Radio-frequency (RF) transmission systems, devices, and methods for in situ transmission electron microscopy

Patent metadata

Field	Value
Publication number	US-11069507-B2
Application number	US-202016809736-A
Country	US
Kind code	B2
Filing date	Mar 5, 2020
Priority date	Mar 5, 2019
Publication date	Jul 20, 2021
Grant date	Jul 20, 2021

Abstract

A sample carrier for in situ transmission electron microscopy (TEM) has a dielectric substrate with a conductive layer that forms a coplanar waveguide. The coplanar waveguide has a first and second leads formed by the conductive layer. The first lead is between an adjacent pair of second leads and is spaced from the second leads by a respective gap. The coplanar waveguide is configured to transmit an electrical signal to a specimen held by the sample carrier, in particular, an electrical signal having a frequency in the radio-frequency (RF) regime (3 kHz-300 GHz), for example, up to 100 GHz. The sample carrier may be mounted to a TEM sample holder, which supports the sample carrier within a vacuum chamber of the microscope and provides electrical connection between the leads of the sample carrier and an RF source external to the vacuum chamber.

First claim

The invention claimed is:

1. A specimen assembly for in situ transmission electron microscopy (TEM), the specimen assembly comprising:
a sample carrier comprising a dielectric substrate with a conductive layer that forms a coplanar waveguide configured to transmit an electrical signal to a specimen held by the sample carrier, the coplanar waveguide having a first lead formed by the conductive layer and a pair of second leads formed by the conductive layer, the first lead being between the second leads and spaced from the second leads by respective gaps,
wherein the electrical signal has a frequency between 3 kHz and 300 GHz, inclusive.

2. The specimen assembly of claim 1 , wherein the sample carrier has a recessed portion configured to hold the specimen therein, and the first and second leads extend from a first region distal from the recessed portion to a second region adjacent to the recessed portion.

3. The specimen assembly of claim 2 , wherein a through-hole is formed within the recessed portion, the through-hole allowing an electron beam of a transmission electron microscope to pass through the sample carrier.

4. The specimen assembly of claim 2 , wherein the first lead is tapered along at least a portion of its length, such that a width of the first lead at the first region is greater than a width of the first lead at the second region.

5. The specimen assembly of claim 4 , wherein the tapered portion is greater than half of an overall length of the first lead.

6. The specimen assembly of claim 4 , wherein each second lead is tapered along at least a portion of its length, such that a width of the second lead at the first region is less than a width of the second lead at the second region.

7. The specimen assembly of claim 2 , further comprising a specimen disposed in the recessed portion, wherein at least the first lead is electrically coupled to an electrical terminal of the specimen such that the electrical signal is conveyed from the sample carrier to the electrical terminal of the specimen.

8. The specimen assembly of claim 7 , wherein the first lead is electrically coupled to the electrical terminal of the specimen via a wirebond.

9. The specimen assembly of claim 1 , further comprising:
a TEM sample holder comprising:
a head portion with a recess configured to hold the sample carrier therein;
a back end portion with a radio-frequency (RF) connector, which is configured to connect to an RF source that generates the electrical signal;
a shaft portion between the head and back end portions; and
co-axial cabling coupling the RF connector to at least the first lead,

wherein the back end portion is configured to be disposed outside a vacuum environment of a transmission electron microscope, and the head portion is configured to be disposed inside the vacuum environment of the transmission electron microscope.

10. The specimen assembly of claim 1 , wherein:
the dielectric substrate is formed by one or more of polytetrafluoroethylene (PTFE), quartz, glass-reinforced epoxy, beryllia, alumina, or gallium arsenide;
the dielectric substrate has a thickness of 500 μm or less; and
the conductive layer comprises a metal coating over a surface of the dielectric substrate.

11. The specimen assembly of claim 1 , wherein:
the dielectric substrate with the conductive layer forms multiple coplanar waveguides, each having first and second leads, and
adjacent ones of the multiple coplanar waveguides share a common second lead between the corresponding first leads.

12. A method for in situ transmission electron microscopy (TEM), comprising:
mounting a specimen to a sample carrier, which comprises a dielectric substrate with a conductive layer that forms a coplanar waveguide configured to transmit an electrical signal to a specimen held by the sample carrier, the coplanar waveguide having a first lead formed by the conductive layer and a pair of second leads formed by the conductive layer, the first lead being between the second leads and spaced from the second leads by respective gaps;
mounting the sample carrier to a TEM sample holder, which comprises a head portion, a back end portion, and a shaft portion between the head and back end portions, the sample carrier being disposed within a recess of the head portion;
installing the TEM sample holder to a transmission electron microscope such that the sample carrier with specimen is disposed within a vacuum environment of the microscope;
connecting a radio-frequency (RF) source to a connector of the TEM sample holder; and
applying one or more electrical signals from the RF source to the specimen within the transmission electron microscope via the TEM sample holder and the sample carrier, each electrical signal having a frequency between 3 kHz and 300 GHz, inclusive.

13. The method of claim 12 , further comprising:
at a same time as or in response to the applying one or more electrical signals, irradiating the specimen with an electron beam and detecting the electron beam after passing through the specimen to form a TEM image.

14. The method of claim 12 , wherein the mounting the specimen comprises wirebonding a wire between a first lead of the sample carrier and a terminal of the specimen.

15. The method of claim 12 , wherein the mounting the sample carrier to the TEM sample holder comprises coupling coaxial cabling, which extends from the connector through the shaft portion to the head portion of the TEM sample holder, to at least the first lead.

16. The method of claim 12 , wherein the dielectric substrate with the conductive layer forms multiple coplanar waveguides, each having first and second leads, and adjacent ones of the multiple coplanar waveguides share a common second lead between the corresponding first leads.

17. The method of claim 16 , wherein the mounting the specimen comprises wirebonding a wire between each first lead of the sample carrier and a corresponding terminal of the specimen.

18. The method of claim 16 , wherein:
the connecting comprises connecting the RF source to a plurality of connectors of the TEM sample holder; and
the mounting the sample carrier to the TEM sample holder comprises coupling multiple coaxial cables to the first leads, respectively,
wherein each coaxial cable extends from a respective one of the connectors through the shaft portion to the head portion of the TEM sample holder.

19. A method for in situ transmission electron microscopy (TEM), comprising:
via a sample carrier, applying one or more electrical signals from a radio-frequency (RF) source to a specimen within a vacuum chamber of a transmission electron microscope; and
at a same time or in response to the applying the one or more electrical signals, irradiating the specimen with an electron beam and detecting the electron beam after passing through the specimen,
wherein each electrical signal has a frequency between 3 kHz and 300 GHz, inclusive,
the sample carrier comprises a dielectric substrate with a conductive layer that forms multiple coplanar waveguides for transmitting the one or more electrical signals to the specimen, and
the coplanar waveguides comprise multiple first leads and second leads formed from the conductive layer, each first lead being between and spaced from a pair of adjacent second leads by respective gaps.

20. The method of claim 19 , wherein:
the one or more electrical signals are conveyed from the RF source by coaxial cables that extend from outside the vacuum chamber to respective input ends of the first leads with

Assignees

• Univ Maryland
• National Institute Of Standards And Tech
• Government Of The Us Secretary Of Commerce National Institute Of Standards And Technology

Inventors

• Katz Michael
• Schliep Karl
• Lau June
• Gorman Jason J

Classifications

• H01J2237/2008

  specially adapted for studying electrical or magnetical properties of objects · CPC title

• H01J37/20 Primary

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J37/26 Primary

  Electron or ion microscopes; Electron or ion diffraction tubes · CPC title