser submount and the second substrate.

Assignees

• Lumentum Japan Inc

Inventors

• Arimoto Hideo
• Adachi Koichiro
• Sagawa Misuzu
• Suzuki Takanori
• Sasaki Hiroyasu

Classifications

• G02B6/3518

  the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device (MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833) · CPC title

• G02B6/4219

  Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor · CPC title

• H01S5/185

  having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL] (comprising a photonic bandgap structure H01S5/11) · CPC title

• H01S5/12

  the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers (comprising a photonic bandgap structure H01S5/11; surface-emitting lasers H01S5/18) · CPC title

• H01S5/0267 Primary

  Integrated focusing lens (H01S5/18388 takes precedence) · CPC title